DE50100591D1 - Gasreibungspumpe - Google Patents

Gasreibungspumpe

Info

Publication number
DE50100591D1
DE50100591D1 DE50100591T DE50100591T DE50100591D1 DE 50100591 D1 DE50100591 D1 DE 50100591D1 DE 50100591 T DE50100591 T DE 50100591T DE 50100591 T DE50100591 T DE 50100591T DE 50100591 D1 DE50100591 D1 DE 50100591D1
Authority
DE
Germany
Prior art keywords
gas friction
friction pump
pump
gas
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50100591T
Other languages
English (en)
Inventor
Armin Conrad
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE50100591T priority Critical patent/DE50100591D1/de
Application granted granted Critical
Publication of DE50100591D1 publication Critical patent/DE50100591D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE50100591T 2000-05-15 2001-04-25 Gasreibungspumpe Expired - Lifetime DE50100591D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50100591T DE50100591D1 (de) 2000-05-15 2001-04-25 Gasreibungspumpe

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10023799 2000-05-15
DE10111546A DE10111546A1 (de) 2000-05-15 2001-03-10 Gasreibungspumpe
DE50100591T DE50100591D1 (de) 2000-05-15 2001-04-25 Gasreibungspumpe

Publications (1)

Publication Number Publication Date
DE50100591D1 true DE50100591D1 (de) 2003-10-16

Family

ID=7642146

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10111546A Withdrawn DE10111546A1 (de) 2000-05-15 2001-03-10 Gasreibungspumpe
DE50100591T Expired - Lifetime DE50100591D1 (de) 2000-05-15 2001-04-25 Gasreibungspumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10111546A Withdrawn DE10111546A1 (de) 2000-05-15 2001-03-10 Gasreibungspumpe

Country Status (2)

Country Link
US (1) US6540475B2 (de)
DE (2) DE10111546A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014118083A1 (de) * 2014-12-08 2016-06-09 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2757599A1 (de) 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Turbo-molekularpumpe
GB8507010D0 (en) * 1985-03-19 1985-04-24 Framo Dev Ltd Compressor unit
DE58907244D1 (de) 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
DE4216237A1 (de) 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
WO1994000694A1 (de) 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
DE4227663A1 (de) 1992-08-21 1994-02-24 Leybold Ag Verfahren zur Überprüfung der Betriebsposition des rotierenden Systems einer Vakuumpumpe, vorzugsweise Turbomolekularpumpe
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE19634095A1 (de) 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Also Published As

Publication number Publication date
DE10111546A1 (de) 2002-01-03
US20010041133A1 (en) 2001-11-15
US6540475B2 (en) 2003-04-01

Similar Documents

Publication Publication Date Title
DE60114484D1 (de) Verdichter
DE60116684D1 (de) Linearkompressor
DE50102471D1 (de) Kolbenpumpe
PT1188927E (pt) Compressores scroll
BR0110375B1 (pt) compressor.
DE60115516D1 (de) Büchse
DE10055954B8 (de) Linearkompressor
DE50101072D1 (de) Kolbenpumpe
DE60143145D1 (de) Gasreibungspumpe
DE50101315D1 (de) Förderpumpe
DE60103792D1 (de) Verdrängungsverdichter
DE60107169D1 (de) Kraftstoffpumpe
DE50103731D1 (de) Förderpumpe
DE60234240D1 (de) Kraftstoffpumpe
ATE491886T1 (de) Spaltrohrpumpe
DE60014023D1 (de) Wärmepumpe
DE60210287D1 (de) Pumpenanordnung
DE50114655D1 (de) Gasreibungspumpe
DE50108721D1 (de) Pumpenaggregat
DE60237062D1 (de) Kraftstoffpumpe
DE10261319B8 (de) Treibstoffpumpe
DE50112030D1 (de) Förderpumpe
NO20005676D0 (no) Kompressorstyring
DE50111939D1 (de) Förderpumpe
DE60045525D1 (de) Förderseil

Legal Events

Date Code Title Description
8364 No opposition during term of opposition