DE3863702D1 - Herstellungsverfahren zur gleichzeitigen herstellung mehrerer-kapazitiver druckmesswandler. - Google Patents

Herstellungsverfahren zur gleichzeitigen herstellung mehrerer-kapazitiver druckmesswandler.

Info

Publication number
DE3863702D1
DE3863702D1 DE8888401418T DE3863702T DE3863702D1 DE 3863702 D1 DE3863702 D1 DE 3863702D1 DE 8888401418 T DE8888401418 T DE 8888401418T DE 3863702 T DE3863702 T DE 3863702T DE 3863702 D1 DE3863702 D1 DE 3863702D1
Authority
DE
Germany
Prior art keywords
manufacturing
several
pressure transducers
capacitive pressure
simultaneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888401418T
Other languages
English (en)
Inventor
Sylvie Cantaloup
Jean-Claude Gewiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renault SAS
Regie Nationale des Usines Renault
Original Assignee
Renault SAS
Regie Nationale des Usines Renault
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renault SAS, Regie Nationale des Usines Renault filed Critical Renault SAS
Application granted granted Critical
Publication of DE3863702D1 publication Critical patent/DE3863702D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE8888401418T 1987-06-12 1988-06-10 Herstellungsverfahren zur gleichzeitigen herstellung mehrerer-kapazitiver druckmesswandler. Expired - Fee Related DE3863702D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8708178A FR2616542B1 (fr) 1987-06-12 1987-06-12 Procede de fabrication collective de capteurs de pression capacitifs

Publications (1)

Publication Number Publication Date
DE3863702D1 true DE3863702D1 (de) 1991-08-22

Family

ID=9351956

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888401418T Expired - Fee Related DE3863702D1 (de) 1987-06-12 1988-06-10 Herstellungsverfahren zur gleichzeitigen herstellung mehrerer-kapazitiver druckmesswandler.

Country Status (3)

Country Link
EP (1) EP0296034B1 (de)
DE (1) DE3863702D1 (de)
FR (1) FR2616542B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4321804A1 (de) * 1993-06-30 1995-01-12 Ranco Inc Verfahren zur Herstellung von Kleinbauelementen
CN102156011B (zh) * 2011-04-09 2013-07-03 刘喜元 一种锚后预应力测试片

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4581676A (en) * 1984-09-17 1986-04-08 General Signal Corporation Electrical contact coating for silicon pressure transducers

Also Published As

Publication number Publication date
FR2616542B1 (fr) 1989-10-06
EP0296034A1 (de) 1988-12-21
FR2616542A1 (fr) 1988-12-16
EP0296034B1 (de) 1991-07-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee