DE3766783D1 - Verfahren zur pruefung der elektrisch aktiven unreinheiten von halbleitermaterial oder strukturen sowie messanordnung dazu.
- Google Patents
Verfahren zur pruefung der elektrisch aktiven unreinheiten von halbleitermaterial oder strukturen sowie messanordnung dazu.
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Magyar Tudomanyos Akademia
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Magyar Tudomanyos Akademia
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Priority claimed from HU861096Aexternal-prioritypatent/HU196262B/hu
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DE8787905917T1986-03-171987-03-17Verfahren zur pruefung der elektrisch aktiven unreinheiten von halbleitermaterial oder strukturen sowie messanordnung dazu.
Expired - Fee RelatedDE3766783D1
(de)
Method for the examination of electrically active impurities of semiconductor materials or structures and measuring arrangement for carrying out the method