DE58907402D1 - Metallization process. - Google Patents

Metallization process.

Info

Publication number
DE58907402D1
DE58907402D1 DE89121600T DE58907402T DE58907402D1 DE 58907402 D1 DE58907402 D1 DE 58907402D1 DE 89121600 T DE89121600 T DE 89121600T DE 58907402 T DE58907402 T DE 58907402T DE 58907402 D1 DE58907402 D1 DE 58907402D1
Authority
DE
Germany
Prior art keywords
metallization process
metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89121600T
Other languages
German (de)
Inventor
Hilmar Dr Esrom
Ulrich Dr Kogelschatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Application granted granted Critical
Publication of DE58907402D1 publication Critical patent/DE58907402D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1603—Process or apparatus coating on selected surface areas
    • C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1646—Characteristics of the product obtained
    • C23C18/165—Multilayered product
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Electrochemistry (AREA)
  • Chemically Coating (AREA)
  • Catalysts (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE89121600T 1988-11-29 1989-11-23 Metallization process. Expired - Fee Related DE58907402D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3840199A DE3840199C2 (en) 1988-11-29 1988-11-29 Process for structuring metal layers that are catalytically active in electroless metallization by means of UV radiation

Publications (1)

Publication Number Publication Date
DE58907402D1 true DE58907402D1 (en) 1994-05-11

Family

ID=6368086

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3840199A Expired - Fee Related DE3840199C2 (en) 1988-11-29 1988-11-29 Process for structuring metal layers that are catalytically active in electroless metallization by means of UV radiation
DE89121600T Expired - Fee Related DE58907402D1 (en) 1988-11-29 1989-11-23 Metallization process.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3840199A Expired - Fee Related DE3840199C2 (en) 1988-11-29 1988-11-29 Process for structuring metal layers that are catalytically active in electroless metallization by means of UV radiation

Country Status (3)

Country Link
EP (1) EP0374505B1 (en)
JP (1) JPH03122287A (en)
DE (2) DE3840199C2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4035080A1 (en) * 1990-11-05 1992-05-07 Abb Patent Gmbh METHOD AND DEVICE FOR PRODUCING PARTIAL METAL LAYERS
JP3259310B2 (en) 1992-02-25 2002-02-25 株式会社デンソー Plating method and tubular coil obtained by this plating method
JP3153682B2 (en) * 1993-08-26 2001-04-09 松下電工株式会社 Circuit board manufacturing method
US6602653B1 (en) 2000-08-25 2003-08-05 Micron Technology, Inc. Conductive material patterning methods
US6451685B1 (en) 2001-02-05 2002-09-17 Micron Technology, Inc. Method for multilevel copper interconnects for ultra large scale integration
KR101507769B1 (en) 2013-10-10 2015-04-07 경기대학교 산학협력단 Reduction Method of Oxide and Apparatus for Reducing Oxide Using the Same
CN110091069B (en) * 2019-04-09 2021-09-24 大族激光科技产业集团股份有限公司 Laser deplating method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993491A (en) * 1973-12-07 1976-11-23 Surface Technology, Inc. Electroless plating
US4241105A (en) * 1979-12-17 1980-12-23 Western Electric Company, Inc. Method of plating the surface of a substrate
DE3008434A1 (en) * 1980-03-03 1981-09-17 Schering Ag Berlin Und Bergkamen, 1000 Berlin METHOD FOR SELECTIVE CHEMICAL AND / OR GALVANIC DEPOSITION OF METAL COATINGS, ESPECIALLY FOR THE PRODUCTION OF PRINTED CIRCUITS
US4304849A (en) * 1980-05-16 1981-12-08 Western Electric Co., Inc. Methods of depositing metallic copper on substrates
US4410569A (en) * 1980-06-13 1983-10-18 Minnesota Mining And Manufacturing Company Palladium (II) bis(hexafluoroacetylacetonate), adducts derived therefrom and uses thereof
DE3337856A1 (en) * 1983-10-18 1985-04-25 Bayer Ag, 5090 Leverkusen METHOD FOR ACTIVATING SUBSTRATES FOR CURRENT METALIZATION
EP0167326B1 (en) * 1984-06-29 1989-11-15 Hitachi Chemical Co., Ltd. Sensitizing agent for electroless plating and method for sensitizing substrate with the agent
DE58907207D1 (en) * 1988-07-02 1994-04-21 Heraeus Noblelight Gmbh Process for the production of metallic layers.

Also Published As

Publication number Publication date
DE3840199A1 (en) 1990-05-31
EP0374505A3 (en) 1990-07-04
EP0374505A2 (en) 1990-06-27
EP0374505B1 (en) 1994-04-06
JPH03122287A (en) 1991-05-24
DE3840199C2 (en) 1994-12-01

Similar Documents

Publication Publication Date Title
DE69003513D1 (en) Hole completion process.
DE3850551D1 (en) Machining process.
DE68902080D1 (en) REDUCTIVE ALKYLATION METHOD.
DE3861471D1 (en) COATING PROCESS.
ATE99664T1 (en) HYDROFORMYLATION PROCESS.
DE58900407D1 (en) METHOD FOR CLEANING ROHARGON.
DE69001292D1 (en) COATING PROCESS.
DE68902806D1 (en) COATING PROCESS.
DE68914485D1 (en) Process for the metallization of fiber objects.
FI900684A0 (en) PROCESS FOER FRAMSTAELLNING AV POLYALUMINIUMFOERENINGAR.
DE69009686D1 (en) Combustion process.
FI903063A0 (en) Coating method.
DE58902718D1 (en) PROCESS SYSTEM.
DE58905112D1 (en) METHOD FOR PRODUCING GRANULES.
DE68901508D1 (en) METHOD FOR WEIGHTING.
FI920196A0 (en) MILJOEVAENLIGARE PROCESS FOER BLEKNING AV LIGNOCELLULOSAMATERIAL.
DE3774704D1 (en) COATING PROCESS.
FI902711A0 (en) Coating method.
DE58901598D1 (en) METHOD FOR OBTAINING ROHARGON.
DE68918602D1 (en) Electroanalytical process.
DE69105946D1 (en) PROCESS FOR MULTIPURBING.
DE68909457D1 (en) COATING PROCESS.
ATE95145T1 (en) MOLLUSC CONTROL METHODS.
DE68913654D1 (en) Molding process.
DE68901000D1 (en) COATING PROCESS.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee