DE3877877D1 - Veraenderung der grenzschichtfelder zwischen isolatoren und halbleitern. - Google Patents
Veraenderung der grenzschichtfelder zwischen isolatoren und halbleitern.Info
- Publication number
- DE3877877D1 DE3877877D1 DE8888115112T DE3877877T DE3877877D1 DE 3877877 D1 DE3877877 D1 DE 3877877D1 DE 8888115112 T DE8888115112 T DE 8888115112T DE 3877877 T DE3877877 T DE 3877877T DE 3877877 D1 DE3877877 D1 DE 3877877D1
- Authority
- DE
- Germany
- Prior art keywords
- insulators
- semiconductors
- change
- border layer
- layer fields
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012212 insulator Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28185—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation with a treatment, e.g. annealing, after the formation of the gate insulator and before the formation of the definitive gate conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28211—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a gaseous ambient using an oxygen or a water vapour, e.g. RTO, possibly through a layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/3115—Doping the insulating layers
- H01L21/31155—Doping the insulating layers by ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/003—Anneal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/024—Defect control-gettering and annealing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/06—Gettering
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9904887A | 1987-09-21 | 1987-09-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3877877D1 true DE3877877D1 (de) | 1993-03-11 |
DE3877877T2 DE3877877T2 (de) | 1993-05-19 |
Family
ID=22272308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888115112T Expired - Fee Related DE3877877T2 (de) | 1987-09-21 | 1988-09-15 | Veraenderung der grenzschichtfelder zwischen isolatoren und halbleitern. |
Country Status (5)
Country | Link |
---|---|
US (1) | US6117749A (de) |
EP (1) | EP0308814B1 (de) |
JP (1) | JPH01165130A (de) |
CA (1) | CA1315420C (de) |
DE (1) | DE3877877T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03190230A (ja) * | 1989-12-20 | 1991-08-20 | Fujitsu Ltd | 半導体装置およびその製造方法 |
DE4316855C1 (de) * | 1993-05-19 | 1994-09-15 | Siemens Ag | Mikroelektronische Schaltungsstruktur und Verfahren zu deren Herstellung |
US5387530A (en) * | 1993-06-29 | 1995-02-07 | Digital Equipment Corporation | Threshold optimization for soi transistors through use of negative charge in the gate oxide |
US5407850A (en) * | 1993-06-29 | 1995-04-18 | Digital Equipment Corporation | SOI transistor threshold optimization by use of gate oxide having positive charge |
JP4397491B2 (ja) * | 1999-11-30 | 2010-01-13 | 財団法人国際科学振興財団 | 111面方位を表面に有するシリコンを用いた半導体装置およびその形成方法 |
FR2881419B1 (fr) * | 2005-01-28 | 2007-11-09 | Centre Nat Rech Scient | Procede de fabrication d'un materiau a base d'oxyde de silicium et a faible constante dielectrique |
JP2017055015A (ja) * | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 半導体装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1444538A1 (de) * | 1963-08-12 | 1968-12-12 | Siemens Ag | Verfahren zum Herstellen von Halbleiterbauelementen |
US3310442A (en) * | 1964-10-16 | 1967-03-21 | Siemens Ag | Method of producing semiconductors by diffusion |
US3328210A (en) * | 1964-10-26 | 1967-06-27 | North American Aviation Inc | Method of treating semiconductor device by ionic bombardment |
DE1544281C3 (de) * | 1966-03-04 | 1975-04-03 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Dotieren von Silicium- Halbleitermaterial |
NL6807368A (de) * | 1967-07-05 | 1969-01-07 | ||
US3664895A (en) * | 1969-06-13 | 1972-05-23 | Gen Electric | Method of forming a camera tube diode array target by masking and diffusion |
FR2191272A1 (de) * | 1972-06-27 | 1974-02-01 | Ibm France | |
US4007294A (en) * | 1974-06-06 | 1977-02-08 | Rca Corporation | Method of treating a layer of silicon dioxide |
US4048350A (en) * | 1975-09-19 | 1977-09-13 | International Business Machines Corporation | Semiconductor device having reduced surface leakage and methods of manufacture |
GB1596184A (en) * | 1976-11-27 | 1981-08-19 | Fujitsu Ltd | Method of manufacturing semiconductor devices |
GB1566072A (en) * | 1977-03-28 | 1980-04-30 | Tokyo Shibaura Electric Co | Semiconductor device |
FR2395606A1 (fr) * | 1978-02-08 | 1979-01-19 | Ibm | Structure de capacite amelioree a champ eleve utilisant une region de piegeage de porteurs |
GB2028582A (en) * | 1978-08-17 | 1980-03-05 | Plessey Co Ltd | Field effect structure |
JPS56125848A (en) * | 1980-03-07 | 1981-10-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Surface treatment of semiconductor |
JPH0783031B2 (ja) * | 1984-03-08 | 1995-09-06 | 敏和 須田 | ▲ii▼−▲v▼族化合物半導体の薄膜又は結晶の製造方法 |
US4622082A (en) * | 1984-06-25 | 1986-11-11 | Monsanto Company | Conditioned semiconductor substrates |
US4710478A (en) * | 1985-05-20 | 1987-12-01 | United States Of America As Represented By The Secretary Of The Navy | Method for making germanium/gallium arsenide high mobility complementary logic transistors |
EP0213972A1 (de) * | 1985-08-30 | 1987-03-11 | SILICONIX Incorporated | Verfahren zum Ändern der Schwellspannung eines DMOS Transistors |
-
1988
- 1988-09-15 EP EP88115112A patent/EP0308814B1/de not_active Expired - Lifetime
- 1988-09-15 DE DE8888115112T patent/DE3877877T2/de not_active Expired - Fee Related
- 1988-09-20 CA CA000577875A patent/CA1315420C/en not_active Expired - Fee Related
- 1988-09-21 JP JP63235098A patent/JPH01165130A/ja active Pending
-
1991
- 1991-03-13 US US07/668,365 patent/US6117749A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0308814B1 (de) | 1993-01-27 |
JPH01165130A (ja) | 1989-06-29 |
CA1315420C (en) | 1993-03-30 |
US6117749A (en) | 2000-09-12 |
EP0308814A2 (de) | 1989-03-29 |
DE3877877T2 (de) | 1993-05-19 |
EP0308814A3 (en) | 1989-04-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3680937D1 (de) | Untergrundwand und draenierung. | |
DE3584915D1 (de) | Halbleitermaterial und substrat. | |
DE69333336D1 (de) | Isolatorstruktur und zugehöriges Herstellungsverfahren | |
DE68923456T2 (de) | Sich anpassender verband und beschichtungsmaterial. | |
FI874671A (fi) | Anordning foer foerhindrande av laeckage i tryckledningar. | |
FI870919A (fi) | Anordning foer avsaltning av saltvatten med membrandestillation. | |
IT1223135B (it) | Dispositivo semiconduttore e metodo di fabbricazione dello stesso | |
FI862231A (fi) | Anordning foer utkastning av spelbollar. | |
NO890045L (no) | Baatskrog og fremgangsmaate for fremstilling og belegging derav. | |
DE3686310T2 (de) | Dielektrisch isoliertes integriertes halbleiterbauelement und herstellungsverfahren. | |
NO862603D0 (no) | Keramiske gjenstander med flere spenningssoner. | |
DE3877877T2 (de) | Veraenderung der grenzschichtfelder zwischen isolatoren und halbleitern. | |
DE3584513D1 (de) | Keramisches material vom perowskite-typ und herstellung. | |
DE3581355D1 (de) | Siliziumduesenstruktur und herstellungsverfahren. | |
DE68910942T2 (de) | Verteilung der strömung. | |
DE3684302D1 (de) | Duennschicht-halbleiterstrukturen. | |
NO895158D0 (no) | Fremgangsmaate for fremstilling av antiretrovirale furanketoner. | |
DE69123415T2 (de) | Supraleitendes Bauelement mit verringerter Dicke der supraleitenden Oxydschicht und dessen Herstellungsverfahren | |
NO885200L (no) | Fremgangsmaate for fremstilling av pro-legemidler. | |
DE3886337D1 (de) | Halbleiteranordnungen und Herstellungsverfahren. | |
FI864469A0 (fi) | Anordning foer maetning av styvheten i paketaemnesveck. | |
FI870765A (fi) | Anordning foer inriktning av styckealster i frammatningsenheter hos aggregat. | |
GB2166293B (en) | Methods of fabricating semiconductor devices and the semiconductor devices obtained thereby | |
DE3688817D1 (de) | 5-azido-deoxyuridinverbindungen und deren herstellung. | |
ATE56766T1 (de) | Fuer fluessigkeit durchlaessige flache struktur und herstellung derselben. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |