DE3885568D1 - Flacher Pendelbeschleunigungsaufnehmer. - Google Patents

Flacher Pendelbeschleunigungsaufnehmer.

Info

Publication number
DE3885568D1
DE3885568D1 DE88402429T DE3885568T DE3885568D1 DE 3885568 D1 DE3885568 D1 DE 3885568D1 DE 88402429 T DE88402429 T DE 88402429T DE 3885568 T DE3885568 T DE 3885568T DE 3885568 D1 DE3885568 D1 DE 3885568D1
Authority
DE
Germany
Prior art keywords
flat pendulum
pendulum accelerometer
accelerometer
flat
pendulum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88402429T
Other languages
English (en)
Other versions
DE3885568T2 (de
Inventor
Andre Boura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR8713619A external-priority patent/FR2621394B2/fr
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Application granted granted Critical
Publication of DE3885568D1 publication Critical patent/DE3885568D1/de
Publication of DE3885568T2 publication Critical patent/DE3885568T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
DE88402429T 1987-10-02 1988-09-27 Flacher Pendelbeschleunigungsaufnehmer. Expired - Fee Related DE3885568T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8713619A FR2621394B2 (fr) 1984-03-06 1987-10-02 Capteur accelerometrique a structure pendulaire plane

Publications (2)

Publication Number Publication Date
DE3885568D1 true DE3885568D1 (de) 1993-12-16
DE3885568T2 DE3885568T2 (de) 1994-03-17

Family

ID=9355446

Family Applications (2)

Application Number Title Priority Date Filing Date
DE88402429T Expired - Fee Related DE3885568T2 (de) 1987-10-02 1988-09-27 Flacher Pendelbeschleunigungsaufnehmer.
DE198888402429T Pending DE311484T1 (de) 1987-10-02 1988-09-27 Flacher pendelbeschleunigungsaufnehmer.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE198888402429T Pending DE311484T1 (de) 1987-10-02 1988-09-27 Flacher pendelbeschleunigungsaufnehmer.

Country Status (4)

Country Link
US (1) US4920800A (de)
EP (1) EP0311484B1 (de)
JP (1) JP2680068B2 (de)
DE (2) DE3885568T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022464C2 (de) * 1990-07-14 2000-12-28 Bosch Gmbh Robert Beschleunigungssensor
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
EP0543901B1 (de) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithischer beschleunigungsmesser
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5763782A (en) * 1992-03-16 1998-06-09 British Technology Group Limited Micromechanical sensor
DE19503009C2 (de) * 1995-01-31 1998-09-10 Hs Tech & Design Beschleunigungssensor
FR2910635B1 (fr) * 2006-12-20 2009-03-06 Thales Sa Lame de guidage de masse d'epreuve et systeme electromecanique micro-usine comportant une telle lame
US8793926B2 (en) 2011-04-22 2014-08-05 Universal Select-A-Catch, Llc Foot snare device
RU2492490C1 (ru) * 2011-12-21 2013-09-10 Открытое акционерное общество "Московский радиозавод "Темп" Чувствительный элемент микромеханического акселерометра

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE667507C (de) * 1936-11-27 1938-11-12 Versuchsanstalt Fuer Luftfahrt Vorrichtung zur Messung von Laengsbeschleunigungen
US2702186A (en) * 1947-07-07 1955-02-15 Bell Telephone Labor Inc Accelerometer
US3636774A (en) * 1969-08-25 1972-01-25 Conrac Corp Dual mass accelerometer with semiconductive transducer
US4600934A (en) * 1984-01-06 1986-07-15 Harry E. Aine Method of undercut anisotropic etching of semiconductor material
FR2560997B1 (fr) * 1984-03-06 1987-06-05 Sfena Capteur accelerometrique a structure pendulaire plane
FR2580389B2 (fr) * 1985-04-16 1989-03-03 Sfena Accelerometre micro-usine a rappel electrostatique

Also Published As

Publication number Publication date
JP2680068B2 (ja) 1997-11-19
EP0311484B1 (de) 1993-11-10
JPH01163669A (ja) 1989-06-27
US4920800A (en) 1990-05-01
DE3885568T2 (de) 1994-03-17
EP0311484A3 (de) 1992-01-22
EP0311484A2 (de) 1989-04-12
DE311484T1 (de) 1990-04-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee