DE60005888D1 - Verfahren und Vorrichtung zur Druckmessung in einer CVD/CVI-Kammer - Google Patents

Verfahren und Vorrichtung zur Druckmessung in einer CVD/CVI-Kammer

Info

Publication number
DE60005888D1
DE60005888D1 DE60005888T DE60005888T DE60005888D1 DE 60005888 D1 DE60005888 D1 DE 60005888D1 DE 60005888 T DE60005888 T DE 60005888T DE 60005888 T DE60005888 T DE 60005888T DE 60005888 D1 DE60005888 D1 DE 60005888D1
Authority
DE
Germany
Prior art keywords
cvd
pressure measurement
cvi chamber
cvi
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60005888T
Other languages
English (en)
Other versions
DE60005888T2 (de
Inventor
Robert A Fiala
Roger A Ross
Patrick C Trujillo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Goodrich Corp
Original Assignee
Goodrich Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goodrich Corp filed Critical Goodrich Corp
Publication of DE60005888D1 publication Critical patent/DE60005888D1/de
Application granted granted Critical
Publication of DE60005888T2 publication Critical patent/DE60005888T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F27D2019/0006—Monitoring the characteristics (composition, quantities, temperature, pressure) of at least one of the gases of the kiln atmosphere and using it as a controlling value
    • F27D2019/0009—Monitoring the pressure in an enclosure or kiln zone
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
    • F27D2021/0007—Monitoring the pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0001—Heating elements or systems
    • F27D99/0006—Electric heating elements or system
    • F27D2099/0015—Induction heating
    • F27D2099/002—Core heating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/10—Chemical vapor infiltration, i.e. CVI
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49764—Method of mechanical manufacture with testing or indicating
    • Y10T29/49771—Quantitative measuring or gauging
    • Y10T29/49776—Pressure, force, or weight determining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
DE60005888T 1999-06-04 2000-06-02 Verfahren und Vorrichtung zur Druckmessung in einer CVD/CVI-Kammer Expired - Fee Related DE60005888T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13758799P 1999-06-04 1999-06-04
US137587P 1999-06-04

Publications (2)

Publication Number Publication Date
DE60005888D1 true DE60005888D1 (de) 2003-11-20
DE60005888T2 DE60005888T2 (de) 2004-07-29

Family

ID=22478132

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60005888T Expired - Fee Related DE60005888T2 (de) 1999-06-04 2000-06-02 Verfahren und Vorrichtung zur Druckmessung in einer CVD/CVI-Kammer

Country Status (3)

Country Link
US (1) US6383298B1 (de)
EP (1) EP1065294B1 (de)
DE (1) DE60005888T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6758909B2 (en) * 2001-06-05 2004-07-06 Honeywell International Inc. Gas port sealing for CVD/CVI furnace hearth plates
US20030233977A1 (en) * 2002-06-20 2003-12-25 Yeshwanth Narendar Method for forming semiconductor processing components
US6881262B1 (en) 2002-12-23 2005-04-19 Saint-Gobain Ceramics & Plastics, Inc. Methods for forming high purity components and components formed thereby
US6825123B2 (en) * 2003-04-15 2004-11-30 Saint-Goban Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby
US7501370B2 (en) * 2004-01-06 2009-03-10 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide wafer boats
US7424045B2 (en) * 2004-09-01 2008-09-09 Wilcox Dale R Method and apparatus for heating a workpiece in an inert atmosphere or in vacuum
US20070269597A1 (en) * 2006-05-17 2007-11-22 Honeywell International Inc. Modified CVD cooling loop
TWI421965B (zh) * 2007-12-20 2014-01-01 Saint Gobain Ceramics 處理半導體製程元件之方法及其形成之元件
US10689753B1 (en) 2009-04-21 2020-06-23 Goodrich Corporation System having a cooling element for densifying a substrate
US20110091700A1 (en) * 2009-10-20 2011-04-21 Saint-Gobain Ceramics & Plastics, Inc. Microelectronic processing component having a corrosion-resistant layer, microelectronic workpiece processing apparatus incorporating same, and method of forming an article having the corrosion-resistant layer
KR20130107001A (ko) * 2012-03-21 2013-10-01 엘지이노텍 주식회사 증착 장치
CN112794715B (zh) * 2020-12-29 2022-07-08 中南大学 一种多料柱式cvi炉及飞机刹车盘制造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3995187A (en) 1971-09-07 1976-11-30 Telic Corporation Electrode type glow discharge apparatus
US4030996A (en) 1971-09-07 1977-06-21 Telic Corporation Electrode type glow discharge method and apparatus
US3884793A (en) 1971-09-07 1975-05-20 Telic Corp Electrode type glow discharge apparatus
US4031424A (en) 1971-09-07 1977-06-21 Telic Corporation Electrode type glow discharge apparatus
FR2490246A1 (fr) 1980-09-17 1982-03-19 Cit Alcatel Dispositif de deposition chimique activee sous plasma
US4573431A (en) 1983-11-16 1986-03-04 Btu Engineering Corporation Modular V-CVD diffusion furnace
US4606650A (en) 1984-11-26 1986-08-19 Domtar Inc. Microwave, a closed vessel and methods of determining volatile material content
US4609562A (en) * 1984-12-20 1986-09-02 Westinghouse Electric Corp. Apparatus and method for depositing coating onto porous substrate
US5073241A (en) 1986-01-31 1991-12-17 Kabushiki Kaisha Meidenshae Method for carbon film production
JPS6312128A (ja) 1986-03-20 1988-01-19 Toshiba Mach Co Ltd バレル型気相成長装置
US4854266A (en) 1987-11-02 1989-08-08 Btu Engineering Corporation Cross-flow diffusion furnace
US4993358A (en) 1989-07-28 1991-02-19 Watkins-Johnson Company Chemical vapor deposition reactor and method of operation
WO1992002659A1 (en) 1990-08-10 1992-02-20 Viratec Thin Films, Inc. Shielding for arc suppression in rotating magnetron sputtering systems
US5284676A (en) * 1990-08-17 1994-02-08 Carbon Implants, Inc. Pyrolytic deposition in a fluidized bed
FR2711646B1 (fr) * 1993-10-27 1996-02-09 Europ Propulsion Procédé d'infiltration chimique en phase vapeur d'une matrice pyrocarbone au sein d'un substrat poreux avec établissement d'un gradient de température dans le substrat.
FR2714076B1 (fr) * 1993-12-16 1996-03-15 Europ Propulsion Procédé de densification de substrats poreux par infiltration chimique en phase vapeur de carbure de silicium.
US5625170A (en) 1994-01-18 1997-04-29 Nanometrics Incorporated Precision weighing to monitor the thickness and uniformity of deposited or etched thin film
US5480678A (en) 1994-11-16 1996-01-02 The B. F. Goodrich Company Apparatus for use with CVI/CVD processes
EP0832863B1 (de) 1994-11-16 2002-04-03 The B.F. Goodrich Company Vorrichtung zur Druckfeld CVD/CVI, Verfahren und Produkt
DE60013208T2 (de) * 1999-06-04 2005-08-11 Goodrich Corp. Suzeptordeckel sowohl für Gasphaseninfiltration bzw. -Beschichtung als auch Wärmebehandlung

Also Published As

Publication number Publication date
EP1065294B1 (de) 2003-10-15
US6383298B1 (en) 2002-05-07
DE60005888T2 (de) 2004-07-29
EP1065294A1 (de) 2001-01-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee