DE3582569D1 - Reibungsglied und verfahren zur oberflaechigen behandlung zur herstellung. - Google Patents

Reibungsglied und verfahren zur oberflaechigen behandlung zur herstellung.

Info

Publication number
DE3582569D1
DE3582569D1 DE8585115310T DE3582569T DE3582569D1 DE 3582569 D1 DE3582569 D1 DE 3582569D1 DE 8585115310 T DE8585115310 T DE 8585115310T DE 3582569 T DE3582569 T DE 3582569T DE 3582569 D1 DE3582569 D1 DE 3582569D1
Authority
DE
Germany
Prior art keywords
production
surface treatment
friction device
friction
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585115310T
Other languages
English (en)
Inventor
Katsumi C O Patent Divi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3582569D1 publication Critical patent/DE3582569D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/121—Mechanical drive devices for polygonal mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Vapour Deposition (AREA)
DE8585115310T 1984-12-07 1985-12-03 Reibungsglied und verfahren zur oberflaechigen behandlung zur herstellung. Expired - Lifetime DE3582569D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25852284A JPS61136679A (ja) 1984-12-07 1984-12-07 機械的高速摺動部分の表面処理方法

Publications (1)

Publication Number Publication Date
DE3582569D1 true DE3582569D1 (de) 1991-05-23

Family

ID=17321378

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585115310T Expired - Lifetime DE3582569D1 (de) 1984-12-07 1985-12-03 Reibungsglied und verfahren zur oberflaechigen behandlung zur herstellung.

Country Status (3)

Country Link
EP (1) EP0184757B1 (de)
JP (1) JPS61136679A (de)
DE (1) DE3582569D1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61190072A (ja) * 1985-02-18 1986-08-23 Toshiba Corp 機械的高速摺動部材
JPS61235564A (ja) * 1985-04-11 1986-10-20 Toshiba Corp 非単結晶シリコン膜を表面に処理した部材及びその表面処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1310526A (en) * 1969-05-14 1973-03-21 Smiths Industries Ltd Gas-lubricated bearings

Also Published As

Publication number Publication date
JPS61136679A (ja) 1986-06-24
JPH0418029B2 (de) 1992-03-26
EP0184757A3 (en) 1988-06-15
EP0184757B1 (de) 1991-04-17
EP0184757A2 (de) 1986-06-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee