DE3603534A1 - Reinraum mit foerdereinrichtung - Google Patents

Reinraum mit foerdereinrichtung

Info

Publication number
DE3603534A1
DE3603534A1 DE19863603534 DE3603534A DE3603534A1 DE 3603534 A1 DE3603534 A1 DE 3603534A1 DE 19863603534 DE19863603534 DE 19863603534 DE 3603534 A DE3603534 A DE 3603534A DE 3603534 A1 DE3603534 A1 DE 3603534A1
Authority
DE
Germany
Prior art keywords
clean room
conveyor
room according
feed
lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19863603534
Other languages
German (de)
English (en)
Other versions
DE3603534C2 (enExample
Inventor
Paul Baumbusch
Juergen Dipl Ing Geissinger
Rainer Dipl Ing Schanz
Michael Dipl Ing Goehner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE19863603534 priority Critical patent/DE3603534A1/de
Priority to DE19873726025 priority patent/DE3726025A1/de
Publication of DE3603534A1 publication Critical patent/DE3603534A1/de
Application granted granted Critical
Publication of DE3603534C2 publication Critical patent/DE3603534C2/de
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B65G49/04—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction
    • B65G49/0409—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length
    • B65G49/0436—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance from bath to bath
    • B65G49/044—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance from bath to bath along a continuous circuit
    • B65G49/045—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance from bath to bath along a continuous circuit the circuit being fixed
    • B65G49/0454—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance from bath to bath along a continuous circuit the circuit being fixed by means of containers -or workpieces- carriers
    • B65G49/0459—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid the workpieces being immersed and withdrawn by movement in a vertical direction specially adapted for workpieces of definite length arrangements for conveyance from bath to bath along a continuous circuit the circuit being fixed by means of containers -or workpieces- carriers movement in a vertical direction is caused by self-contained means

Landscapes

  • Ventilation (AREA)
DE19863603534 1986-02-05 1986-02-05 Reinraum mit foerdereinrichtung Granted DE3603534A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19863603534 DE3603534A1 (de) 1986-02-05 1986-02-05 Reinraum mit foerdereinrichtung
DE19873726025 DE3726025A1 (de) 1986-02-05 1987-08-05 Reinraum mit handhabungseinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863603534 DE3603534A1 (de) 1986-02-05 1986-02-05 Reinraum mit foerdereinrichtung

Publications (2)

Publication Number Publication Date
DE3603534A1 true DE3603534A1 (de) 1987-08-06
DE3603534C2 DE3603534C2 (enExample) 1989-05-18

Family

ID=6293434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863603534 Granted DE3603534A1 (de) 1986-02-05 1986-02-05 Reinraum mit foerdereinrichtung

Country Status (1)

Country Link
DE (1) DE3603534A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100276A (en) * 1987-08-12 1992-03-31 Hitachi, Ltd. Production system using wafer-like carrier jig
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
DE4409558A1 (de) * 1994-03-14 1995-11-30 Leybold Ag Vorrichtung für den Transport von Substraten
DE10023137A1 (de) * 2000-05-12 2001-11-22 Pink Gmbh Thermosysteme Reinigunssystem
WO2009068241A1 (de) 2007-11-27 2009-06-04 Kuka Systems Gmbh Zuführeinrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141458A (en) * 1975-05-23 1979-02-27 Pass-Port Systems Corporation Wafer transport system
US4466454A (en) * 1982-11-23 1984-08-21 Interlab, Inc. Automated work transfer system
DE3219502C2 (de) * 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum automatischen Transport scheibenförmiger Objekte

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4141458A (en) * 1975-05-23 1979-02-27 Pass-Port Systems Corporation Wafer transport system
DE3219502C2 (de) * 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum automatischen Transport scheibenförmiger Objekte
US4466454A (en) * 1982-11-23 1984-08-21 Interlab, Inc. Automated work transfer system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DE-Z.: HLH 1972, Nr. 11, S. 349-352 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5100276A (en) * 1987-08-12 1992-03-31 Hitachi, Ltd. Production system using wafer-like carrier jig
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
DE4409558A1 (de) * 1994-03-14 1995-11-30 Leybold Ag Vorrichtung für den Transport von Substraten
DE10023137A1 (de) * 2000-05-12 2001-11-22 Pink Gmbh Thermosysteme Reinigunssystem
WO2009068241A1 (de) 2007-11-27 2009-06-04 Kuka Systems Gmbh Zuführeinrichtung
EP2653410A1 (de) 2007-11-27 2013-10-23 KUKA Systems GmbH Zuführeinrichtung

Also Published As

Publication number Publication date
DE3603534C2 (enExample) 1989-05-18

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