DE3850422T2 - Energieversorgung für einen induktiv gekoppelten Plasmabrenner. - Google Patents

Energieversorgung für einen induktiv gekoppelten Plasmabrenner.

Info

Publication number
DE3850422T2
DE3850422T2 DE3850422T DE3850422T DE3850422T2 DE 3850422 T2 DE3850422 T2 DE 3850422T2 DE 3850422 T DE3850422 T DE 3850422T DE 3850422 T DE3850422 T DE 3850422T DE 3850422 T2 DE3850422 T2 DE 3850422T2
Authority
DE
Germany
Prior art keywords
power supply
inductively coupled
coupled plasma
plasma torch
torch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3850422T
Other languages
English (en)
Other versions
DE3850422D1 (de
Inventor
Peter J Morrisroe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applera Corp
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Application granted granted Critical
Publication of DE3850422D1 publication Critical patent/DE3850422D1/de
Publication of DE3850422T2 publication Critical patent/DE3850422T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
DE3850422T 1987-03-06 1988-03-04 Energieversorgung für einen induktiv gekoppelten Plasmabrenner. Expired - Fee Related DE3850422T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/022,838 US4818916A (en) 1987-03-06 1987-03-06 Power system for inductively coupled plasma torch

Publications (2)

Publication Number Publication Date
DE3850422D1 DE3850422D1 (de) 1994-08-04
DE3850422T2 true DE3850422T2 (de) 1994-11-10

Family

ID=21811693

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3850422T Expired - Fee Related DE3850422T2 (de) 1987-03-06 1988-03-04 Energieversorgung für einen induktiv gekoppelten Plasmabrenner.

Country Status (4)

Country Link
US (1) US4818916A (de)
EP (1) EP0281157B1 (de)
JP (1) JP2708447B2 (de)
DE (1) DE3850422T2 (de)

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JPH02215038A (ja) * 1989-02-15 1990-08-28 Hitachi Ltd マイクロ波プラズマ極微量元素分析装置
US5055743A (en) * 1989-05-02 1991-10-08 Spectra Physics, Inc. Induction heated cathode
US5047692A (en) * 1990-01-30 1991-09-10 General Electric Company Integrated tuning capacitor network and heat sink for an electrodeless high intensity discharge lamp ballast
US5155547A (en) * 1990-02-26 1992-10-13 Leco Corporation Power control circuit for inductively coupled plasma atomic emission spectroscopy
GB9226335D0 (en) * 1992-12-17 1993-02-10 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
US5383019A (en) * 1990-03-23 1995-01-17 Fisons Plc Inductively coupled plasma spectrometers and radio-frequency power supply therefor
KR930004713B1 (ko) * 1990-06-18 1993-06-03 삼성전자 주식회사 변조방식을 이용한 플라즈마 발생장치 및 방법
DE4021182A1 (de) * 1990-07-03 1992-01-16 Plasma Technik Ag Vorrichtung zur beschichtung der oberflaeche von gegenstaenden
US5095189A (en) * 1990-09-26 1992-03-10 General Electric Company Method for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun
US5159173A (en) * 1990-09-26 1992-10-27 General Electric Company Apparatus for reducing plasma constriction by intermediate injection of hydrogen in RF plasma gun
NO174180C (no) * 1991-12-12 1994-03-23 Kvaerner Eng Innföringsrör for brenner for kjemiske prosesser
US5216330A (en) * 1992-01-14 1993-06-01 Honeywell Inc. Ion beam gun
EP0792091B1 (de) * 1995-12-27 2002-03-13 Nippon Telegraph And Telephone Corporation Verfahren zur elementaren Analyse
ES2115542B1 (es) * 1996-07-24 1999-02-16 Iberdrola Sa Fuente de alimentacion de antorchas de hornos de plasma.
US6329757B1 (en) 1996-12-31 2001-12-11 The Perkin-Elmer Corporation High frequency transistor oscillator system
US5925266A (en) * 1997-10-15 1999-07-20 The Perkin-Elmer Corporation Mounting apparatus for induction coupled plasma torch
US6222186B1 (en) 1998-06-25 2001-04-24 Agilent Technologies, Inc. Power-modulated inductively coupled plasma spectrometry
JP4672941B2 (ja) * 1999-07-13 2011-04-20 東京エレクトロン株式会社 誘導結合プラズマを発生させるための高周波電源
US7511246B2 (en) * 2002-12-12 2009-03-31 Perkinelmer Las Inc. Induction device for generating a plasma
US7106438B2 (en) * 2002-12-12 2006-09-12 Perkinelmer Las, Inc. ICP-OES and ICP-MS induction current
US8057468B2 (en) 2002-12-17 2011-11-15 Bovie Medical Corporation Method to generate a plasma stream for performing electrosurgery
DE10345890A1 (de) * 2003-09-30 2005-04-28 Siemens Ag Verfahren und Vorrichtung zur Stabilisierung eines Verbrennungsvorganges
US7663319B2 (en) * 2004-02-22 2010-02-16 Zond, Inc. Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
AU2012202363B2 (en) * 2005-03-11 2014-08-14 Perkinelmer U.S. Llc Plasmas and methods of using them
CA2595230C (en) 2005-03-11 2016-05-03 Perkinelmer, Inc. Plasmas and methods of using them
US8622735B2 (en) * 2005-06-17 2014-01-07 Perkinelmer Health Sciences, Inc. Boost devices and methods of using them
US7742167B2 (en) * 2005-06-17 2010-06-22 Perkinelmer Health Sciences, Inc. Optical emission device with boost device
US7459899B2 (en) 2005-11-21 2008-12-02 Thermo Fisher Scientific Inc. Inductively-coupled RF power source
US7863785B2 (en) * 2007-08-08 2011-01-04 Anadish Kumar Pal High power-density static-field ac conduction motor
US8575843B2 (en) 2008-05-30 2013-11-05 Colorado State University Research Foundation System, method and apparatus for generating plasma
US9288886B2 (en) 2008-05-30 2016-03-15 Colorado State University Research Foundation Plasma-based chemical source device and method of use thereof
US8994270B2 (en) 2008-05-30 2015-03-31 Colorado State University Research Foundation System and methods for plasma application
US9649143B2 (en) * 2009-09-23 2017-05-16 Bovie Medical Corporation Electrosurgical system to generate a pulsed plasma stream and method thereof
US8222822B2 (en) 2009-10-27 2012-07-17 Tyco Healthcare Group Lp Inductively-coupled plasma device
US8795265B2 (en) 2010-01-28 2014-08-05 Bovie Medical Corporation Electrosurgical apparatus to generate a dual plasma stream and method thereof
EP2552340A4 (de) 2010-03-31 2015-10-14 Univ Colorado State Res Found Plasmavorrichtung mit flüssig-gas-schnittstelle
CA2794895A1 (en) 2010-03-31 2011-10-06 Colorado State University Research Foundation Liquid-gas interface plasma device
AU2011248185B2 (en) * 2010-05-05 2014-10-16 Perkinelmer U.S. Llc Oxidation resistant induction devices
US9387269B2 (en) 2011-01-28 2016-07-12 Bovie Medical Corporation Cold plasma jet hand sanitizer
US20160121418A1 (en) * 2012-01-25 2016-05-05 Gordon Hanka Welder Powered Arc Starter
US9259798B2 (en) 2012-07-13 2016-02-16 Perkinelmer Health Sciences, Inc. Torches and methods of using them
GB2508824A (en) * 2012-12-11 2014-06-18 Linde Ag Piezoelectric apparatus for generating voltage from a compressed gas
US9532826B2 (en) 2013-03-06 2017-01-03 Covidien Lp System and method for sinus surgery
US9555145B2 (en) 2013-03-13 2017-01-31 Covidien Lp System and method for biofilm remediation
WO2014168876A2 (en) * 2013-04-08 2014-10-16 Perkinelmer Health Sciences, Inc. Capacitively coupled devices and oscillators
US9635750B2 (en) 2013-10-23 2017-04-25 Perkinelmer Health Sciences, Inc. Oscillator generators and methods of using them
WO2015061391A2 (en) * 2013-10-23 2015-04-30 Perkinelmer Health Sciences, Inc. Hybrid generators and methods of using them
US11129665B2 (en) 2015-12-02 2021-09-28 Apyx Medical Corporation Mixing cold plasma beam jets with atmopshere
WO2017189702A1 (en) * 2016-04-27 2017-11-02 Perkinelmer Health Sciences, Inc. Oscillator generators and methods of using them
US10918433B2 (en) 2016-09-27 2021-02-16 Apyx Medical Corporation Devices, systems and methods for enhancing physiological effectiveness of medical cold plasma discharges
NL2018778B1 (en) 2017-04-25 2018-11-05 Skil B V Power tool
US10798809B2 (en) * 2018-07-13 2020-10-06 Shimadzu Coporation Inductively coupled plasma generator

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Publication number Priority date Publication date Assignee Title
US3467471A (en) * 1963-10-21 1969-09-16 Albright & Wilson Mfg Ltd Plasma light source for spectroscopic investigation
US3958883A (en) * 1974-07-10 1976-05-25 Baird-Atomic, Inc. Radio frequency induced plasma excitation of optical emission spectroscopic samples
US4225769A (en) * 1977-09-26 1980-09-30 Thermal Dynamics Corporation Plasma torch starting circuit
ZA841218B (en) * 1983-03-08 1984-09-26 Allied Corp Plasma excitation system

Also Published As

Publication number Publication date
JP2708447B2 (ja) 1998-02-04
JPS63304598A (ja) 1988-12-12
EP0281157A3 (en) 1990-03-28
EP0281157A2 (de) 1988-09-07
DE3850422D1 (de) 1994-08-04
US4818916A (en) 1989-04-04
EP0281157B1 (de) 1994-06-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee