DE69511567T2 - Vacuum outlet valve - Google Patents

Vacuum outlet valve

Info

Publication number
DE69511567T2
DE69511567T2 DE69511567T DE69511567T DE69511567T2 DE 69511567 T2 DE69511567 T2 DE 69511567T2 DE 69511567 T DE69511567 T DE 69511567T DE 69511567 T DE69511567 T DE 69511567T DE 69511567 T2 DE69511567 T2 DE 69511567T2
Authority
DE
Germany
Prior art keywords
outlet valve
vacuum outlet
vacuum
valve
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69511567T
Other languages
German (de)
Other versions
DE69511567D1 (en
Inventor
Toshiaki Iwabuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BENKAN CORP TOKIO/TOKYO
Benkan Corp
Original Assignee
BENKAN CORP TOKIO/TOKYO
Benkan Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BENKAN CORP TOKIO/TOKYO, Benkan Corp filed Critical BENKAN CORP TOKIO/TOKYO
Priority claimed from EP19950120249 external-priority patent/EP0780615B1/en
Application granted granted Critical
Publication of DE69511567D1 publication Critical patent/DE69511567D1/en
Publication of DE69511567T2 publication Critical patent/DE69511567T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE69511567T 1995-12-21 1995-12-21 Vacuum outlet valve Expired - Fee Related DE69511567T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP19950120249 EP0780615B1 (en) 1995-12-21 1995-12-21 Vacuum exhaust valve
CH03653/95A CH690506A5 (en) 1995-12-21 1995-12-22 Vacuum exhaust valve for chemical vapour deposition equipment used in mfr. of semiconductor wafer

Publications (2)

Publication Number Publication Date
DE69511567D1 DE69511567D1 (en) 1999-09-23
DE69511567T2 true DE69511567T2 (en) 1999-12-02

Family

ID=25693533

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69511567T Expired - Fee Related DE69511567T2 (en) 1995-12-21 1995-12-21 Vacuum outlet valve

Country Status (1)

Country Link
DE (1) DE69511567T2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10126967B4 (en) * 2000-06-06 2004-07-29 Smc K.K. Open / close valve
DE102004041853A1 (en) * 2004-04-27 2005-11-17 Von Ardenne Anlagentechnik Gmbh Valve for the vapor-tight decoupling of two connected process units
WO2022156503A1 (en) * 2021-01-21 2022-07-28 米洛创新(深圳)有限公司 Integration box and pneumatic high vacuum flapper valve

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115962287B (en) * 2022-11-25 2023-10-27 无锡美瑞克阀门制造有限公司 Inflatable sealing semicircular top valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10126967B4 (en) * 2000-06-06 2004-07-29 Smc K.K. Open / close valve
DE102004041853A1 (en) * 2004-04-27 2005-11-17 Von Ardenne Anlagentechnik Gmbh Valve for the vapor-tight decoupling of two connected process units
DE102004041853B4 (en) * 2004-04-27 2008-01-31 Von Ardenne Anlagentechnik Gmbh Valve for the vapor-tight decoupling of two connected process units
DE102004041853B8 (en) * 2004-04-27 2008-07-10 Von Ardenne Anlagentechnik Gmbh Valve for the vapor-tight decoupling of two interconnected process units
WO2022156503A1 (en) * 2021-01-21 2022-07-28 米洛创新(深圳)有限公司 Integration box and pneumatic high vacuum flapper valve

Also Published As

Publication number Publication date
DE69511567D1 (en) 1999-09-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee