DE4011901A1 - Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path - Google Patents

Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path

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Publication number
DE4011901A1
DE4011901A1 DE19904011901 DE4011901A DE4011901A1 DE 4011901 A1 DE4011901 A1 DE 4011901A1 DE 19904011901 DE19904011901 DE 19904011901 DE 4011901 A DE4011901 A DE 4011901A DE 4011901 A1 DE4011901 A1 DE 4011901A1
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DE
Grant status
Application
Patent type
Prior art keywords
temp
pressure sensor
measurement
carrying
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19904011901
Other languages
German (de)
Inventor
Klaus Dieter Meese
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mannesmann VDO AG
Original Assignee
Mannesmann VDO AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature

Abstract

A capacitive pressure sensor contains two plates (1, 3) at a defined distance apart and each with at least one electrode of a capacitor. At least one of the plates is deformable by the measurement pressure. An annular resistive path (6) of material with temp. dependent resistance is arranged on at least one of the plates. The path encloses the circular electrode (7) which opposes the other electrode (5). USE/ADVANTAGE - E.g. for use in motor vehicles where temp. measurement is also required. Pressure and temp. measurement are achieved at reduced cost.

Description

Die Erfindung betrifft einen kapazitiven Drucksensor mit zwei in einem definierten Abstand zueinander angeordneten Scheiben, die je mit mindestens einer Elektrode eines Kondensators versehen sind, wobei mindestens eine der Scheiben durch den zu messenden Druck verformbar ist. The invention relates to a capacitive pressure sensor with two in a defined spaced discs which are each provided with at least one electrode of a capacitor, wherein at least one of the discs is deformable by the pressure to be measured.

Derartige bekannte Drucksensoren haben sich unter anderem in Kraftfahrzeugen bewährt. Such known pressure sensors have proven themselves among others in motor vehicles. Häufig ist jedoch im Zusammenhang mit der Druckmessung auch eine Temperaturmessung erforderlich. However, a temperature measurement is often required in connection with the pressure measurement. Dazu werden weitere Sensoren benötigt, die wie die Drucksensoren ein Gehäuse, Mittel zur Befestigung und elektrische Leitungen aufweisen. For this purpose further sensors are needed, which, like the pressure sensors, a housing, means for attachment and electrical lines. Dieses bedeutet in Kraftfahrzeugen einen erheblichen Aufwand, insbesondere wenn an mehreren Stellen Druck und Temperatur zu messen sind. in motor vehicles, this represents a significant burden in particular are to be measured in several places pressure and temperature.

Aufgabe der vorliegenden Erfindung ist es, bei der Messung des Drucks und der Temperatur, insbesondere in einem Kraftfahrzeug, Aufwand zu ersparen. Object of the present invention is to save costs in measuring the pressure and the temperature, in particular in a motor vehicle.

Der erfindungsgemäße kapazitive Drucksensor ist dadurch gekennzeichnet, daß auf mindestens einer der Scheiben eine Widerstandsbahn aus einem Werkstoff mit temperaturabhängigem Widerstand angeordnet ist. The capacitive pressure sensor according to the invention is characterized in that a resistance track is arranged of a material with temperature-dependent resistance on at least one of the discs.

Außer der Verminderung des Aufwandes ergibt sich durch den erfindungsgemäßen Drucksensor der Vorteil, daß die Temperatur an der gleichen Stelle wie der Druck gemessen wird. Apart from the reduction of the effort resulting from the pressure sensor according to the invention has the advantage that the temperature at the same site is measured as the pressure.

Eine Weiterbildung der Erfindung besteht darin, daß die Widerstandsbahn ringförmig um eine kreisscheibenförmige Elektrode des Kondensators angeordnet ist und daß eine andere kreisscheibenförmige Elektrode des Kondensators der einen kreisscheibenförmigen Elektrode und der Widerstandsbahn gegenübersteht. A development of the invention is that the resistance path is disposed annularly around a circular disk-shaped electrode of the capacitor and that another circular disk-shaped electrode of the capacitor of a circular disk-shaped electrode and the resistive track faces. Es ist zwar durch das europäische Patent 00 18 283 bereits ein Drucksensor bekanntgeworden, bei welchem zusätzlich zu der einen Elektrode eine ringförmige Elektrode vorgesehen ist. While it is by European Patent 00 18 283, a pressure sensor already become known, wherein in addition to the one electrode is an annular electrode is provided. Diese wird jedoch als reine Kondensatorelektrode verwendet und ist zu einer Temperaturmessung nicht geeignet, sondern lediglich zu einer Kompensation des Temperatureinflusses bei der Druckmessung. However, this is used as a pure capacitor electrode and is not suitable for a temperature measurement, but only to compensate the influence of temperature in the pressure measurement.

Eine andere Weiterbildung besteht darin, daß eine der Scheiben verformbar ist und daß die Widerstandsbahn auf der verformbaren Scheibe aufgebracht ist. Another development is that one of the discs is deformable and in that the resistive track is applied to the deformable disc. Hierdurch ist gewährleistet, daß die weitere Elektrode bzw. der temperaturabhängige Widerstand möglichst unverzüglich die Temperatur des Mediums, dessen Druck auch gemessen werden soll, einnimmt. This ensures that the further electrode and the temperature-dependent resistor as promptly as possible the temperature of the medium whose pressure is to be measured, occupies.

Schließlich besteht eine Weiterbildung darin, daß in der nicht verformbaren Scheibe Durchführungen für Zuleitungen zu den Elektroden des Kondensators und zu der Widerstandsbahn vorgesehen sind. Finally, a further development consists in that passages for supply lines to the electrodes of the capacitor and to the resistive track are provided in the non-deformable washer. Hierdurch ist gewährleistet, daß sämtliche Leitungen in einfacher Weise an der von der Meßstelle abgewandten Seite des Drucksensors herausgeführt werden. This ensures that all the wires are taken out in a simple manner at the side facing away from the measuring side of the pressure sensor.

Bei dem erfindungsgemäßen Drucksensor ist die zusätzliche Anordnung einer ringförmigen Elektrode entsprechend dem eingangs genannten Stand der Technik nicht ausgeschlossen. In the inventive pressure sensor, the additional arrangement of a ring-shaped electrode is not excluded according to the aforementioned prior art.

Die Erfindung läßt zahlreiche Ausführungsformen zu. The invention permits numerous embodiments. Zwei davon sind schematisch in der Zeichnung anhand mehrerer Figuren dargestellt und nachfolgend beschrieben. Two of these are schematically shown in the drawing way of several figures and described below. Es zeigt: It shows:

Fig. 1 einen Schnitt durch ein erstes Ausführungsbeispiel, Fig. 1 shows a section through a first embodiment,

Fig. 2 die beiden Scheiben des ersten Ausführungsbeispiels in perspektivischer Darstellung, Fig. 2, the two discs of the first embodiment in perspective view;

Fig. 3 einen Schnitt durch das zweite Ausführungsbeispiel, Fig. 3 a section through the second embodiment,

Fig. 4 die beiden Scheiben des zweiten Ausführungsbeispiels in perspektivischer Darstellung und Fig. 4, the two discs of the second embodiment in a perspective representation, and

Fig. 5 ein drittes Ausführungsbeispiel. Fig. 5 shows a third embodiment.

Gleiche Teile sind in den Figuren mit gleichen Bezugszeichen versehen. Identical parts are provided in the figures with the same reference numerals.

Die dargestellten Ausführungsbeispiele bestehen im wesentlichen aus je einer stärkeren Scheibe 1 und einer dünneren Scheibe 3 , die unter der Kraft des mit einem Pfeil angedeuteten Drucks P in Richtung auf die erste Scheibe verbogen wird. The illustrated embodiments are made of substantially greater per disc 1 and a thinner washer 3, which is bent under the force of the pressure P indicated by an arrow in the direction of the first disk. Letztere wird daher häufig auch Membran genannt. The latter is often therefore called membrane. Die Scheiben 1 , 3 bestehen aus einem nichtleitenden Material und werden mit einem Ring 2 auf Abstand gehalten, der meistens aus Glas besteht. The discs 1, 3 are made of a non-conductive material and are held at a distance by a ring 2, which usually consists of glass.

Die Innenseite der Membran 3 ist mit einer Elektrode 5 versehen. The inside of the diaphragm 3 is provided with an electrode. 5 Mit zunehmendem Druck P wird der Abstand zwischen den Elektroden 5 , 7 geringer, so daß die Kapazität größer wird. With increasing pressure P of the distance between the electrodes 5, 7 is reduced, so that the capacity becomes larger. Über im einzelnen nicht dargestellte Leitungen sind die Elektroden 5 , 7 mit einer Schaltung zur Auswertung der Kapazität verbindbar, an deren Ausgang ein den Druck P kennzeichnendes elektrisches Signal ansteht. Via lines not shown in detail are the electrodes 5, 7 connected to a circuit for evaluating the capacity at whose output is present a pressure P characteristic electrical signal.

Bei dem in den Fig. 1 und 2 dargestellten Ausführungsbeispiel ist um die Elektrode 7 auf der Scheibe 1 eine Widerstandsbahn 6 mit zwei Anschlüssen 9 angeordnet. In the example shown in Figs. 1 and 2, a resistance track 6 is arranged with two connectors 9 on the disc 1 to the electrode 7. Der Widerstand der Widerstandsbahn 6 ist temperaturabhängig, beispielsweise mit negativem oder positivem Temperaturkoeffizienten. The resistance of the resistive track 6 is temperature-dependent, for example with a negative or positive temperature coefficient. In einer weiteren an sich bekannten Schaltung kann der Widerstand dieser Widerstandsbahn gemessen und in ein die Temperatur kennzeichnendes Signal umgewandelt werden. In another known circuit, the resistance of the resistor track can be measured and converted into a signal characterizing the temperature.

Gegenüber dem ersten Ausführungsbeispiel ist bei dem zweiten in Fig. 3 und 4 gezeigten Ausführungsbeispiel die kleinere Elektrode 5 auf der Membran 3 angeordnet, während die Elektrode 7 auf der dickeren Scheibe 1 aufgetragen ist. Compared to the first embodiment, the smaller electrode 5 is disposed on the diaphragm 3, while the electrode is applied to the thicker disk 1 7 in the second shown in Fig. 3 and 4 embodiment. Der temperaturabhängige Widerstand 6 befindet sich auf der Membran und nimmt daher weitgehend verzögerungsfrei die Temperatur des Mediums an, dessen Druck gemessen wird und welches mit der Membran 3 in unmittelbarer Berührung steht. The temperature-dependent resistor 6 is located on the membrane and, therefore, is broadly without delay, the temperature of the medium, whose pressure is measured and which is in direct contact with the membrane. 3 Die Scheibe 1 ist mit Bohrungen 11 , 12 , 13 versehen, durch welche Anschlußleitungen zu den Anschlüssen 8 , 9 , 10 geführt werden können. The disc 1 is provided with holes 11, 12, 13, can be guided through which lead wires to the terminals 8, 9, 10 degrees.

Die Scheiben können beispielsweise aus Keramik oder Glas hergestellt werden. The discs can be made from ceramic or glass, for example. Werkstoffe und Verfahren für die Elektroden des Kondensators und für die Widerstandsbahn sind an sich bekannt und brauchen im einzelnen nicht näher erläutert zu werden. Materials and Processes for the electrodes of the capacitor and the resistance track are known per se and need not be explained in detail. Für die Widerstandsbahn eignen sich NTC-, PTC- und Platin-Pasten. For the resistance path to NTC, PTC and platinum pastes are. Dabei können jeweils zwei Pastentypen verwendet werden, nämlich herkömmliche Dickschichtpasten oder Resinat-Pasten. In each case, two types of paste can be used, namely, conventional thick film pastes or resinate paste. Dadurch lassen sich unterschiedliche Schichtdicken realisieren. This different layer thicknesses can be realized.

Bei dem Ausführungsbeispiel nach Fig. 5 ist auf der dickeren Scheibe 1 außer der Elektrode 7 und der Widerstandsbahn 6 eine zusätzliche Elektrode vorgesehen, die in an sich bekannter Weise zur Kompensation des Temperatureinflusses bei der Druckmessung verwendet werden kann. In the embodiment according to Fig. 5, an additional electrode is on the thicker disc 1 except for the electrode 7 and the resistive track 6 is provided, which can be used in a known manner to compensate for the influence of temperature on the pressure measurement. Die ringförmige Elektrode 14 weist einen Anschluß 15 auf mit einer Kontaktierungsbohrung 16 . The annular electrode 14 has a terminal 15 with a Kontaktierungsbohrung sixteenth

Die Erfindung ist nicht auf die Ausführungsbeispiele beschränkt, sondern kann im Rahmen des Fachmännischen abgewandelt und verbessert werden. The invention is not limited to the embodiments but can be modified within the scope of expert and improved. So können beispielsweise die Widerstandsbahn 6 und die zusätzliche Elektrode 14 miteinander vertauscht werden. For example, the resistor track 6 and the additional electrode 14 may be interchanged. Sie können auch im Bereich der Glasfügestelle liegen und somit vom Ring 2 ( Fig. 1) verdeckt werden. They can also lie in the region of the glass joint and thus from the ring 2 (Fig. 1) are covered. Die in Fig. 5 dargestellten Elektroden und die Widerstandsbahn können auch auf der dünneren Scheibe 3 angeordnet sein. In Fig. 5 and electrodes illustrated the resistance track can be arranged on the thinner disc 3. Um die Länge der Widerstandsbahn zu vergrößern, kann diese mäanderförmig ausgelegt sein. In order to increase the length of the resistance path, it can be designed in meandering fashion.

Claims (5)

  1. 1. Kapazitiver Drucksensor mit zwei in einem definierten Abstand zueinander angeordneten Scheiben, die je mit mindestens einer Elektrode eines Kondensators versehen sind, wobei mindestens eine der Scheiben durch den zu messenden Druck verformbar ist, dadurch gekennzeichnet, daß auf mindestens einer der Scheiben ( 1 , 3 ) eine Widerstandsbahn ( 6 ) aus einem Werkstoff mit temperaturabhängigem Widerstand angeordnet ist. 1. A capacitive pressure sensor having two mutually in a defined spaced discs which are each provided with at least one electrode of a capacitor, wherein at least one of the discs is deformable by the pressure to be measured, characterized in that on at least one of the discs (1, 3) a resistive path (6) made of a material with temperature-dependent resistance.
  2. 2. Drucksensor nach Anspruch 1, dadurch gekennzeichnet, daß die Widerstandsbahn ( 6 ) ringförmig um eine kreisscheibenförmige Elektrode ( 7 ) des Kondensators angeordnet ist und daß eine andere kreisscheibenförmige Elektrode ( 5 ) des Kondensators der einen kreisscheibenförmigen Elektrode ( 7 ) und der Widerstandsbahn ( 6 ) gegenübersteht. 2. Pressure sensor according to claim 1, characterized in that the resistive track (6) annularly around a circular disk-shaped electrode (7) is arranged the capacitor and that another circular disc-shaped electrode (5) of the capacitor of a circular disc-shaped electrode (7) and the resistance track ( 6) faces.
  3. 3. Drucksensor nach Anspruch 1, dadurch gekennzeichnet, daß eine der Scheiben ( 3 ) verformbar ist und daß die Widerstandsbahn ( 6 ) auf der verformbaren Scheibe ( 3 ) aufgebracht ist. 3. Pressure sensor according to claim 1, characterized in that one of the discs (3) is deformable and in that the resistive track (6) is applied to the deformable disc (3).
  4. 4. Drucksensor nach Anspruch 3, dadurch gekennzeichnet, daß in der nicht verformbaren Scheibe ( 1 ) Durchführungen ( 11 , 12 , 13 ) für Zuleitungen zu den Elektroden ( 5 , 7 ) des Kondensators und zu der Widerstandsbahn ( 6 ) vorgesehen sind. 4. Pressure sensor according to claim 3, characterized in that in the non-deformable washer (1) through guides (11, 12, 13) for supply lines to the electrodes (5, 7) of the capacitor and the resistor track (6) are provided.
  5. 5. Drucksensor nach Anspruch 1, dadurch gekennzeichnet, daß die Widerstandsbahn ( 6 ) mit einer Auswerteschaltung für den Widerstandswert verbindbar ist. 5. Pressure sensor according to claim 1, characterized in that the resistive track (6) is connectable to an evaluation circuit for the resistance value.
DE19904011901 1990-04-12 1990-04-12 Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path Ceased DE4011901A1 (en)

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Application Number Priority Date Filing Date Title
DE19904011901 DE4011901A1 (en) 1990-04-12 1990-04-12 Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path

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DE19904011901 DE4011901A1 (en) 1990-04-12 1990-04-12 Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path

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DE4011901A1 true true DE4011901A1 (en) 1991-10-17

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Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19510617A1 (en) * 1995-03-23 1996-09-26 Leon Helma Christina Flexible contact mat e.g. for pressure sensitive switching device
WO1998037393A1 (en) * 1997-02-20 1998-08-27 Cecap Ab A sensor element having temperature measuring means
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
EP0893676A2 (en) * 1997-07-24 1999-01-27 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
DE19732027A1 (en) * 1997-07-25 1999-01-28 Alphasat Communication Gmbh Capacitive pressure sensor for measuring periodic or transient pressures or forces
EP1174696A2 (en) 2000-07-20 2002-01-23 VEGA Grieshaber KG Pressure measurement cell with temperature sensor
EP1186875A2 (en) * 2000-09-07 2002-03-13 Vega Grieshaber KG Pressure measurement cell with temperature sensors and method for measuring pressure
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6681637B2 (en) 2000-07-20 2004-01-27 Vega Grieshaber Kg Pressure-measuring cell with a temperature sensor
US6698294B2 (en) 2000-09-07 2004-03-02 Vega Grieshaber Kg Pressure cell with temperature sensors and pressure measuring method
DE10248761A1 (en) * 2002-10-18 2004-05-06 Wilhelm Karmann Gmbh Capacitive measuring sensor and capacitive sensor for detecting a jamming situation
DE102005008959A1 (en) * 2005-02-28 2006-09-07 Plöchinger, Heinz, Dipl.-Ing. Pressure sensor for vacuum applications, has similar diaphragms connected together with electromechanical transducer converting deflection to electrical signal
DE102005017853A1 (en) * 2005-04-18 2006-10-19 Siemens Ag Pressure sensor device
DE102009002662A1 (en) 2009-04-27 2010-10-28 Ifm Electronic Gmbh Capacitive pressure sensor, particularly combination sensor for detecting measuring parameter, has ceramic pressure measuring cell which consists of diaphragm, base body and measuring electrodes in form of conductive surface areas
EP2784462A1 (en) 2013-03-27 2014-10-01 VEGA Grieshaber KG Capacitative pressure measurement cell for detecting the pressure of a medium adjacent to the measurement cell
EP2784461A1 (en) 2013-03-27 2014-10-01 VEGA Grieshaber KG Pressure measurement cell for detecting the pressure of a medium adjoining the measurement cell
DE102013114734A1 (en) * 2013-12-20 2015-07-09 Endress + Hauser Gmbh + Co. Kg Capacitive pressure measuring cell with at least one temperature sensor and pressure measuring method

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DE2221062B2 (en) * 1971-05-10 1980-06-04 The Bendix Corp., Southfield, Mich. (V.St.A.)
EP0095966A1 (en) * 1982-05-21 1983-12-07 Allied Corporation Pressure transducer with an invariable reference capacitor
DE3512529A1 (en) * 1985-04-06 1985-11-07 Schoppe & Faeser Gmbh Differential pressure transducer with measures for compensating the influences of variable noise quantities

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DE2221062B2 (en) * 1971-05-10 1980-06-04 The Bendix Corp., Southfield, Mich. (V.St.A.)
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor
EP0095966A1 (en) * 1982-05-21 1983-12-07 Allied Corporation Pressure transducer with an invariable reference capacitor
DE3512529A1 (en) * 1985-04-06 1985-11-07 Schoppe & Faeser Gmbh Differential pressure transducer with measures for compensating the influences of variable noise quantities

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
DE19510617A1 (en) * 1995-03-23 1996-09-26 Leon Helma Christina Flexible contact mat e.g. for pressure sensitive switching device
US6439056B1 (en) 1997-02-20 2002-08-27 Mks Instruments Sensor element having temperature measuring means
WO1998037393A1 (en) * 1997-02-20 1998-08-27 Cecap Ab A sensor element having temperature measuring means
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
EP0893676A2 (en) * 1997-07-24 1999-01-27 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
EP0893676A3 (en) * 1997-07-24 1999-12-15 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
DE19732027A1 (en) * 1997-07-25 1999-01-28 Alphasat Communication Gmbh Capacitive pressure sensor for measuring periodic or transient pressures or forces
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
EP1174696A2 (en) 2000-07-20 2002-01-23 VEGA Grieshaber KG Pressure measurement cell with temperature sensor
EP1174696A3 (en) * 2000-07-20 2003-03-26 VEGA Grieshaber KG Pressure measurement cell with temperature sensor
US6681637B2 (en) 2000-07-20 2004-01-27 Vega Grieshaber Kg Pressure-measuring cell with a temperature sensor
EP1186875A2 (en) * 2000-09-07 2002-03-13 Vega Grieshaber KG Pressure measurement cell with temperature sensors and method for measuring pressure
US6698294B2 (en) 2000-09-07 2004-03-02 Vega Grieshaber Kg Pressure cell with temperature sensors and pressure measuring method
EP1186875A3 (en) * 2000-09-07 2003-03-26 Vega Grieshaber KG Pressure measurement cell with temperature sensors and method for measuring pressure
US7323885B2 (en) 2002-10-18 2008-01-29 Wilhelm Karmann Gmbh Capacitive sensor and detection device with capacitive sensors for the detection of an obstruction situation
DE10248761A1 (en) * 2002-10-18 2004-05-06 Wilhelm Karmann Gmbh Capacitive measuring sensor and capacitive sensor for detecting a jamming situation
DE10248761B4 (en) * 2002-10-18 2013-10-02 Wilhelm Karmann Gmbh Capacitive sensor measuring and detecting device with a capacitive sensor system for detecting a jamming situation
DE102005008959B4 (en) * 2005-02-28 2012-08-30 Heinz Plöchinger Pressure sensors and composite pressure sensors and their use
DE102005008959A1 (en) * 2005-02-28 2006-09-07 Plöchinger, Heinz, Dipl.-Ing. Pressure sensor for vacuum applications, has similar diaphragms connected together with electromechanical transducer converting deflection to electrical signal
DE102005017853A1 (en) * 2005-04-18 2006-10-19 Siemens Ag Pressure sensor device
DE102009002662A1 (en) 2009-04-27 2010-10-28 Ifm Electronic Gmbh Capacitive pressure sensor, particularly combination sensor for detecting measuring parameter, has ceramic pressure measuring cell which consists of diaphragm, base body and measuring electrodes in form of conductive surface areas
WO2014154696A1 (en) 2013-03-27 2014-10-02 Vega Grieshaber Kg Pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell
EP2784461A1 (en) 2013-03-27 2014-10-01 VEGA Grieshaber KG Pressure measurement cell for detecting the pressure of a medium adjoining the measurement cell
EP2784462A1 (en) 2013-03-27 2014-10-01 VEGA Grieshaber KG Capacitative pressure measurement cell for detecting the pressure of a medium adjacent to the measurement cell
WO2014154695A1 (en) * 2013-03-27 2014-10-02 Vega Grieshaber Kg Capacitive pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell
US9638598B2 (en) 2013-03-27 2017-05-02 Vega Grieshaber Kg Capacitive pressure transducer for measuring the pressure of a medium adjacent to the measuring cell
CN105074407B (en) * 2013-03-27 2018-07-06 Vega格里沙贝两合公司 Capacitive pressure medium for measuring the ambient pressure measuring element
CN105917204A (en) * 2013-12-20 2016-08-31 恩德莱斯和豪瑟尔两合公司 Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method
DE102013114734A1 (en) * 2013-12-20 2015-07-09 Endress + Hauser Gmbh + Co. Kg Capacitive pressure measuring cell with at least one temperature sensor and pressure measuring method
US9976923B2 (en) 2013-12-20 2018-05-22 Endress + Hauser Gmbh + Co. Kg Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method

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