DE502005008949D1 - VALVE FOR THE STEAM-DENSIFIED DECOUPLING OF TWO CONNECTED PROCESS UNITS - Google Patents

VALVE FOR THE STEAM-DENSIFIED DECOUPLING OF TWO CONNECTED PROCESS UNITS

Info

Publication number
DE502005008949D1
DE502005008949D1 DE200550008949 DE502005008949T DE502005008949D1 DE 502005008949 D1 DE502005008949 D1 DE 502005008949D1 DE 200550008949 DE200550008949 DE 200550008949 DE 502005008949 T DE502005008949 T DE 502005008949T DE 502005008949 D1 DE502005008949 D1 DE 502005008949D1
Authority
DE
Germany
Prior art keywords
valve
vapor
process units
duct
densified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE200550008949
Other languages
German (de)
Inventor
Lutz Gottsmann
Ulf Seyfert
Bernd-Dieter Wenzel
Reinhard Jaeger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Von Ardenne Anlagentechnik GmbH
Original Assignee
Von Ardenne Anlagentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Von Ardenne Anlagentechnik GmbH filed Critical Von Ardenne Anlagentechnik GmbH
Publication of DE502005008949D1 publication Critical patent/DE502005008949D1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F16K1/38—Valve members of conical shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/025—Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6606—With electric heating element

Abstract

A valve is used for vapor-tightly disconnecting two interconnected process units. The valve comprises a continuous duct which connects two vacuum evaporators that are individually provided with an outer vapor-proof jacket, and a blocking mechanism mounted in the duct. In order to allow the two interconnected vacuum evacuators to be disconnected in a vapor-proof manner such that the functional reliability is improved, a vapor-impinged surface of the valve duct is provided with a vapor condensation-repellent zone which is connected in a thermally conducting manner to a heating apparatus that envelopes the valve.
DE200550008949 2004-04-27 2005-04-16 VALVE FOR THE STEAM-DENSIFIED DECOUPLING OF TWO CONNECTED PROCESS UNITS Expired - Fee Related DE502005008949D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102004020844 2004-04-27
DE200410041853 DE102004041853B8 (en) 2004-04-27 2004-08-27 Valve for the vapor-tight decoupling of two interconnected process units
PCT/DE2005/000701 WO2005106303A1 (en) 2004-04-27 2005-04-16 Valve used for vapor-tightly disconnecting two interconnected process units

Publications (1)

Publication Number Publication Date
DE502005008949D1 true DE502005008949D1 (en) 2010-03-25

Family

ID=34967088

Family Applications (2)

Application Number Title Priority Date Filing Date
DE200410041853 Expired - Fee Related DE102004041853B8 (en) 2004-04-27 2004-08-27 Valve for the vapor-tight decoupling of two interconnected process units
DE200550008949 Expired - Fee Related DE502005008949D1 (en) 2004-04-27 2005-04-16 VALVE FOR THE STEAM-DENSIFIED DECOUPLING OF TWO CONNECTED PROCESS UNITS

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE200410041853 Expired - Fee Related DE102004041853B8 (en) 2004-04-27 2004-08-27 Valve for the vapor-tight decoupling of two interconnected process units

Country Status (8)

Country Link
US (1) US20070209710A1 (en)
EP (1) EP1743113B1 (en)
JP (1) JP2007536471A (en)
KR (1) KR100972070B1 (en)
AT (1) ATE456759T1 (en)
CA (1) CA2564259A1 (en)
DE (2) DE102004041853B8 (en)
WO (1) WO2005106303A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6170298B2 (en) * 2012-12-27 2017-07-26 川崎重工業株式会社 Saccharification reaction equipment
CN105221754B (en) * 2014-06-13 2018-06-29 合肥艾普拉斯环保科技有限公司 Leakproof discharge valve
US9951884B2 (en) * 2014-12-02 2018-04-24 Huo Jhih Co., Ltd. Temperature control valve
US9851020B2 (en) * 2014-12-11 2017-12-26 Goodrich Corporation Heated valve
JP6556802B2 (en) * 2017-10-13 2019-08-07 キヤノントッキ株式会社 Vacuum equipment, vapor deposition equipment and gate valve

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3028874A (en) * 1959-11-02 1962-04-10 Dow Chemical Co Valve
US3211169A (en) * 1963-10-01 1965-10-12 James E Webb Shrink-fit gas valve
DE3422589A1 (en) * 1984-06-18 1985-12-19 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar HIGH PRESSURE VACUUM VALVE
JPS62177371A (en) * 1986-01-31 1987-08-04 Toshiba Corp Valve
DE4106762A1 (en) * 1991-03-04 1992-09-10 Leybold Ag VALVE, PREFERABLY VACUUM VALVE
DE4202125A1 (en) * 1992-01-27 1993-07-29 Bruker Franzen Analytik Gmbh INLET VALVE FOR A HIGH VACUUM ANALYZER WITH BYPASS PUMPING
JP2655576B2 (en) * 1992-09-30 1997-09-24 信越半導体株式会社 Isolation valve in single crystal pulling device
TW505829B (en) * 1992-11-16 2002-10-11 Dupont Photomasks Inc A transmissive embedded phase shifter-photomask blank
US5678595A (en) * 1995-12-21 1997-10-21 Benkan Corporation Vacuum exhaust valve
DE69511567T2 (en) * 1995-12-21 1999-12-02 Benkan Corp Vacuum outlet valve
US5915410A (en) * 1996-02-01 1999-06-29 Zajac; John Pneumatically operated positive shutoff throttle valve
JP3924867B2 (en) * 1997-10-15 2007-06-06 Ｓｍｃ株式会社 Uniform heating device for high vacuum valve body
JP2001004062A (en) * 1999-06-17 2001-01-09 Benkan Corp Flow control valve
JP3390708B2 (en) * 1999-11-22 2003-03-31 メガトール株式会社 Broadband variable conductance valve
JP2001349468A (en) * 2000-06-06 2001-12-21 Smc Corp Opening and closing valve
JP3769495B2 (en) * 2001-11-26 2006-04-26 Ｓｍｃ株式会社 Poppet valve with heater
JP3778851B2 (en) * 2001-12-25 2006-05-24 Ｓｍｃ株式会社 Poppet valve with heater
JP3778866B2 (en) * 2002-03-20 2006-05-24 Ｓｍｃ株式会社 Vacuum valve with heater
US7021329B2 (en) * 2003-06-11 2006-04-04 Itt Manufacturing Enterprises, Inc. Vaporizing pressure regulator

Also Published As

Publication number Publication date
DE102004041853B8 (en) 2008-07-10
CA2564259A1 (en) 2005-11-10
KR100972070B1 (en) 2010-07-22
WO2005106303A1 (en) 2005-11-10
DE102004041853B4 (en) 2008-01-31
US20070209710A1 (en) 2007-09-13
EP1743113A1 (en) 2007-01-17
JP2007536471A (en) 2007-12-13
KR20080112371A (en) 2008-12-24
ATE456759T1 (en) 2010-02-15
EP1743113B1 (en) 2010-01-27
DE102004041853A1 (en) 2005-11-17

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee