DE4011901A1 - Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path - Google Patents
Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance pathInfo
- Publication number
- DE4011901A1 DE4011901A1 DE19904011901 DE4011901A DE4011901A1 DE 4011901 A1 DE4011901 A1 DE 4011901A1 DE 19904011901 DE19904011901 DE 19904011901 DE 4011901 A DE4011901 A DE 4011901A DE 4011901 A1 DE4011901 A1 DE 4011901A1
- Authority
- DE
- Germany
- Prior art keywords
- temp
- pressure sensor
- measurement
- electrode
- carrying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Die Erfindung betrifft einen kapazitiven Drucksensor mit zwei in einem definierten Abstand zueinander angeordneten Scheiben, die je mit mindestens einer Elektrode eines Kondensators versehen sind, wobei mindestens eine der Scheiben durch den zu messenden Druck verformbar ist.The invention relates to a capacitive pressure sensor two arranged at a defined distance from each other Disks, each with at least one electrode Capacitor are provided, at least one of the Is deformable by the pressure to be measured.
Derartige bekannte Drucksensoren haben sich unter anderem in Kraftfahrzeugen bewährt. Häufig ist jedoch im Zusammenhang mit der Druckmessung auch eine Temperaturmessung erforderlich. Dazu werden weitere Sensoren benötigt, die wie die Drucksensoren ein Gehäuse, Mittel zur Befestigung und elektrische Leitungen aufweisen. Dieses bedeutet in Kraftfahrzeugen einen erheblichen Aufwand, insbesondere wenn an mehreren Stellen Druck und Temperatur zu messen sind.Such known pressure sensors have, among others, in Proven motor vehicles. Often, however, is related with the pressure measurement also a temperature measurement required. This requires additional sensors that like the pressure sensors a housing, means for fastening and have electrical cables. This means in Motor vehicles a considerable effort, especially if pressure and temperature must be measured at several points.
Aufgabe der vorliegenden Erfindung ist es, bei der Messung des Drucks und der Temperatur, insbesondere in einem Kraftfahrzeug, Aufwand zu ersparen. The object of the present invention is in the measurement of pressure and temperature, especially in one Motor vehicle to save effort.
Der erfindungsgemäße kapazitive Drucksensor ist dadurch gekennzeichnet, daß auf mindestens einer der Scheiben eine Widerstandsbahn aus einem Werkstoff mit temperaturabhängigem Widerstand angeordnet ist.The capacitive pressure sensor according to the invention is thereby characterized in that on at least one of the discs Resistance track made of a material with temperature-dependent Resistance is arranged.
Außer der Verminderung des Aufwandes ergibt sich durch den erfindungsgemäßen Drucksensor der Vorteil, daß die Temperatur an der gleichen Stelle wie der Druck gemessen wird.In addition to reducing the effort, the pressure sensor according to the invention the advantage that the Temperature measured at the same point as the pressure becomes.
Eine Weiterbildung der Erfindung besteht darin, daß die Widerstandsbahn ringförmig um eine kreisscheibenförmige Elektrode des Kondensators angeordnet ist und daß eine andere kreisscheibenförmige Elektrode des Kondensators der einen kreisscheibenförmigen Elektrode und der Widerstandsbahn gegenübersteht. Es ist zwar durch das europäische Patent 00 18 283 bereits ein Drucksensor bekanntgeworden, bei welchem zusätzlich zu der einen Elektrode eine ringförmige Elektrode vorgesehen ist. Diese wird jedoch als reine Kondensatorelektrode verwendet und ist zu einer Temperaturmessung nicht geeignet, sondern lediglich zu einer Kompensation des Temperatureinflusses bei der Druckmessung.A further development of the invention is that Resistance track ring-shaped around a circular disk Electrode of the capacitor is arranged and that a another circular disk-shaped electrode of the capacitor a circular electrode and the Resistance path faces. It's through that though European patent 00 18 283 already a pressure sensor became known, in which in addition to the one An annular electrode is provided. These is however used and is a pure capacitor electrode not suitable for a temperature measurement, but only to compensate for the influence of temperature during the Pressure measurement.
Eine andere Weiterbildung besteht darin, daß eine der Scheiben verformbar ist und daß die Widerstandsbahn auf der verformbaren Scheibe aufgebracht ist. Hierdurch ist gewährleistet, daß die weitere Elektrode bzw. der temperaturabhängige Widerstand möglichst unverzüglich die Temperatur des Mediums, dessen Druck auch gemessen werden soll, einnimmt.Another development is that one of the Is deformable and that the resistance track on the deformable disc is applied. This is ensures that the further electrode or temperature-dependent resistance as soon as possible Temperature of the medium, the pressure of which is also measured should, occupies.
Schließlich besteht eine Weiterbildung darin, daß in der nicht verformbaren Scheibe Durchführungen für Zuleitungen zu den Elektroden des Kondensators und zu der Widerstandsbahn vorgesehen sind. Hierdurch ist gewährleistet, daß sämtliche Leitungen in einfacher Weise an der von der Meßstelle abgewandten Seite des Drucksensors herausgeführt werden.Finally, further training consists in the fact that non-deformable washer bushings for supply lines the electrodes of the capacitor and to the resistance path are provided. This ensures that all Lines in a simple manner at the measuring point side of the pressure sensor facing away.
Bei dem erfindungsgemäßen Drucksensor ist die zusätzliche Anordnung einer ringförmigen Elektrode entsprechend dem eingangs genannten Stand der Technik nicht ausgeschlossen.In the pressure sensor according to the invention, the additional Arrangement of an annular electrode corresponding to the The prior art mentioned at the beginning is not excluded.
Die Erfindung läßt zahlreiche Ausführungsformen zu. Zwei davon sind schematisch in der Zeichnung anhand mehrerer Figuren dargestellt und nachfolgend beschrieben. Es zeigt:The invention allows numerous embodiments. Two of which are schematic in the drawing using several Figures shown and described below. It shows:
Fig. 1 einen Schnitt durch ein erstes Ausführungsbeispiel, Fig. 1 shows a section through a first embodiment,
Fig. 2 die beiden Scheiben des ersten Ausführungsbeispiels in perspektivischer Darstellung, Fig. 2, the two discs of the first embodiment in perspective view;
Fig. 3 einen Schnitt durch das zweite Ausführungsbeispiel, Fig. 3 a section through the second embodiment,
Fig. 4 die beiden Scheiben des zweiten Ausführungsbeispiels in perspektivischer Darstellung und Fig. 4 shows the two disks of the second embodiment in perspective and
Fig. 5 ein drittes Ausführungsbeispiel. Fig. 5 shows a third embodiment.
Gleiche Teile sind in den Figuren mit gleichen Bezugszeichen versehen.Identical parts are given the same reference symbols in the figures Mistake.
Die dargestellten Ausführungsbeispiele bestehen im wesentlichen aus je einer stärkeren Scheibe 1 und einer dünneren Scheibe 3, die unter der Kraft des mit einem Pfeil angedeuteten Drucks P in Richtung auf die erste Scheibe verbogen wird. Letztere wird daher häufig auch Membran genannt. Die Scheiben 1, 3 bestehen aus einem nichtleitenden Material und werden mit einem Ring 2 auf Abstand gehalten, der meistens aus Glas besteht. The exemplary embodiments shown essentially consist of a thicker disk 1 and a thinner disk 3 , which is bent under the force of the pressure P indicated by an arrow in the direction of the first disk. The latter is therefore often called the membrane. The disks 1 , 3 consist of a non-conductive material and are kept at a distance by a ring 2 , which is usually made of glass.
Die Innenseite der Membran 3 ist mit einer Elektrode 5 versehen. Mit zunehmendem Druck P wird der Abstand zwischen den Elektroden 5, 7 geringer, so daß die Kapazität größer wird. Über im einzelnen nicht dargestellte Leitungen sind die Elektroden 5, 7 mit einer Schaltung zur Auswertung der Kapazität verbindbar, an deren Ausgang ein den Druck P kennzeichnendes elektrisches Signal ansteht.The inside of the membrane 3 is provided with an electrode 5 . With increasing pressure P, the distance between the electrodes 5 , 7 becomes smaller, so that the capacitance increases. The electrodes 5 , 7 can be connected via lines, not shown in detail, to a circuit for evaluating the capacitance, at whose output an electrical signal characterizing the pressure P is present.
Bei dem in den Fig. 1 und 2 dargestellten Ausführungsbeispiel ist um die Elektrode 7 auf der Scheibe 1 eine Widerstandsbahn 6 mit zwei Anschlüssen 9 angeordnet. Der Widerstand der Widerstandsbahn 6 ist temperaturabhängig, beispielsweise mit negativem oder positivem Temperaturkoeffizienten. In einer weiteren an sich bekannten Schaltung kann der Widerstand dieser Widerstandsbahn gemessen und in ein die Temperatur kennzeichnendes Signal umgewandelt werden.In the embodiment shown in FIGS. 1 and 2, a resistance track 6 with two connections 9 is arranged around the electrode 7 on the disk 1 . The resistance of the resistance track 6 is temperature-dependent, for example with a negative or positive temperature coefficient. In another circuit known per se, the resistance of this resistance track can be measured and converted into a signal characterizing the temperature.
Gegenüber dem ersten Ausführungsbeispiel ist bei dem zweiten in Fig. 3 und 4 gezeigten Ausführungsbeispiel die kleinere Elektrode 5 auf der Membran 3 angeordnet, während die Elektrode 7 auf der dickeren Scheibe 1 aufgetragen ist. Der temperaturabhängige Widerstand 6 befindet sich auf der Membran und nimmt daher weitgehend verzögerungsfrei die Temperatur des Mediums an, dessen Druck gemessen wird und welches mit der Membran 3 in unmittelbarer Berührung steht. Die Scheibe 1 ist mit Bohrungen 11, 12, 13 versehen, durch welche Anschlußleitungen zu den Anschlüssen 8, 9, 10 geführt werden können.Compared to the first embodiment, in the second embodiment shown in FIGS. 3 and 4, the smaller electrode 5 is arranged on the membrane 3 , while the electrode 7 is applied to the thicker disk 1 . The temperature-dependent resistor 6 is located on the membrane and therefore assumes the temperature of the medium, the pressure of which is measured and which is in direct contact with the membrane 3, largely without delay. The disc 1 is provided with bores 11 , 12 , 13 through which connecting lines to the connections 8 , 9 , 10 can be guided.
Die Scheiben können beispielsweise aus Keramik oder Glas hergestellt werden. Werkstoffe und Verfahren für die Elektroden des Kondensators und für die Widerstandsbahn sind an sich bekannt und brauchen im einzelnen nicht näher erläutert zu werden. Für die Widerstandsbahn eignen sich NTC-, PTC- und Platin-Pasten. Dabei können jeweils zwei Pastentypen verwendet werden, nämlich herkömmliche Dickschichtpasten oder Resinat-Pasten. Dadurch lassen sich unterschiedliche Schichtdicken realisieren.The disks can be made of ceramic or glass, for example getting produced. Materials and processes for the Electrodes of the capacitor and for the resistance path are known per se and need no further details to be explained. Are suitable for the resistance track NTC, PTC and platinum pastes. You can use two Paste types are used, namely conventional ones Thick film pastes or resinate pastes. This allows realize different layer thicknesses.
Bei dem Ausführungsbeispiel nach Fig. 5 ist auf der dickeren Scheibe 1 außer der Elektrode 7 und der Widerstandsbahn 6 eine zusätzliche Elektrode vorgesehen, die in an sich bekannter Weise zur Kompensation des Temperatureinflusses bei der Druckmessung verwendet werden kann. Die ringförmige Elektrode 14 weist einen Anschluß 15 auf mit einer Kontaktierungsbohrung 16.In the exemplary embodiment according to FIG. 5, an additional electrode is provided on the thicker disk 1 in addition to the electrode 7 and the resistance track 6 , which can be used in a manner known per se to compensate for the temperature influence during pressure measurement. The annular electrode 14 has a connection 15 with a contact hole 16 .
Die Erfindung ist nicht auf die Ausführungsbeispiele beschränkt, sondern kann im Rahmen des Fachmännischen abgewandelt und verbessert werden. So können beispielsweise die Widerstandsbahn 6 und die zusätzliche Elektrode 14 miteinander vertauscht werden. Sie können auch im Bereich der Glasfügestelle liegen und somit vom Ring 2 (Fig. 1) verdeckt werden. Die in Fig. 5 dargestellten Elektroden und die Widerstandsbahn können auch auf der dünneren Scheibe 3 angeordnet sein. Um die Länge der Widerstandsbahn zu vergrößern, kann diese mäanderförmig ausgelegt sein.The invention is not limited to the exemplary embodiments, but can be modified and improved within the scope of the expert. For example, the resistance track 6 and the additional electrode 14 can be interchanged. They can also lie in the area of the glass joining point and thus be covered by ring 2 ( FIG. 1). The electrodes shown in FIG. 5 and the resistance track can also be arranged on the thinner disk 3 . In order to increase the length of the resistance track, it can be meandering.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19904011901 DE4011901A1 (en) | 1990-04-12 | 1990-04-12 | Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19904011901 DE4011901A1 (en) | 1990-04-12 | 1990-04-12 | Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4011901A1 true DE4011901A1 (en) | 1991-10-17 |
Family
ID=6404317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19904011901 Ceased DE4011901A1 (en) | 1990-04-12 | 1990-04-12 | Capacitive pressure sensor with simultaneous temp. measurement - contains plates carrying electrodes, one carrying temp. dependent resistance path |
Country Status (1)
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DE (1) | DE4011901A1 (en) |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19510617A1 (en) * | 1995-03-23 | 1996-09-26 | Leon Helma Christina | Flexible contact mat e.g. for pressure sensitive switching device |
WO1998037393A1 (en) * | 1997-02-20 | 1998-08-27 | Cecap Ab | A sensor element having temperature measuring means |
US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
EP0893676A2 (en) * | 1997-07-24 | 1999-01-27 | Texas Instruments Incorporated | Combined pressure responsive transducer and temperature sensor apparatus |
DE19732027A1 (en) * | 1997-07-25 | 1999-01-28 | Alphasat Communication Gmbh | Capacitive pressure sensor for measuring periodic or transient pressures or forces |
EP1174696A2 (en) | 2000-07-20 | 2002-01-23 | VEGA Grieshaber KG | Pressure measurement cell with temperature sensor |
EP1186875A2 (en) * | 2000-09-07 | 2002-03-13 | Vega Grieshaber KG | Pressure measurement cell with temperature sensors and method for measuring pressure |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
US6681637B2 (en) | 2000-07-20 | 2004-01-27 | Vega Grieshaber Kg | Pressure-measuring cell with a temperature sensor |
US6698294B2 (en) | 2000-09-07 | 2004-03-02 | Vega Grieshaber Kg | Pressure cell with temperature sensors and pressure measuring method |
DE10248761A1 (en) * | 2002-10-18 | 2004-05-06 | Wilhelm Karmann Gmbh | Capacitive measuring sensor and capacitive sensor system for detecting a pinching situation |
DE102005008959A1 (en) * | 2005-02-28 | 2006-09-07 | Plöchinger, Heinz, Dipl.-Ing. | Pressure sensor for vacuum applications, has similar diaphragms connected together with electromechanical transducer converting deflection to electrical signal |
DE102005017853A1 (en) * | 2005-04-18 | 2006-10-19 | Siemens Ag | Pressure sensor device |
DE102009002662A1 (en) | 2009-04-27 | 2010-10-28 | Ifm Electronic Gmbh | Capacitive pressure sensor, particularly combination sensor for detecting measuring parameter, has ceramic pressure measuring cell which consists of diaphragm, base body and measuring electrodes in form of conductive surface areas |
EP2784462A1 (en) | 2013-03-27 | 2014-10-01 | VEGA Grieshaber KG | Capacitative pressure measurement cell for detecting the pressure of a medium adjacent to the measurement cell |
EP2784461A1 (en) | 2013-03-27 | 2014-10-01 | VEGA Grieshaber KG | Pressure measurement cell for detecting the pressure of a medium adjoining the measurement cell |
DE102013114734A1 (en) * | 2013-12-20 | 2015-07-09 | Endress + Hauser Gmbh + Co. Kg | Capacitive pressure cell with at least one temperature sensor and pressure measuring method |
EP3569995A1 (en) | 2018-05-14 | 2019-11-20 | Huba Control Ag | Sensor recording temperature and pressure |
DE102018117594A1 (en) | 2018-07-20 | 2020-01-23 | Ifm Electronic Gmbh | Pressure measuring cell with temperature sensor and pressure measuring device with such a pressure measuring cell |
DE102020100675A1 (en) | 2019-01-14 | 2020-07-16 | Ifm Electronic Gmbh | Capacitive pressure sensor with temperature detection |
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US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
DE2221062B2 (en) * | 1971-05-10 | 1980-06-04 | The Bendix Corp., Southfield, Mich. (V.St.A.) | Capacitive pressure transducer |
EP0095966A1 (en) * | 1982-05-21 | 1983-12-07 | Allied Corporation | Pressure transducer with an invariable reference capacitor |
DE3512529A1 (en) * | 1985-04-06 | 1985-11-07 | Schoppe & Faeser Gmbh, 4950 Minden | Differential pressure transducer with measures for compensating the influences of variable noise quantities |
-
1990
- 1990-04-12 DE DE19904011901 patent/DE4011901A1/en not_active Ceased
Patent Citations (4)
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DE2221062B2 (en) * | 1971-05-10 | 1980-06-04 | The Bendix Corp., Southfield, Mich. (V.St.A.) | Capacitive pressure transducer |
US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
EP0095966A1 (en) * | 1982-05-21 | 1983-12-07 | Allied Corporation | Pressure transducer with an invariable reference capacitor |
DE3512529A1 (en) * | 1985-04-06 | 1985-11-07 | Schoppe & Faeser Gmbh, 4950 Minden | Differential pressure transducer with measures for compensating the influences of variable noise quantities |
Cited By (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
DE19510617A1 (en) * | 1995-03-23 | 1996-09-26 | Leon Helma Christina | Flexible contact mat e.g. for pressure sensitive switching device |
US6439056B1 (en) | 1997-02-20 | 2002-08-27 | Mks Instruments | Sensor element having temperature measuring means |
WO1998037393A1 (en) * | 1997-02-20 | 1998-08-27 | Cecap Ab | A sensor element having temperature measuring means |
US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
EP0893676A2 (en) * | 1997-07-24 | 1999-01-27 | Texas Instruments Incorporated | Combined pressure responsive transducer and temperature sensor apparatus |
EP0893676A3 (en) * | 1997-07-24 | 1999-12-15 | Texas Instruments Incorporated | Combined pressure responsive transducer and temperature sensor apparatus |
DE19732027A1 (en) * | 1997-07-25 | 1999-01-28 | Alphasat Communication Gmbh | Capacitive pressure sensor for measuring periodic or transient pressures or forces |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6516671B2 (en) | 2000-01-06 | 2003-02-11 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
EP1174696A2 (en) | 2000-07-20 | 2002-01-23 | VEGA Grieshaber KG | Pressure measurement cell with temperature sensor |
EP1174696A3 (en) * | 2000-07-20 | 2003-03-26 | VEGA Grieshaber KG | Pressure measurement cell with temperature sensor |
US6681637B2 (en) | 2000-07-20 | 2004-01-27 | Vega Grieshaber Kg | Pressure-measuring cell with a temperature sensor |
EP1186875A3 (en) * | 2000-09-07 | 2003-03-26 | Vega Grieshaber KG | Pressure measurement cell with temperature sensors and method for measuring pressure |
EP1186875A2 (en) * | 2000-09-07 | 2002-03-13 | Vega Grieshaber KG | Pressure measurement cell with temperature sensors and method for measuring pressure |
US6698294B2 (en) | 2000-09-07 | 2004-03-02 | Vega Grieshaber Kg | Pressure cell with temperature sensors and pressure measuring method |
DE10248761A1 (en) * | 2002-10-18 | 2004-05-06 | Wilhelm Karmann Gmbh | Capacitive measuring sensor and capacitive sensor system for detecting a pinching situation |
US7323885B2 (en) | 2002-10-18 | 2008-01-29 | Wilhelm Karmann Gmbh | Capacitive sensor and detection device with capacitive sensors for the detection of an obstruction situation |
DE10248761B4 (en) * | 2002-10-18 | 2013-10-02 | Wilhelm Karmann Gmbh | Capacitive measuring sensor and detection device with a capacitive sensor for detecting a pinching situation |
DE102005008959A1 (en) * | 2005-02-28 | 2006-09-07 | Plöchinger, Heinz, Dipl.-Ing. | Pressure sensor for vacuum applications, has similar diaphragms connected together with electromechanical transducer converting deflection to electrical signal |
DE102005008959B4 (en) * | 2005-02-28 | 2012-08-30 | Heinz Plöchinger | Pressure sensors and combination pressure sensors and their use |
DE102005017853A1 (en) * | 2005-04-18 | 2006-10-19 | Siemens Ag | Pressure sensor device |
DE102009002662A1 (en) | 2009-04-27 | 2010-10-28 | Ifm Electronic Gmbh | Capacitive pressure sensor, particularly combination sensor for detecting measuring parameter, has ceramic pressure measuring cell which consists of diaphragm, base body and measuring electrodes in form of conductive surface areas |
DE102009002662B4 (en) | 2009-04-27 | 2022-11-24 | Ifm Electronic Gmbh | Capacitive pressure sensor as a combination sensor for recording other measured variables |
CN105074407A (en) * | 2013-03-27 | 2015-11-18 | Vega格里沙贝两合公司 | Capacitive pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell |
WO2014154695A1 (en) * | 2013-03-27 | 2014-10-02 | Vega Grieshaber Kg | Capacitive pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell |
WO2014154696A1 (en) | 2013-03-27 | 2014-10-02 | Vega Grieshaber Kg | Pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell |
EP2784462A1 (en) | 2013-03-27 | 2014-10-01 | VEGA Grieshaber KG | Capacitative pressure measurement cell for detecting the pressure of a medium adjacent to the measurement cell |
EP2784461A1 (en) | 2013-03-27 | 2014-10-01 | VEGA Grieshaber KG | Pressure measurement cell for detecting the pressure of a medium adjoining the measurement cell |
CN105074407B (en) * | 2013-03-27 | 2018-07-06 | Vega格里沙贝两合公司 | For measuring the capacitive pressure measuring cell of surrounding medium pressure |
US9638598B2 (en) | 2013-03-27 | 2017-05-02 | Vega Grieshaber Kg | Capacitive pressure transducer for measuring the pressure of a medium adjacent to the measuring cell |
US9976923B2 (en) | 2013-12-20 | 2018-05-22 | Endress + Hauser Gmbh + Co. Kg | Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method |
CN105917204A (en) * | 2013-12-20 | 2016-08-31 | 恩德莱斯和豪瑟尔两合公司 | Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method |
CN105917204B (en) * | 2013-12-20 | 2019-08-27 | 恩德莱斯和豪瑟尔欧洲两合公司 | Capacitive pressure measuring unit at least one temperature sensor |
DE102013114734A1 (en) * | 2013-12-20 | 2015-07-09 | Endress + Hauser Gmbh + Co. Kg | Capacitive pressure cell with at least one temperature sensor and pressure measuring method |
EP3569995A1 (en) | 2018-05-14 | 2019-11-20 | Huba Control Ag | Sensor recording temperature and pressure |
US11081284B2 (en) | 2018-05-14 | 2021-08-03 | Huba Control Ag | Sensor recording temperature and pressure |
DE102018117594A1 (en) | 2018-07-20 | 2020-01-23 | Ifm Electronic Gmbh | Pressure measuring cell with temperature sensor and pressure measuring device with such a pressure measuring cell |
DE102020100675A1 (en) | 2019-01-14 | 2020-07-16 | Ifm Electronic Gmbh | Capacitive pressure sensor with temperature detection |
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