DE69511567T2 - Vacuum outlet valve - Google Patents
Vacuum outlet valveInfo
- Publication number
- DE69511567T2 DE69511567T2 DE69511567T DE69511567T DE69511567T2 DE 69511567 T2 DE69511567 T2 DE 69511567T2 DE 69511567 T DE69511567 T DE 69511567T DE 69511567 T DE69511567 T DE 69511567T DE 69511567 T2 DE69511567 T2 DE 69511567T2
- Authority
- DE
- Germany
- Prior art keywords
- outlet valve
- vacuum outlet
- vacuum
- valve
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19950120249 EP0780615B1 (en) | 1995-12-21 | 1995-12-21 | Vacuum exhaust valve |
CH03653/95A CH690506A5 (en) | 1995-12-21 | 1995-12-22 | Vacuum exhaust valve for chemical vapour deposition equipment used in mfr. of semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69511567D1 DE69511567D1 (en) | 1999-09-23 |
DE69511567T2 true DE69511567T2 (en) | 1999-12-02 |
Family
ID=25693533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69511567T Expired - Fee Related DE69511567T2 (en) | 1995-12-21 | 1995-12-21 | Vacuum outlet valve |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE69511567T2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10126967B4 (en) * | 2000-06-06 | 2004-07-29 | Smc K.K. | Open / close valve |
DE102004041853A1 (en) * | 2004-04-27 | 2005-11-17 | Von Ardenne Anlagentechnik Gmbh | Valve for the vapor-tight decoupling of two connected process units |
WO2022156503A1 (en) * | 2021-01-21 | 2022-07-28 | 米洛创新(深圳)有限公司 | Integration box and pneumatic high vacuum flapper valve |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115962287B (en) * | 2022-11-25 | 2023-10-27 | 无锡美瑞克阀门制造有限公司 | Inflatable sealing semicircular top valve |
-
1995
- 1995-12-21 DE DE69511567T patent/DE69511567T2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10126967B4 (en) * | 2000-06-06 | 2004-07-29 | Smc K.K. | Open / close valve |
DE102004041853A1 (en) * | 2004-04-27 | 2005-11-17 | Von Ardenne Anlagentechnik Gmbh | Valve for the vapor-tight decoupling of two connected process units |
DE102004041853B4 (en) * | 2004-04-27 | 2008-01-31 | Von Ardenne Anlagentechnik Gmbh | Valve for the vapor-tight decoupling of two connected process units |
DE102004041853B8 (en) * | 2004-04-27 | 2008-07-10 | Von Ardenne Anlagentechnik Gmbh | Valve for the vapor-tight decoupling of two interconnected process units |
WO2022156503A1 (en) * | 2021-01-21 | 2022-07-28 | 米洛创新(深圳)有限公司 | Integration box and pneumatic high vacuum flapper valve |
Also Published As
Publication number | Publication date |
---|---|
DE69511567D1 (en) | 1999-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |