DE3852097T2 - Telezentrische Ablenkung auf Sekundärfelder mittels einer Immersionslinse mit variabler Achse. - Google Patents

Telezentrische Ablenkung auf Sekundärfelder mittels einer Immersionslinse mit variabler Achse.

Info

Publication number
DE3852097T2
DE3852097T2 DE3852097T DE3852097T DE3852097T2 DE 3852097 T2 DE3852097 T2 DE 3852097T2 DE 3852097 T DE3852097 T DE 3852097T DE 3852097 T DE3852097 T DE 3852097T DE 3852097 T2 DE3852097 T2 DE 3852097T2
Authority
DE
Germany
Prior art keywords
immersion lens
variable axis
secondary fields
telecentric
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3852097T
Other languages
English (en)
Other versions
DE3852097D1 (de
Inventor
Timothy Robinson Groves
Hans Christian Pfeiffer
Werner Stickel
Maris Andris Sturans
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3852097D1 publication Critical patent/DE3852097D1/de
Publication of DE3852097T2 publication Critical patent/DE3852097T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
DE3852097T 1988-01-11 1988-12-06 Telezentrische Ablenkung auf Sekundärfelder mittels einer Immersionslinse mit variabler Achse. Expired - Fee Related DE3852097T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/142,035 US4859856A (en) 1988-01-11 1988-01-11 Telecentric sub-field deflection with vail

Publications (2)

Publication Number Publication Date
DE3852097D1 DE3852097D1 (de) 1994-12-15
DE3852097T2 true DE3852097T2 (de) 1995-05-24

Family

ID=22498310

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852097T Expired - Fee Related DE3852097T2 (de) 1988-01-11 1988-12-06 Telezentrische Ablenkung auf Sekundärfelder mittels einer Immersionslinse mit variabler Achse.

Country Status (4)

Country Link
US (1) US4859856A (de)
EP (1) EP0331859B1 (de)
JP (1) JPH01213948A (de)
DE (1) DE3852097T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5041731A (en) * 1989-01-20 1991-08-20 Fujitsu Limited Deflection compensating device for converging lens
US5136167A (en) * 1991-01-07 1992-08-04 International Business Machines Corporation Electron beam lens and deflection system for plural-level telecentric deflection
JP2706192B2 (ja) * 1991-11-06 1998-01-28 富士通株式会社 電子ビーム露光装置
US5285074A (en) * 1992-06-03 1994-02-08 International Business Machines Corporation Dynamic compensation of non-linear electron beam landing angle in variable axis lenses
US5389858A (en) * 1992-07-16 1995-02-14 International Business Machines Corporation Variable axis stigmator
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5546319A (en) * 1994-01-28 1996-08-13 Fujitsu Limited Method of and system for charged particle beam exposure
US5635719A (en) * 1996-07-23 1997-06-03 International Business Machines Corporation Variable curvilinear axis deflection means for particle optical lenses
US5757010A (en) * 1996-12-18 1998-05-26 International Business Machines Corporation Curvilinear variable axis lens correction with centered dipoles
US5793048A (en) * 1996-12-18 1998-08-11 International Business Machines Corporation Curvilinear variable axis lens correction with shifted dipoles
US6420713B1 (en) 1999-04-28 2002-07-16 Nikon Corporation Image position and lens field control in electron beam systems
JP2001143999A (ja) * 1999-11-16 2001-05-25 Nikon Corp 荷電粒子線転写装置及びそれを用いるデバイス製造方法
US6476400B1 (en) 1999-12-21 2002-11-05 International Business Machines Corporation Method of adjusting a lithography system to enhance image quality
EP1150327B1 (de) * 2000-04-27 2018-02-14 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Mehrstrahl Ladungsträgerstrahlvorrichtung
US6768117B1 (en) * 2000-07-25 2004-07-27 Applied Materials, Inc. Immersion lens with magnetic shield for charged particle beam system
US20020148971A1 (en) * 2001-03-05 2002-10-17 Michael Sogard Lens assembly for electron beam column
US7692167B1 (en) * 2006-10-26 2010-04-06 Kla-Tencor Technologies Corporation High-fidelity reflection electron beam lithography
KR101570974B1 (ko) * 2008-02-26 2015-11-23 마퍼 리쏘그라피 아이피 비.브이. 투사 렌즈 배열체

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2702445C3 (de) * 1977-01-20 1980-10-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahloptisches Gerät zur verkleinernden Abbildung einer Maske auf ein zu bestrahlendes Präparat
DE2937136A1 (de) * 1979-09-13 1981-04-02 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur schnellen ablenkung eines korpuskularstrahls
EP0053225B1 (de) * 1980-11-28 1985-03-13 International Business Machines Corporation Elektronenstrahlsystem und Verwendungsverfahren
US4544846A (en) * 1983-06-28 1985-10-01 International Business Machines Corporation Variable axis immersion lens electron beam projection system

Also Published As

Publication number Publication date
US4859856A (en) 1989-08-22
EP0331859B1 (de) 1994-11-09
JPH01213948A (ja) 1989-08-28
DE3852097D1 (de) 1994-12-15
EP0331859A2 (de) 1989-09-13
EP0331859A3 (en) 1990-05-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee