DE4107102A1 - Eddy current sensor for detecting displacements - has cylindrical field coil, electrically conducting metal body connected to measurement object, cylindrical measurement coils on either side of field coil - Google Patents

Eddy current sensor for detecting displacements - has cylindrical field coil, electrically conducting metal body connected to measurement object, cylindrical measurement coils on either side of field coil

Info

Publication number
DE4107102A1
DE4107102A1 DE19914107102 DE4107102A DE4107102A1 DE 4107102 A1 DE4107102 A1 DE 4107102A1 DE 19914107102 DE19914107102 DE 19914107102 DE 4107102 A DE4107102 A DE 4107102A DE 4107102 A1 DE4107102 A1 DE 4107102A1
Authority
DE
Germany
Prior art keywords
field coil
measurement
cylindrical
metal body
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19914107102
Other languages
German (de)
Inventor
Manfred Pieloth
Bernhard Dr Ing Senf
Arnulf Dr Ing Schwarz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Dresden Rossendorf eV
Original Assignee
ZENTRALINSTITUT fur KERNFORSCHUNG ROSSENDORF O-8051 DRESDEN DE
Zentrum Mikroelektronik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZENTRALINSTITUT fur KERNFORSCHUNG ROSSENDORF O-8051 DRESDEN DE, Zentrum Mikroelektronik Dresden GmbH filed Critical ZENTRALINSTITUT fur KERNFORSCHUNG ROSSENDORF O-8051 DRESDEN DE
Priority to DE19914107102 priority Critical patent/DE4107102A1/en
Publication of DE4107102A1 publication Critical patent/DE4107102A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

An eddy current sensor for detecting displacements contains a pref. cylindrical field coil (2) generating a magnetic field and an electrically conducting metal body (5,6) connected to the measurement object. The metal body has a homogeneous or divided cross-section perpendicular to the coil axis and sufficiently effective for eddy currents. Two pref. cylindrical measurement coils (3) are arranged opposite each other and only slightly outside the field coil with their axes in the same plane as that of the field coil. The width of the metal body is less than the separation of the measurement coil axes. Its longitudinal axis is at an acute angle to the displacement direction, which is perpendicular to the measurement coil plane. USE/ADVANTAGE - Esp. for large displacement measurement in industrial measurement and automation. The robust, reliable displacement sensor causes no reaction effects.

Description

Die Erfindung betrifft einen Wirbelstromsensor zur Erfassung von Wegen an Mechanismen, Manipulatoren, Stellantrieben und anderen Einrichtungen der industriellen Meß- und Automatisierungstechnik.The invention relates to an eddy current sensor for detecting Because of mechanisms, manipulators, actuators and others Industrial measuring and automation technology equipment.

Es sind bereits Wirbelstromsensoren bekannt, die für kleine Wege (z. B. DE-PS 27 39 054) oder als Abstandssensoren gegenüber leitenden Metallflächen verwendet werden (DE-PS 30 26 389). Für größere Wege sind diese Sensoren nicht geeignet. Es sind für die Erfassung von mittleren und größeren Wegen auch Spulenanordnungen bekannt, über die ein leitendes Rohr verschiebbar übergreift (DE-PS 29 14 083, DE-PS 31 09 930, DE-PS 35 18 772). Bei anderen Sensoren wird die Lage eines metallischen Leiters in einem rohrförmigen Element mittels zweier Spulenpaare (DE-PS 25 54 603) gemessen. Diese technischen Lösungen erfordern bei längeren Meßwegen eine besondere und aufwendige Justage von Rohr und Sensorelement.Eddy current sensors are already known for small distances (e.g. DE-PS 27 39 054) or as distance sensors opposite conductive metal surfaces are used (DE-PS 30 26 389). For these sensors are not suitable for longer distances. It is for the Detection of medium and long distances also coil arrangements known, over which a conductive tube slidably engages (DE-PS 29 14 083, DE-PS 31 09 930, DE-PS 35 18 772). With others The position of a metallic conductor in a tubular sensor Element by means of two pairs of coils (DE-PS 25 54 603) measured. These technical solutions require longer measuring paths a special and complex adjustment of tube and sensor element.

Der Erfindung liegt die Aufgabe zugrunde, einen robusten und mit höherer Sicherheit funktionierenden Wirbelstromsensor insbesondere für größere Wege zu schaffen, der rückwirkungsarm arbeitet und einfach zu realisieren ist. Die Erfindung baut auf einer Anordnung auf, bestehend aus einer, mit entsprechender Frequenz erregten, zylindrischen Feldspule und je Koordinate zwei einander diametral gegenüberliegenden Meßspulen, deren Achsen sämtlich in einer Ebene liegen.The invention has for its object a robust and with higher security working eddy current sensor in particular to create larger routes that work with little impact and is easy to implement. The invention builds on one Arrangement on, consisting of, with a corresponding frequency excited, cylindrical field coil and two each coordinate diametrically opposite measuring coils, the axes of which are all in lie on one level.

Erfindungsgemäß wird die Aufgabe dadurch gelöst, daß sich vor den Stirnseiten der Feld- und Meßspulen ein langgestreckter, verschiebbarer Metallkörper befindet, dessen Breite geringer ist als der Achsenabstand der Meßspulen und dessen Längsachse mit der Verschiebungsrichtung, die senkrecht zur Ebene der Meßspulen steht, einen spitzen Winkel einschließt.According to the invention the object is achieved in that before End faces of the field and measuring coils an elongated, movable Metal body whose width is less than the axis distance of the measuring coils and its longitudinal axis with the Direction of displacement, perpendicular to the plane of the measuring coils is at an acute angle.

Mit diesem Wirbelstromsensor werden die in der Aufgabe formulierten Ziele erreicht.With this eddy current sensor they are in the job  formulated goals achieved.

Die Erläuterung der Erfindung erfolgt an Hand eines Ausführungsbeispieles. In der zugehörigen Zeichnung zeigen.The invention is explained using an exemplary embodiment. Show in the accompanying drawing.

Fig. 1 die Seitenansicht des Wirbelstromsensors im Teilschnitt Fig. 1 shows the side view of the eddy current sensor in partial section

Fig. 2 die Draufsicht des Wirbelstromsensors im Teilschnitt Fig. 2 is a top view of the eddy current sensor in partial section

Es befinden sich in einem zweckmäßig als Gehäuse gestalteten, nichtferromagnetischen Grundkörper 1 die Feldspule 2, sowie die beiden Meßspulen 3, die in gleichem Abstand zur Feldspulenachse einander gegenüberliegen. Die Achsen von Feldspule 2 und Meßspulen 3 liegen in einer Ebene. Ein mit dem Meßobjekt gekoppelter langgestreckter Metallkörper besteht aus zwei dreieckigen Blechen 5 und 6 gleichmäßiger Dicke. Diese werden z. B. durch eine Trennfuge aus einem Rechteckblech gebildet, das mit einer isolierenden Platte 4 verbunden ist. Die Herstellung eines solchen Bleches ist auch aus einer kaschierten Leiterplatte möglich.The field coil 2 and the two measuring coils 3 , which are opposite one another at the same distance from the field coil axis, are located in a non-ferromagnetic base body 1 which is expediently designed as a housing. The axes of field coil 2 and measuring coils 3 lie in one plane. An elongated metal body coupled to the measurement object consists of two triangular sheets 5 and 6 of uniform thickness. These are e.g. B. formed by a parting line from a rectangular plate which is connected to an insulating plate 4 . Such a sheet can also be produced from a laminated printed circuit board.

Der langgestreckte Metallkörper kann aus einem U-förmig gebogenen leitenden Blechstreifen bestehen.The elongated metal body can be bent from a U-shape conductive sheet metal strips exist.

Aus dem magnetischen Wechselfeld der Feldspule 2 und dem durch die in den Blechen 5 und 6 induzierten Wirbelströme hervorgerufenen Magnetfeld entsteht ein nicht rotationssymmetrisches Magnetfeld, das in den Meßspulen 3 Spannungen induziert, die einander entgegengeschaltet werden. Das auf Grund der Unsymmetrie des Magnetfeldes entstehende Differenzsignal steht nach Weiterverarbeitung und entsprechender Gleichrichtung vorzeichenrichtig als Meßgröße zur Verfügung. From the alternating magnetic field of the field coil 2 and the magnetic field caused by the eddy currents induced in the sheets 5 and 6 , a non-rotationally symmetrical magnetic field is created which induces 3 voltages in the measuring coils, which are switched in opposition to one another. The difference signal resulting from the asymmetry of the magnetic field is available as a measured variable after further processing and corresponding rectification with the correct sign.

Aufstellung der BezugszeichenList of reference numbers

1 Grundkörper
2 Feldspule
3 Meßspule
4 isolierende Platte
5 Blech
6 Blech 1 basic body
2 field coil
3 measuring coil
4 insulating plate
5 sheet
6 sheet

Claims (1)

Wirbelstromsensor zur Erfassung von Wegen, bestehend aus einer vorzugsweise zylindrischen, mit Wechselstrom geeigneter Frequenz gespeisten und das magnetische Wechselfeld erzeugenden Feldspule und einem mit dem Meßobjekt gekoppelten, elektrisch leitenden Metallkörper, der mit einem für Wirbelströme ausreichend wirksamen homogenen oder unterteilten Querschnitt annähernd senkrecht zur Achse der Feldspule steht, und zwei nur wenig außerhalb der Feldspule einander diametral gegenüberliegenden, vorzugsweise zylindrischen Meßspulen, deren Achsen mit der Achse der Feldspule etwa in einer Ebene liegen, gekennzeichnet dadurch, daß der Metallkörper eine Breite besitzt, die geringer ist als der Achsenabstand der Meßspulen (3) und dessen Längsachse zur Verschiebungsrichtung, die senkrecht zur Ebene der Meßspulen steht, einen spitzen Winkel einschließt.Eddy current sensor for detecting paths, consisting of a preferably cylindrical, with alternating current suitable frequency and generating the magnetic alternating field coil and an electrically conductive metal body coupled to the test object, which with a sufficiently effective for eddy currents cross-section approximately perpendicular to the axis of the Field coil stands, and two measuring coils diametrically opposite each other, preferably cylindrical, the axes of which lie approximately in one plane with the axis of the field coil, characterized in that the metal body has a width which is less than the axial spacing of the measuring coils ( 3 ) and its longitudinal axis to the direction of displacement, which is perpendicular to the plane of the measuring coils, encloses an acute angle.
DE19914107102 1991-03-06 1991-03-06 Eddy current sensor for detecting displacements - has cylindrical field coil, electrically conducting metal body connected to measurement object, cylindrical measurement coils on either side of field coil Withdrawn DE4107102A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19914107102 DE4107102A1 (en) 1991-03-06 1991-03-06 Eddy current sensor for detecting displacements - has cylindrical field coil, electrically conducting metal body connected to measurement object, cylindrical measurement coils on either side of field coil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19914107102 DE4107102A1 (en) 1991-03-06 1991-03-06 Eddy current sensor for detecting displacements - has cylindrical field coil, electrically conducting metal body connected to measurement object, cylindrical measurement coils on either side of field coil

Publications (1)

Publication Number Publication Date
DE4107102A1 true DE4107102A1 (en) 1992-09-10

Family

ID=6426574

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19914107102 Withdrawn DE4107102A1 (en) 1991-03-06 1991-03-06 Eddy current sensor for detecting displacements - has cylindrical field coil, electrically conducting metal body connected to measurement object, cylindrical measurement coils on either side of field coil

Country Status (1)

Country Link
DE (1) DE4107102A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4328712A1 (en) * 1993-08-26 1995-03-02 Foerster Inst Dr Friedrich Method and device for testing elongated objects, optionally with cross-section deviating from circularity
DE19908360A1 (en) * 1998-12-18 2000-06-29 Micro Epsilon Messtechnik Method for operating an eddy current sensor and eddy current sensor
CN103644834A (en) * 2013-12-24 2014-03-19 重庆理工大学 Time grating linear displacement sensor
CN104006731A (en) * 2014-06-12 2014-08-27 株洲时代电子技术有限公司 Centering sensing device and displacement detection method thereof
DE102022101622A1 (en) 2022-01-25 2023-07-27 Schaeffler Technologies AG & Co. KG Eddy current position sensor assembly and vehicle steering

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4328712A1 (en) * 1993-08-26 1995-03-02 Foerster Inst Dr Friedrich Method and device for testing elongated objects, optionally with cross-section deviating from circularity
DE19908360A1 (en) * 1998-12-18 2000-06-29 Micro Epsilon Messtechnik Method for operating an eddy current sensor and eddy current sensor
CN103644834A (en) * 2013-12-24 2014-03-19 重庆理工大学 Time grating linear displacement sensor
CN103644834B (en) * 2013-12-24 2016-04-27 重庆理工大学 Grating straight-line displacement sensor time a kind of
CN104006731A (en) * 2014-06-12 2014-08-27 株洲时代电子技术有限公司 Centering sensing device and displacement detection method thereof
DE102022101622A1 (en) 2022-01-25 2023-07-27 Schaeffler Technologies AG & Co. KG Eddy current position sensor assembly and vehicle steering

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Owner name: FORSCHUNGSZENTRUM ROSSENDORF EV, 01474 SCHOENFELD-

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