DE3786227T2 - Oberflächeninterferometer. - Google Patents
Oberflächeninterferometer.Info
- Publication number
- DE3786227T2 DE3786227T2 DE19873786227 DE3786227T DE3786227T2 DE 3786227 T2 DE3786227 T2 DE 3786227T2 DE 19873786227 DE19873786227 DE 19873786227 DE 3786227 T DE3786227 T DE 3786227T DE 3786227 T2 DE3786227 T2 DE 3786227T2
- Authority
- DE
- Germany
- Prior art keywords
- surface interferometer
- interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US92849686A | 1986-11-07 | 1986-11-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3786227D1 DE3786227D1 (de) | 1993-07-22 |
DE3786227T2 true DE3786227T2 (de) | 1993-12-02 |
Family
ID=25456316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19873786227 Expired - Fee Related DE3786227T2 (de) | 1986-11-07 | 1987-09-25 | Oberflächeninterferometer. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0266539B1 (de) |
JP (1) | JPS63124901A (de) |
DE (1) | DE3786227T2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2516277A (en) * | 2013-07-17 | 2015-01-21 | Cambridge Consultants | Optical apparatus and methods |
WO2015008074A1 (en) * | 2013-07-17 | 2015-01-22 | Cambridge Consultants Limited | Optical apparatus and methods |
GB2516281A (en) * | 2013-07-17 | 2015-01-21 | Cambridge Consultants | Optical apparatus and methods |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3832063A (en) * | 1972-02-01 | 1974-08-27 | Canon Kk | Lens axis detection using an interferometer |
US3788746A (en) * | 1972-10-02 | 1974-01-29 | Hewlett Packard Co | Optical dilatometer |
JPS567006A (en) * | 1979-06-22 | 1981-01-24 | Ibm | Method of extending measurement range of interference |
SE435966B (sv) * | 1982-02-02 | 1984-10-29 | Asea Ab | Fiberoptiskt metdon |
US4512661A (en) * | 1982-09-02 | 1985-04-23 | The United States Of America As Represented By The Aministration Of The National Aeronautics And Space Administration | Dual differential interferometer |
-
1987
- 1987-09-18 JP JP62232753A patent/JPS63124901A/ja active Pending
- 1987-09-25 EP EP19870114049 patent/EP0266539B1/de not_active Expired - Lifetime
- 1987-09-25 DE DE19873786227 patent/DE3786227T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0266539B1 (de) | 1993-06-16 |
DE3786227D1 (de) | 1993-07-22 |
EP0266539A2 (de) | 1988-05-11 |
EP0266539A3 (de) | 1991-08-07 |
JPS63124901A (ja) | 1988-05-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3873563D1 (de) | Planspiegelinterferometer. | |
NO864359L (no) | Kildedannende dopplerinterferometer. | |
DE3774909D1 (de) | Antitumormittel. | |
DE3775679D1 (de) | Vernebler. | |
DE3767169D1 (de) | Sportschuh. | |
ES2019949B3 (es) | Propanaminas 3-ariloxi-3-sustituidas. | |
DE3764043D1 (de) | Alkylendiamine. | |
ATE63533T1 (de) | Xylolisomerisierung. | |
DE3779761T2 (de) | Abseilgeraet. | |
DE3762818D1 (de) | Planschneidemaschine. | |
NO874228D0 (no) | Underlagsplate. | |
DE3771918D1 (de) | Chinolinamide. | |
DE3785294T2 (de) | Neigungsmesser. | |
DE3787048D1 (de) | Oberflaechenmodifiziermittel. | |
DE3786679T2 (de) | Schmitt-triggerschaltung. | |
DE3773636D1 (de) | Saeurebeschleunigte hydrocarboxilierung. | |
DE68919410T2 (de) | Interferometrie. | |
DE3771271D1 (de) | Fluorphthalimide. | |
ES2023141B3 (es) | Algunas 3-benzoil-4-oxolactamas. | |
DE3779382D1 (de) | 3-6-diphenylpyridazine. | |
DE3763648D1 (de) | Rollski. | |
DE3786227T2 (de) | Oberflächeninterferometer. | |
IT8660377V0 (it) | Montapanna semplificato. | |
DE3766410D1 (de) | Methylalkylcyclosiloxane. | |
DE3669032D1 (de) | Okulopressionsgeraet. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |