DE3673873D1 - Thermischer massendurchflussmesser und -regler. - Google Patents

Thermischer massendurchflussmesser und -regler.

Info

Publication number
DE3673873D1
DE3673873D1 DE8686200194T DE3673873T DE3673873D1 DE 3673873 D1 DE3673873 D1 DE 3673873D1 DE 8686200194 T DE8686200194 T DE 8686200194T DE 3673873 T DE3673873 T DE 3673873T DE 3673873 D1 DE3673873 D1 DE 3673873D1
Authority
DE
Germany
Prior art keywords
regulator
mass flow
flow meter
thermal mass
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686200194T
Other languages
English (en)
Inventor
Wayne G Renken
Dan B Lemay
Richard M Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unit Instruments Inc
Original Assignee
Innovus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innovus filed Critical Innovus
Application granted granted Critical
Publication of DE3673873D1 publication Critical patent/DE3673873D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
DE8686200194T 1985-04-10 1986-02-12 Thermischer massendurchflussmesser und -regler. Expired - Lifetime DE3673873D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/721,535 US4685331A (en) 1985-04-10 1985-04-10 Thermal mass flowmeter and controller

Publications (1)

Publication Number Publication Date
DE3673873D1 true DE3673873D1 (de) 1990-10-11

Family

ID=24898361

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686200194T Expired - Lifetime DE3673873D1 (de) 1985-04-10 1986-02-12 Thermischer massendurchflussmesser und -regler.

Country Status (4)

Country Link
US (1) US4685331A (de)
EP (1) EP0203622B1 (de)
JP (1) JPH0765915B2 (de)
DE (1) DE3673873D1 (de)

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US4969598A (en) * 1987-07-17 1990-11-13 Memry Plumbing Products Corp. Valve control
US4909078A (en) * 1987-10-14 1990-03-20 Rosemount Inc. Fluid flow detector
US4870745A (en) * 1987-12-23 1989-10-03 Siemens-Bendix Automotive Electronics L.P. Methods of making silicon-based sensors
US4888988A (en) * 1987-12-23 1989-12-26 Siemens-Bendix Automotive Electronics L.P. Silicon based mass airflow sensor and its fabrication method
JPH07122587B2 (ja) * 1988-05-16 1995-12-25 日産自動車株式会社 流量センサ
JP2765881B2 (ja) * 1988-11-09 1998-06-18 三菱電機株式会社 内燃機関の吸入空気量計測装置
JP2789458B2 (ja) * 1988-11-22 1998-08-20 株式会社エステック 液体気化のための流量制御装置
US4885938A (en) * 1988-12-16 1989-12-12 Honeywell Inc. Flowmeter fluid composition correction
US5074147A (en) * 1990-03-08 1991-12-24 Analytical Services & Materials, Inc. Flow rate measuring apparatus
JPH077008B2 (ja) * 1990-05-07 1995-01-30 山武ハネウエル株式会社 流速センサ
US5231877A (en) * 1990-12-12 1993-08-03 University Of Cincinnati Solid state microanemometer
US5263380A (en) * 1992-02-18 1993-11-23 General Motors Corporation Differential AC anemometer
US5203537A (en) * 1992-03-09 1993-04-20 Teledyne Industries, Inc. Piezoceramic valve actuator sandwich assembly and valve incorporating such an assembly
DE4219454C2 (de) * 1992-06-13 1995-09-28 Bosch Gmbh Robert Massenflußsensor
US5369247A (en) * 1992-10-29 1994-11-29 Doljack; Frank A. Self-regulating electrical heater system and method
WO1995002164A1 (en) * 1993-07-07 1995-01-19 Ic Sensors, Inc. Pulsed thermal flow sensor system
US5488969A (en) * 1994-11-04 1996-02-06 Gas Research Institute Metering valve
AU3162297A (en) 1996-06-26 1998-01-14 Simon Fraser University Accelerometer without proof mass
US6182509B1 (en) 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
US6589433B2 (en) 1996-06-26 2003-07-08 Simon Fraser University Accelerometer without proof mass
US6547973B2 (en) 1996-07-30 2003-04-15 Agilent Technologies, Inc. Fabrication of suspended structures using a sacrificial layer
DE29721502U1 (de) * 1996-12-21 1998-04-23 Klein Schanzlin & Becker Ag Strangregulierarmatur
JP3457826B2 (ja) * 1997-01-31 2003-10-20 株式会社リコー 薄膜式抵抗体及びその製造方法、流量センサ、湿度センサ、ガスセンサ、温度センサ
US6290388B1 (en) * 1998-03-06 2001-09-18 The Trustees Of The University Of Pennsylvania Multi-purpose integrated intensive variable sensor
US6794981B2 (en) * 1998-12-07 2004-09-21 Honeywell International Inc. Integratable-fluid flow and property microsensor assembly
JP3857526B2 (ja) 1999-03-31 2006-12-13 シーメンス アクチエンゲゼルシヤフト 無支持の微細構造体または肉薄の扁平部分またはダイアフラムを製造する方法および該方法により製造された無支持の微細構造体の使用法
DE10046698A1 (de) * 2000-09-21 2002-05-02 Bosch Gmbh Robert Kraftfahrzeug und Modul
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
US20030010091A1 (en) * 2001-07-10 2003-01-16 Mitchell Bradley Dale System and method for detecting occlusions in a semiconductor manufacturing device
US20030130624A1 (en) * 2002-01-07 2003-07-10 Kowalik Francis C. Medical infusion system with integrated power supply and pump therefor
US20030173346A1 (en) 2002-03-18 2003-09-18 Renken Wayne Glenn System and method for heating and cooling wafer at accelerated rates
US6796172B2 (en) * 2002-07-31 2004-09-28 Hewlett-Packard Development Company, L.P. Flow sensor
KR100395657B1 (en) * 2003-01-14 2003-08-21 Wook Hyun Kim Mass flow controller
US20050095859A1 (en) * 2003-11-03 2005-05-05 Applied Materials, Inc. Precursor delivery system with rate control
US8388570B2 (en) * 2004-08-27 2013-03-05 Atul Kumar Controlled tissue cavity distending system with minimal turbulence
US7331224B2 (en) * 2004-12-07 2008-02-19 Honeywell International Inc. Tilt-insensitive flow sensor
US20070209433A1 (en) * 2006-03-10 2007-09-13 Honeywell International Inc. Thermal mass gas flow sensor and method of forming same
JP4497165B2 (ja) * 2007-02-05 2010-07-07 株式会社デンソー 半導体装置の製造方法
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
JP5079435B2 (ja) * 2007-09-26 2012-11-21 アズビル株式会社 フローセンサ及びその製造方法
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
FR2940453B1 (fr) 2008-12-19 2011-03-25 Commissariat Energie Atomique Sonde anemometrique a fils en "x" et son procede de realisation
FR2940434B1 (fr) * 2008-12-19 2011-01-21 Commissariat Energie Atomique Dispositif de regulation d'un anemometre a fil
US20110252882A1 (en) * 2010-04-19 2011-10-20 Honeywell International Inc. Robust sensor with top cap
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
JP5835182B2 (ja) * 2012-10-11 2015-12-24 オムロン株式会社 熱式流量計およびその異常判定方法
FR3000215B1 (fr) * 2012-12-21 2016-02-05 Aneolia Dispositif et procede de test d'un echantillon, en particulier de discrimination d'un gaz d'un echantillon
JP6220043B2 (ja) * 2013-03-12 2017-10-25 ゼネラル・エレクトリック・カンパニイ 流体流路を監視するための流量センサ回路
US20160195486A1 (en) * 2015-01-06 2016-07-07 Mahmood Anvar Method and Apparatus for Detection, Identification and Quantification of Chemical or Biological Material through Modification of Operating Conditions
US20160370809A1 (en) * 2015-06-19 2016-12-22 Hni Technologies Inc. Fluid flow system
WO2017196293A1 (en) * 2016-05-09 2017-11-16 Cummins Inc. Fuel type prediction from mass flow measurements and thermal conductivity sensor
DE102018214815B3 (de) 2018-08-31 2019-12-24 I2S Intelligente Sensorsysteme Dresden Gmbh Anordnung zur Bestimmung der Abgasströmung in einer Abgasanlage einer Verbrennungskraftmaschine
US11280651B2 (en) * 2019-03-25 2022-03-22 Flo Technologies, Inc. Thin film thermal mass flow sensor in fluid applications
US11747213B2 (en) 2020-08-27 2023-09-05 Unison Industries, Llc Temperature sensor

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US2947938A (en) * 1954-04-09 1960-08-02 Victory Engineering Corp Electrothermal measuring apparatus and method for the calibration thereof
FR2085184B1 (de) * 1970-01-08 1973-07-13 Lafitte Rene
JPS5140990B2 (de) * 1971-09-28 1976-11-06
US3992940A (en) * 1973-11-02 1976-11-23 Chrysler Corporation Solid state fluid flow sensor
US3931736A (en) * 1974-06-28 1976-01-13 Rca Corporation Improved fluid flow sensor configuration
US3942378A (en) * 1974-06-28 1976-03-09 Rca Corporation Fluid flow measuring system
US3971247A (en) * 1974-11-15 1976-07-27 Rodder Jerome A Fluid measuring apparatus
DE2919433A1 (de) * 1979-05-15 1980-12-04 Bosch Gmbh Robert Messonde zur messung der masse und/oder temperatur eines stroemenden mediums und verfahren zu ihrer herstellung
US4471647A (en) * 1980-04-18 1984-09-18 Board Of Regents Of Stanford University Gas chromatography system and detector and method
US4658855A (en) * 1980-10-03 1987-04-21 Silicon Valley Group Mass flow controller
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
GB2138566B (en) * 1983-04-15 1987-01-28 Standard Telephones Cables Ltd Thermal mass flow sensor for fluids
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter

Also Published As

Publication number Publication date
JPS61235726A (ja) 1986-10-21
EP0203622B1 (de) 1990-09-05
EP0203622A2 (de) 1986-12-03
JPH0765915B2 (ja) 1995-07-19
EP0203622A3 (en) 1987-04-22
US4685331A (en) 1987-08-11

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: UNIT INSTRUMENTS, INC., ORANGE, CALIF., US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee