DE3661546D1 - Method of coating a molybdenum surface - Google Patents

Method of coating a molybdenum surface

Info

Publication number
DE3661546D1
DE3661546D1 DE8686105383T DE3661546T DE3661546D1 DE 3661546 D1 DE3661546 D1 DE 3661546D1 DE 8686105383 T DE8686105383 T DE 8686105383T DE 3661546 T DE3661546 T DE 3661546T DE 3661546 D1 DE3661546 D1 DE 3661546D1
Authority
DE
Germany
Prior art keywords
coating
molybdenum surface
molybdenum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8686105383T
Other languages
English (en)
Inventor
Kinnon Donald Angus Mac
Pei Ching Li
Henry Carl Schick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3661546D1 publication Critical patent/DE3661546D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
DE8686105383T 1985-04-25 1986-04-18 Method of coating a molybdenum surface Expired DE3661546D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/726,871 US4603056A (en) 1985-04-25 1985-04-25 Surface treatment of a molybdenum screening mask

Publications (1)

Publication Number Publication Date
DE3661546D1 true DE3661546D1 (en) 1989-02-02

Family

ID=24920356

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686105383T Expired DE3661546D1 (en) 1985-04-25 1986-04-18 Method of coating a molybdenum surface

Country Status (5)

Country Link
US (1) US4603056A (de)
EP (1) EP0199307B1 (de)
JP (1) JPS61250171A (de)
CA (1) CA1260334A (de)
DE (1) DE3661546D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777109A (en) * 1987-05-11 1988-10-11 Robert Gumbinner RF plasma treated photosensitive lithographic printing plates
DE3742317A1 (de) * 1987-12-14 1989-06-22 Repenning Detlev Verfahren zur herstellung korrosion-, verschleiss- und pressfester schichten
EP0573114B1 (de) * 1992-06-05 1997-01-22 Koninklijke Philips Electronics N.V. Elektrische Lampe
FR2692598B1 (fr) * 1992-06-17 1995-02-10 Air Liquide Procédé de dépôt d'un film contenant du silicium à la surface d'un substrat métallique et procédé de traitement anti-corrosion.
US5268068A (en) * 1992-12-08 1993-12-07 International Business Machines Corporation High aspect ratio molybdenum composite mask method
AT1669U1 (de) * 1996-11-22 1997-09-25 Plansee Ag Oxidationsschutzschicht für refraktärmetalle
US5744214A (en) * 1997-01-30 1998-04-28 International Business Machines Corporation Corrosion resistant molybdenum mask
US6114242A (en) * 1997-12-05 2000-09-05 Taiwan Semiconductor Manufacturing Company MOCVD molybdenum nitride diffusion barrier for Cu metallization
US7025891B2 (en) * 2003-08-29 2006-04-11 International Business Machines Corporation Method of polishing C4 molybdenum masks to remove molybdenum peaks
US7135124B2 (en) * 2003-11-13 2006-11-14 International Business Machines Corporation Method for thinning wafers that have contact bumps
US8002875B1 (en) * 2004-02-02 2011-08-23 Bossard Peter R System and method for separating hydrogen gas from a mixed gas source using composite structure tubes
US8349086B2 (en) * 2004-07-30 2013-01-08 United Technologies Corporation Non-stick masking fixtures and methods of preparing same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE942484C (de) * 1942-10-31 1956-05-03 Hans Biel Verfahren zur Herstellung von Metallschichten durch Zerstaeubung
FR1368569A (fr) * 1962-09-10 1964-07-31 United Aircraft Corp Procédé de revêtement d'alliages réfractaires et produit obtenu
GB1182242A (en) * 1966-02-11 1970-02-25 United States Borax Chem Improvements in or relating to Nitrides.
FR95448E (fr) * 1967-06-27 1970-11-06 Ct Stephanois De Rech Mecaniqu Traitement de surface pour pieces mécaniques.
US3764379A (en) * 1971-04-26 1973-10-09 Cogar Corp Diminishing mask wearout during terminal formation
US3757733A (en) * 1971-10-27 1973-09-11 Texas Instruments Inc Radial flow reactor
FR2284403A1 (fr) * 1974-09-16 1976-04-09 Lumalampan Ab Enduit cristallin pour fil metallique de sciage
US4342617A (en) * 1981-02-23 1982-08-03 Intel Corporation Process for forming opening having tapered sides in a plasma nitride layer
BR8108985A (pt) * 1981-02-23 1983-03-01 Vni Instrument Inst Revestimento de multicamada de ferramentas para corte de metal
JPS581067A (ja) * 1981-06-26 1983-01-06 Toshiba Corp 装飾用金属窒化物皮膜の形成法
US4429011A (en) * 1982-03-29 1984-01-31 General Electric Company Composite conductive structures and method of making same

Also Published As

Publication number Publication date
JPS6224503B2 (de) 1987-05-28
JPS61250171A (ja) 1986-11-07
CA1260334A (en) 1989-09-26
US4603056A (en) 1986-07-29
EP0199307A1 (de) 1986-10-29
EP0199307B1 (de) 1988-12-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee