DE59005653D1 - Method and device for generating ion beams with a large beam cross section. - Google Patents

Method and device for generating ion beams with a large beam cross section.

Info

Publication number
DE59005653D1
DE59005653D1 DE59005653T DE59005653T DE59005653D1 DE 59005653 D1 DE59005653 D1 DE 59005653D1 DE 59005653 T DE59005653 T DE 59005653T DE 59005653 T DE59005653 T DE 59005653T DE 59005653 D1 DE59005653 D1 DE 59005653D1
Authority
DE
Germany
Prior art keywords
section
ion beams
beam cross
large beam
generating ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59005653T
Other languages
German (de)
Inventor
Joachim Dr Janes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application granted granted Critical
Publication of DE59005653D1 publication Critical patent/DE59005653D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
DE59005653T 1989-01-05 1990-01-02 Method and device for generating ion beams with a large beam cross section. Expired - Fee Related DE59005653D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3900252A DE3900252C1 (en) 1989-01-05 1989-01-05

Publications (1)

Publication Number Publication Date
DE59005653D1 true DE59005653D1 (en) 1994-06-16

Family

ID=6371639

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3900252A Expired - Fee Related DE3900252C1 (en) 1989-01-05 1989-01-05
DE59005653T Expired - Fee Related DE59005653D1 (en) 1989-01-05 1990-01-02 Method and device for generating ion beams with a large beam cross section.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3900252A Expired - Fee Related DE3900252C1 (en) 1989-01-05 1989-01-05

Country Status (2)

Country Link
EP (1) EP0377445B1 (en)
DE (2) DE3900252C1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2764707A (en) * 1955-07-22 1956-09-25 Richard B Crawford Ion source
US3005931A (en) * 1960-03-29 1961-10-24 Raphael A Dandl Ion gun
DE2942386C2 (en) * 1979-10-19 1984-01-12 Ulrich Dr. 8000 München Boesl Ion source
US4737688A (en) * 1986-07-22 1988-04-12 Applied Electron Corporation Wide area source of multiply ionized atomic or molecular species
DE3708716C2 (en) * 1987-03-18 1993-11-04 Hans Prof Dr Rer Nat Oechsner HIGH FREQUENCY ION SOURCE

Also Published As

Publication number Publication date
EP0377445A3 (en) 1991-07-03
EP0377445A2 (en) 1990-07-11
EP0377445B1 (en) 1994-05-11
DE3900252C1 (en) 1990-05-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee