DE3903466A1 - Heating furnace for the internal coating of preforms for optical waveguides - Google Patents
Heating furnace for the internal coating of preforms for optical waveguidesInfo
- Publication number
- DE3903466A1 DE3903466A1 DE19893903466 DE3903466A DE3903466A1 DE 3903466 A1 DE3903466 A1 DE 3903466A1 DE 19893903466 DE19893903466 DE 19893903466 DE 3903466 A DE3903466 A DE 3903466A DE 3903466 A1 DE3903466 A1 DE 3903466A1
- Authority
- DE
- Germany
- Prior art keywords
- heating furnace
- seals
- substrate tube
- furnace according
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01876—Means for heating tubes or rods during or immediately prior to deposition, e.g. electric resistance heaters
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01884—Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2205/00—Fibre drawing or extruding details
- C03B2205/60—Optical fibre draw furnaces
- C03B2205/80—Means for sealing the preform entry or upper end of the furnace
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2205/00—Fibre drawing or extruding details
- C03B2205/60—Optical fibre draw furnaces
- C03B2205/82—Means for sealing the fibre exit or lower end of the furnace
Abstract
Description
Lichtwellenleiter bestehen bekanntlich aus einem Kern und einem Mantel. Der Lichtwellenleiterkern hat einen größeren Brechungsindex als der Lichtwellenleiter mantel. Für die Herstellung von Lichtwellenleitern wird zunächst eine Vorform benötigt, aus der eine Glasfaser durch Ziehen hergestellt wird. Bei der Herstellung von Vorformen für Lichtwellenleiter unterscheidet man das sogenannte Innenbeschichtungsverfahren und das soge nannte Außenbeschichtungsverfahren. Beim Innenbeschich ten wird zum Beispiel die innere Oberfläche eines Sub stratrohres zunächst mit Mantelmaterial beschichtet und anschließend wird das mit Mantelmaterial innenbeschich tete Substratrohr mit Kernmaterial innenbeschichtet. Die Innenbeschichtung erfolgt mittels des CVD-Verfahrens.As is well known, optical fibers consist of a core and a coat. The fiber optic core has one larger refractive index than the optical fiber coat. For the production of optical fibers First a preform is required, from which a glass fiber is made by pulling. In the manufacture of A distinction is made between preforms for optical fibers so-called inner coating process and the so-called called exterior coating processes. When coating inside For example, the inner surface of a sub strat tube first coated with jacket material and then the inside is coated with jacket material substrate tube coated with core material on the inside. The inner coating is done using the CVD process.
Bei der Innenbeschichtung nach dem CVD-Verfahren wird ein Reaktionsgas durch das innenzubeschichtende Sub stratrohr geleitet und im Substratrohr durch entsprechen de Erhitzung zur chemischen Reaktion gebracht. Als Reaktionsprodukt entsteht bei der chemischen Reaktion in Abhängigkeit vom eingeführten Reaktionsgas Mantel material bzw. Kernmaterial. Die erforderliche Erhitzung des Substratrohres bzw. des durch das Substratrohr ge leiteten Reaktionsgases erfolgt durch einen bewegbaren Widerstandsofen, der in seiner Mitte eine Öffnung auf weist, durch die das innenzubeschichtende Substratrohr geführt wird. Während der Innenbeschichtung des Sub stratrohres wird der Heizofen längs der äußeren Ober fläche des innenzubeschichtenden Substratrohres bewegt.For the interior coating using the CVD process a reaction gas through the sub to be coated strat tube and pass through in the substrate tube de heating brought about a chemical reaction. As The reaction product is created during the chemical reaction depending on the introduced reaction gas jacket material or core material. The required heating of the substrate tube or ge through the substrate tube conducted reaction gas is carried out by a movable Resistance furnace with an opening in the middle points through which the substrate tube to be coated to be led. During the inner coating of the Sub stratrohres the heater along the outer upper Moved surface of the substrate tube to be coated.
Als Heizquellen zur Erzielung der erforderlichen Reak tionstemperatur werden entweder Knallgasbrenner oder elektrische Widerstandsöfen verwendet. Der elektrische Ofen hat den Vorteil, daß in reduzierter Atmosphäre gearbeitet und damit ein Verdampfen von Quarzglas ver hindert wird. Im Fall des Widerstandsofens bestehen die Heizelemente vorzugsweise aus Graphit. Um das Eindringen der äußeren Atmosphäre in das heiße Innere des Ofens zu verhindern, wird der Zwischenraum zwischen dem Substrat rohr und dem Heizofen mit einem Edelgas wie z.B. Argon gespült. Bei ungenügender Abdichtung nach außen entsteht ein Kamineffekt und damit die Gefahr, daß die äußere Atmosphäre von unten her in den Zwischenraum zwischen Substratrohr und Heizofen gepreßt wird. Gelangt die äußere Atmosphäre in das Ofeninnere, so besteht zum einen die Gefahr, daß die Lebensdauer der Heizelemente reduziert wird, zum anderen wird die komplette Thermik des Ofens unkontrollierbar.As heat sources to achieve the required reak tion temperature are either oxyhydrogen burners or electrical resistance furnaces used. The electric one Oven has the advantage of being in a reduced atmosphere worked and thus an evaporation of quartz glass ver is prevented. In the case of the resistance furnace, there are Heating elements preferably made of graphite. For intrusion the outside atmosphere into the hot inside of the furnace will prevent the gap between the substrate pipe and the heating furnace with an inert gas such as argon rinsed. If there is insufficient external sealing a chimney effect and thus the danger that the outer Atmosphere from below into the space between Substrate tube and heating furnace is pressed. Get the outside atmosphere in the furnace interior, so there is one the danger that the life of the heating elements is reduced, on the other hand the complete thermals of the oven uncontrollable.
Der Erfindung liegt die Aufgabe zugrunde, einen Heiz ofen zur Innenbeschichtung von Substratrohren für Licht wellenleiter anzugeben, bei dem eine vollkommene Ab dichtung des Zwischenraumes zwischen dem Substratrohr und dem Heizofen gewährleistet ist und dadurch ein Ein dringen der äußeren Atmosphäre zwischen Substratrohr und Heizofen verhindert wird. Außerdem soll durch die Erfindung eine automatische Abdichtung des Zwischen raums ohne manuelle Nachstellung auch dann gewährleistet sein, wenn das Substratrohr infolge der Wärmebehandlung dünner wird oder gar zu einem Stab kollabiert. Diese Aufgabe wird bei einem bewegbaren Heizofen zur Innen beschichtung von Substratrohren für Lichtwellenleiter nach der Erfindung durch die kennzeichnenden Merkmale des Anspruches 1 gelöst.The invention has for its object a heater furnace for the inner coating of substrate tubes for light to specify waveguide in which a complete Ab sealing the space between the substrate tube and the heater is guaranteed and thereby an on penetrate the outer atmosphere between the substrate tube and heating oven is prevented. In addition, the Invention an automatic sealing of the intermediate guaranteed even without manual adjustment be when the substrate tube due to the heat treatment becomes thinner or even collapses into a rod. These The task becomes with a movable heating furnace to the inside coating of substrate tubes for optical fibers according to the invention by the characteristic features of claim 1 solved.
Die Erfindung wird im folgenden an Ausführungsbeispielen erläutert.The invention is based on exemplary embodiments explained.
Die Fig. 1 zeigt einen elektrischen Widerstandsofen 1, der in der Mitte eine Öffnung aufweist, in der das innenzubeschichtende Substratrohr 2 steckt. Bei der Innenbeschichtung des Substratrohres 2 wird der Wider standsofen 1 längs der Oberfläche des Substratrohres 2 bewegt, damit nicht das gesamte Substratrohr 2 gleich zeitig erhitzt wird, sondern nur jeweils ein begrenzter Bereich. Wenn der Spalt zwischen dem Substratrohr 2 und der Innenwand des Ofens 1 im oberen Ofenbereich nicht ordentlich abgedichtet ist, entsteht der bereits er wähnte Kamineffekt, der bewirkt, daß in unerwünschter Weise die Außenatmosphäre in den Spalt zwischen dem Substratrohr 2 und der Innenwand des Ofens 1 gelangt. Fig. 1 shows an electric resistance furnace 1, which has in the center an opening in which the innenzubeschichtende substrate tube 2 inserted. In the inner coating of the substrate tube 2 , the resistance oven 1 is moved along the surface of the substrate tube 2 , so that not the entire substrate tube 2 is heated at the same time, but only a limited area. If the gap between the substrate tube 2 and the inner wall of the furnace 1 in the upper region of the furnace is not properly sealed, the chimney effect already mentioned arises, which causes the outside atmosphere in the gap between the substrate tube 2 and the inner wall of the furnace 1 in an undesirable manner reached.
Die erforderliche Abdichtung zwischen dem Substratrohr 1 und der Innenwand des Ofens wird gemäß der Erfindung durch eine oder mehrere ringförmige Abdichtungen er zielt, von denen in der Fig. 2 eine dargestellt ist. Die in der Fig. 2 dargestellte Dichtung 3 hat in ihrer Mitte eine Bohrung 4, deren Durchmesser kleiner als der Außendurchmesser des Substratrohres 2 ist. Der Durch messer der Dichtungsbohrung entspricht dem Außendurch messer eines aus dem Substratrohr durch Kollabieren gewonnenen Stabes. Die Dichtung 3 besteht aus elasti schem Material, damit sie sich an das Substratrohr 2 anschmiegen kann, wenn der Ofen 1 längs der Oberfläche des Substratrohres 2 bewegt wird. Die Dichtung 3 hat Einschnitte 5, die in radialer Richtung verlaufen. Die Einschnitte 5 verlaufen vom inneren Dichtungsrand 6 radial nach außen und enden im Abstand vom äußeren Dichtungsrand 7. Die Dichtung 3 hat die Form einer Lochscheibe.The required seal between the substrate tube 1 and the inner wall of the furnace is according to the invention by one or more annular seals, he aims, one of which is shown in Fig. 2. The seal 3 shown in FIG. 2 has in its center a bore 4 , the diameter of which is smaller than the outer diameter of the substrate tube 2 . The diameter of the sealing bore corresponds to the outer diameter of a rod obtained from the substrate tube by collapsing. The seal 3 is made of elastic material so that it can nestle against the substrate tube 2 when the furnace 1 is moved along the surface of the substrate tube 2 . The seal 3 has incisions 5 which run in the radial direction. The incisions 5 run radially outward from the inner sealing edge 6 and end at a distance from the outer sealing edge 7 . The seal 3 has the shape of a perforated disc.
Die Dichtung 3 besteht beispielsweise aus Graphitfilz, um der hohen Temperaturbelastung standzuhalten.The seal 3 consists, for example, of graphite felt in order to withstand the high temperature load.
Die Dichtung 3 wird in eine Aufnahme 8 gelegt, die in der Fig. 3 dargestellt ist. Die Aufnahme 8 der Fig. 2 ist tellerförmig ausgebildet und hat in ihrer Mitte eine Bohrung 9 für die Durchführung des Substratrohres 2. Die Aufnahme 8 hat einen rohrförmigen Stutzen 10, der in die Bohrung des Heizofens 1 gesteckt wird. Die Bohrung 9 der Aufnahme 8 ist kegelförmig ausgebildet, damit die Dichtung 3 in ihrem mittleren Bereich nach unten ausweichen kann.The seal 3 is placed in a receptacle 8 , which is shown in FIG. 3. The receptacle 8 of FIG. 2 is plate-shaped and has a bore 9 in its center for the passage of the substrate tube 2 . The receptacle 8 has a tubular socket 10 which is inserted into the bore of the heating furnace 1 . The bore 9 of the receptacle 8 is conical so that the seal 3 can move downwards in its central region.
Die Fig. 4 zeigt den Widerstandsofen 1 mit dem Sub stratrohr 2 sowie die Aufnahme 8 für die Dichtung(en), die mittels ihrer Rohrstutzen 10 in der Bohrung des Ofens 1 gehaltert ist. Fig. 4 shows the resistance furnace 1 with the sub stratrohr 2 and the receptacle 8 for the seal (s), which is held by means of its pipe socket 10 in the bore of the furnace 1 .
Obwohl in der Fig. 2 der Einfachheit halber nur eine Dichtung (3) dargestellt ist, werden im allgemeinen mehrere Dichtungen verwendet, die die gleiche Struktur besitzen wie die Dichtung 3 der Fig. 2. Die Fig. 5 und 6 zeigen eine Bestückung der Aufnahme 8 mit zwei Dichtungen 11 und 12, die beispielsweise aus 0,5 mm dickem Kohlefaser-Kohlenstoff bestehen und eine federn de Rückstellkraft besitzen. Die Bohrung ist etwas größer gewählt, damit das Substratrohr nicht berührt wird. Although only one seal ( 3 ) is shown in FIG. 2 for the sake of simplicity, several seals are generally used which have the same structure as the seal 3 of FIG. 2. FIGS. 5 and 6 show an assembly of the receptacle 8 with two seals 11 and 12 , which consist for example of 0.5 mm thick carbon fiber carbon and have a resilient restoring force. The hole is chosen a little larger so that the substrate tube is not touched.
Die Dichtungen 11 und 12 sind in der Aufnahme 8 ver setzt gegeneinander angeordnet, und zwar derart, daß sich die Schlitze 5 der Dichtung 11 über den zwischen den Schlitzen befindlichen Stegen der unteren Dichtung 12 befinden. Durch die versetzte Anordnung der Dich tungen wird die Abdichtung des Spaltes zwischen dem Substratrohr 2 und dem Heizofen 1 verbessert. Über der oberen Dichtung 12 befinden sich beim Ausführungsbei spiel der Fig. 5 und 6 zwei Lochscheiben 13 und 14, aus Graphitfils, die die Aufgabe haben, sich an das Substratrohr anzuschmiegen und einen dichten Abschluß zu gewährleisten.The seals 11 and 12 are mutually arranged in the receptacle 8 , in such a way that the slots 5 of the seal 11 are above the webs of the lower seal 12 located between the slots. The staggered arrangement of the lines, the sealing of the gap between the substrate tube 2 and the heating furnace 1 is improved. Above the upper seal 12 is during Ausführungsbei game of Figs. 5 and 6 has two perforated discs 13 and 14, from Graphitfils, which have the task to conform to the substrate tube and to ensure a tight seal.
Die Aufnahme 8 ist durch einen Deckel 15 abgeschlossen, der in seiner Mitte eine Bohrung zum Durchführen des Substratrohres 2 aufweist. Das Verschließen der Auf nahme 8 mittels des Deckels 13 erfolgt mit Hilfe eines Bajonettverschlusses.The receptacle 8 is closed by a cover 15 , which has a hole in the middle for the passage of the substrate tube 2 . The closing of the acquisition 8 by means of the lid 13 is carried out with the aid of a bayonet catch.
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19893903466 DE3903466A1 (en) | 1989-02-06 | 1989-02-06 | Heating furnace for the internal coating of preforms for optical waveguides |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19893903466 DE3903466A1 (en) | 1989-02-06 | 1989-02-06 | Heating furnace for the internal coating of preforms for optical waveguides |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3903466A1 true DE3903466A1 (en) | 1990-08-09 |
Family
ID=6373515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19893903466 Withdrawn DE3903466A1 (en) | 1989-02-06 | 1989-02-06 | Heating furnace for the internal coating of preforms for optical waveguides |
Country Status (1)
Country | Link |
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DE (1) | DE3903466A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2749296A1 (en) * | 1996-05-29 | 1997-12-05 | Alcatel Fibres Optiques | Air-tight enclosure for a fibrillating tower for the fabrication of an optic fibre |
WO2000068157A1 (en) * | 1999-05-10 | 2000-11-16 | Pirelli Cavi E Sistemi S.P.A. | Method and induction furnace for drawing large diameter preforms to optical fibres |
FR2802916A1 (en) * | 1999-12-27 | 2001-06-29 | Cit Alcatel | PREFORM INPUT ARRANGEMENT FOR FIBER OPTIC DRAWING OVEN, OVEN HAVING SUCH ARRANGEMENT AND PREFORM EQUIPPED TO COOPERATE WITH THIS ARRANGEMENT |
EP2028165A1 (en) * | 2007-07-24 | 2009-02-25 | Shin-Etsu Chemical Co., Ltd. | A furnace for fabricating a glass preform or an optical fiber |
JP2010132505A (en) * | 2008-12-05 | 2010-06-17 | Fujikura Ltd | Optical fiber production device and method for producing optical fiber |
US8322165B2 (en) * | 2007-08-10 | 2012-12-04 | Shin-Etsu Chemical Co., Ltd. | Apparatus for fabricating an optical fiber |
US9676503B2 (en) | 2012-05-14 | 2017-06-13 | Nextrom Oy | Sealing apparatus having a plurality of sealing elements arranged around a center opening into a ring configuration |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3025680A1 (en) * | 1980-07-07 | 1982-02-04 | Siemens AG, 1000 Berlin und 8000 München | High-temp. furnace heating element - is graphite cylinder heated by high-frequency induction and platinum or iridium coated |
DE3625731A1 (en) * | 1986-07-30 | 1988-02-11 | Kabelmetal Electro Gmbh | Process for the production of optical waveguides |
-
1989
- 1989-02-06 DE DE19893903466 patent/DE3903466A1/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3025680A1 (en) * | 1980-07-07 | 1982-02-04 | Siemens AG, 1000 Berlin und 8000 München | High-temp. furnace heating element - is graphite cylinder heated by high-frequency induction and platinum or iridium coated |
DE3625731A1 (en) * | 1986-07-30 | 1988-02-11 | Kabelmetal Electro Gmbh | Process for the production of optical waveguides |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2749296A1 (en) * | 1996-05-29 | 1997-12-05 | Alcatel Fibres Optiques | Air-tight enclosure for a fibrillating tower for the fabrication of an optic fibre |
WO2000068157A1 (en) * | 1999-05-10 | 2000-11-16 | Pirelli Cavi E Sistemi S.P.A. | Method and induction furnace for drawing large diameter preforms to optical fibres |
US7814767B2 (en) | 1999-05-10 | 2010-10-19 | Prysmian Cavi E Sistemi Energia S.R.L. | Method and induction furnace for drawing large diameter preforms to optical fibres |
EP1112978A1 (en) * | 1999-12-27 | 2001-07-04 | Alcatel | Preform entry device for an optical fibre draw furnace and draw furnace comprising said entry device |
US6993937B2 (en) | 1999-12-27 | 2006-02-07 | Alcatel | Preform inlet arrangement for an optical fiber drawing furnace, a furnace provided with that kind of inlet arrangement, and a preform equipped to co-operate with that inlet arrangement |
FR2802916A1 (en) * | 1999-12-27 | 2001-06-29 | Cit Alcatel | PREFORM INPUT ARRANGEMENT FOR FIBER OPTIC DRAWING OVEN, OVEN HAVING SUCH ARRANGEMENT AND PREFORM EQUIPPED TO COOPERATE WITH THIS ARRANGEMENT |
EP2028165A1 (en) * | 2007-07-24 | 2009-02-25 | Shin-Etsu Chemical Co., Ltd. | A furnace for fabricating a glass preform or an optical fiber |
JP2009046386A (en) * | 2007-07-24 | 2009-03-05 | Shin Etsu Chem Co Ltd | Heating furnace |
KR100970319B1 (en) * | 2007-07-24 | 2010-07-15 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Furnace for fabricating a glass preform or an optical fiber |
CN104445911A (en) * | 2007-07-24 | 2015-03-25 | 信越化学工业株式会社 | Furnace |
US8322165B2 (en) * | 2007-08-10 | 2012-12-04 | Shin-Etsu Chemical Co., Ltd. | Apparatus for fabricating an optical fiber |
JP2010132505A (en) * | 2008-12-05 | 2010-06-17 | Fujikura Ltd | Optical fiber production device and method for producing optical fiber |
US8701445B2 (en) | 2008-12-05 | 2014-04-22 | Fujikura Ltd. | Optical fiber manufacturing apparatus and optical fiber manufacturing method |
US9676503B2 (en) | 2012-05-14 | 2017-06-13 | Nextrom Oy | Sealing apparatus having a plurality of sealing elements arranged around a center opening into a ring configuration |
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OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
8127 | New person/name/address of the applicant |
Owner name: KABEL RHEYDT AG, 4050 MOENCHENGLADBACH, DE |
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8139 | Disposal/non-payment of the annual fee |