DE3925711C1 - - Google Patents

Info

Publication number
DE3925711C1
DE3925711C1 DE3925711A DE3925711A DE3925711C1 DE 3925711 C1 DE3925711 C1 DE 3925711C1 DE 3925711 A DE3925711 A DE 3925711A DE 3925711 A DE3925711 A DE 3925711A DE 3925711 C1 DE3925711 C1 DE 3925711C1
Authority
DE
Germany
Prior art keywords
recipient
samples
cathode sputtering
receptacle
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3925711A
Other languages
German (de)
English (en)
Inventor
Gabriela 7500 Karlsruhe De Hilz
Stefan 6521 Dorn-Duerkheim De Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut für Technologie
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to DE3925711A priority Critical patent/DE3925711C1/de
Application granted granted Critical
Publication of DE3925711C1 publication Critical patent/DE3925711C1/de
Priority to AT90109079T priority patent/ATE102265T1/de
Priority to EP90109079A priority patent/EP0411256B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE3925711A 1989-08-03 1989-08-03 Expired - Lifetime DE3925711C1 (cg-RX-API-DMAC7.html)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE3925711A DE3925711C1 (cg-RX-API-DMAC7.html) 1989-08-03 1989-08-03
AT90109079T ATE102265T1 (de) 1989-08-03 1990-05-14 Kathodenzerstaeubungsanlage.
EP90109079A EP0411256B1 (de) 1989-08-03 1990-05-14 Kathodenzerstäubungsanlage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3925711A DE3925711C1 (cg-RX-API-DMAC7.html) 1989-08-03 1989-08-03

Publications (1)

Publication Number Publication Date
DE3925711C1 true DE3925711C1 (cg-RX-API-DMAC7.html) 1990-04-19

Family

ID=6386449

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3925711A Expired - Lifetime DE3925711C1 (cg-RX-API-DMAC7.html) 1989-08-03 1989-08-03

Country Status (3)

Country Link
EP (1) EP0411256B1 (cg-RX-API-DMAC7.html)
AT (1) ATE102265T1 (cg-RX-API-DMAC7.html)
DE (1) DE3925711C1 (cg-RX-API-DMAC7.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD111409A1 (cg-RX-API-DMAC7.html) * 1974-05-02 1975-02-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD111409A1 (cg-RX-API-DMAC7.html) * 1974-05-02 1975-02-12

Also Published As

Publication number Publication date
EP0411256B1 (de) 1994-03-02
EP0411256A3 (en) 1991-10-23
EP0411256A2 (de) 1991-02-06
ATE102265T1 (de) 1994-03-15

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Legal Events

Date Code Title Description
8100 Publication of patent without earlier publication of application
D1 Grant (no unexamined application published) patent law 81
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee