DE4190411T1 - - Google Patents

Info

Publication number
DE4190411T1
DE4190411T1 DE19914190411 DE4190411T DE4190411T1 DE 4190411 T1 DE4190411 T1 DE 4190411T1 DE 19914190411 DE19914190411 DE 19914190411 DE 4190411 T DE4190411 T DE 4190411T DE 4190411 T1 DE4190411 T1 DE 4190411T1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19914190411
Other languages
German (de)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DE4190411T1 publication Critical patent/DE4190411T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
DE19914190411 1990-03-02 1991-03-01 Withdrawn DE4190411T1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2051326A JPH03252386A (ja) 1990-03-02 1990-03-02 単結晶製造装置

Publications (1)

Publication Number Publication Date
DE4190411T1 true DE4190411T1 (ja) 1992-05-14

Family

ID=12883798

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19914190411 Withdrawn DE4190411T1 (ja) 1990-03-02 1991-03-01

Country Status (4)

Country Link
JP (1) JPH03252386A (ja)
KR (1) KR920701531A (ja)
DE (1) DE4190411T1 (ja)
WO (1) WO1991013192A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2754104B2 (ja) * 1991-10-15 1998-05-20 信越半導体株式会社 半導体単結晶引上用粒状原料供給装置
US5997234A (en) * 1997-04-29 1999-12-07 Ebara Solar, Inc. Silicon feed system
JP5145014B2 (ja) * 2007-03-29 2013-02-13 シャープ株式会社 固体材料処理装置
US10202704B2 (en) 2011-04-20 2019-02-12 Gtat Ip Holding Llc Side feed system for Czochralski growth of silicon ingots
MY166030A (en) * 2011-04-20 2018-05-21 Gtat Ip Holding Llc Side feed system for czochralski growth of silicon ingots
CN104264229B (zh) * 2014-10-09 2016-08-24 河北晶龙阳光设备有限公司 一种单晶炉在线掺杂装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0523580Y2 (ja) * 1987-02-27 1993-06-16
JPH01282194A (ja) * 1988-01-19 1989-11-14 Osaka Titanium Co Ltd 単結晶製造方法

Also Published As

Publication number Publication date
KR920701531A (ko) 1992-08-12
JPH03252386A (ja) 1991-11-11
WO1991013192A1 (en) 1991-09-05

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Legal Events

Date Code Title Description
8128 New person/name/address of the agent

Representative=s name: KLOEPSCH, G., DIPL.-ING. DR.-ING., PAT.-ANW., 5000

8139 Disposal/non-payment of the annual fee