DE3580229D1 - Kontaktlose messung elektrischer eigenschaften von scheibenfoermigem material. - Google Patents
Kontaktlose messung elektrischer eigenschaften von scheibenfoermigem material.Info
- Publication number
- DE3580229D1 DE3580229D1 DE8585110805T DE3580229T DE3580229D1 DE 3580229 D1 DE3580229 D1 DE 3580229D1 DE 8585110805 T DE8585110805 T DE 8585110805T DE 3580229 T DE3580229 T DE 3580229T DE 3580229 D1 DE3580229 D1 DE 3580229D1
- Authority
- DE
- Germany
- Prior art keywords
- disc
- electrical properties
- shaped material
- contactless measurement
- contactless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/04—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant in circuits having distributed constants, e.g. having very long conductors or involving high frequencies
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/647,785 US4605893A (en) | 1984-09-06 | 1984-09-06 | Contactless measurement of electrical properties of wafer shaped materials |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3580229D1 true DE3580229D1 (de) | 1990-11-29 |
Family
ID=24598266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585110805T Expired - Fee Related DE3580229D1 (de) | 1984-09-06 | 1985-08-28 | Kontaktlose messung elektrischer eigenschaften von scheibenfoermigem material. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4605893A (de) |
EP (1) | EP0175182B1 (de) |
JP (1) | JPS6166975A (de) |
DE (1) | DE3580229D1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2623291B1 (fr) * | 1987-11-17 | 1990-03-16 | France Etat | Dispositif de caracterisation electrique d'echantillons et application a la cartographie electrique d'echantillons semi-conducteurs de grande surface |
US5081590A (en) * | 1988-02-29 | 1992-01-14 | Westinghouse Electric Corp. | Computer aided technique for post production tuning of microwave modules |
JPH01270648A (ja) * | 1988-04-22 | 1989-10-27 | Kanzaki Paper Mfg Co Ltd | 材料の電気的特性測定装置 |
US5160883A (en) * | 1989-11-03 | 1992-11-03 | John H. Blanz Company, Inc. | Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support |
US5077523A (en) * | 1989-11-03 | 1991-12-31 | John H. Blanz Company, Inc. | Cryogenic probe station having movable chuck accomodating variable thickness probe cards |
US5166606A (en) * | 1989-11-03 | 1992-11-24 | John H. Blanz Company, Inc. | High efficiency cryogenic test station |
JPH0770578B2 (ja) * | 1990-03-27 | 1995-07-31 | 大日本スクリーン製造株式会社 | 半導体基板の表面状態評価方法およびその装置 |
US5184398A (en) * | 1991-08-30 | 1993-02-09 | Texas Instruments Incorporated | In-situ real-time sheet resistance measurement method |
US5306345A (en) * | 1992-08-25 | 1994-04-26 | Particle Solutions | Deposition chamber for deposition of particles on semiconductor wafers |
US5389875A (en) * | 1993-03-19 | 1995-02-14 | Grumman Aerospace Corporation | Apparatus for non-destructive testing of dielectric/magnetic materials |
US5434505A (en) * | 1993-07-30 | 1995-07-18 | Litton Systems, Inc. | Method and apparatus for low temperature HEMT-like material testing |
US6476604B1 (en) * | 1999-04-12 | 2002-11-05 | Chartered Semiconductor Manufacturing Ltd. | Method and apparatus for identifying high metal content on a semiconductor surface |
US6236196B1 (en) | 1999-06-03 | 2001-05-22 | International Business Machines Corporation | Thermal modulation system and method for locating a circuit defect such as a short or incipient open independent of a circuit geometry |
CN1252463C (zh) | 2001-05-03 | 2006-04-19 | 勒海顿电子公司 | 用于片状材料的无损测量和绘制分布图的方法和装置 |
US7109724B2 (en) * | 2002-05-01 | 2006-09-19 | Lehighton Electronics, Inc. | Method and apparatus for nondestructive measurement and mapping of sheet materials |
US8207748B2 (en) * | 2004-08-11 | 2012-06-26 | Lehighton Electronics, Inc. | Device and handling system for measurement of mobility and sheet charge density |
EP2439521B1 (de) * | 2005-11-14 | 2017-01-11 | Lehighton Electronics Inc. | Messung von Blattleitfähigkeit und -widerstand |
US7725783B2 (en) * | 2007-07-20 | 2010-05-25 | International Business Machines Corporation | Method and apparatus for repeatable drive strength assessments of high speed memory DIMMs |
TWI418817B (zh) * | 2011-04-18 | 2013-12-11 | Univ Shu Te | Hall effect measurement device with light measurement function |
US9000774B2 (en) | 2013-03-14 | 2015-04-07 | International Business Machines Corporation | Non-contact conductivity measurement |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3258721A (en) * | 1966-06-28 | Short position i | ||
US3034046A (en) * | 1959-10-12 | 1962-05-08 | Sasaki Shinichi | Automatic moisture content determination and control apparatus |
US3211999A (en) * | 1960-04-27 | 1965-10-12 | Western Electric Co | Method and apparatus for measuring semiconductor volume resistivity by transmission loss in a resonant cavity |
US3628135A (en) * | 1969-12-15 | 1971-12-14 | Rank Organisation Ltd | Cranked hollow waveguide for measuring moisture content of moving sheet or web material |
JPS5236817B2 (de) * | 1973-07-27 | 1977-09-19 | ||
US4123702A (en) * | 1976-02-13 | 1978-10-31 | Ilmari Kinanen | Method for classifying and measuring of timbers |
US4087745A (en) * | 1977-07-28 | 1978-05-02 | The United States Of America As Represented By The Secretary Of The Navy | Technique for contactless characterization of semiconducting material and device structures |
JPS5830534B2 (ja) * | 1978-02-27 | 1983-06-29 | 株式会社日本特殊計測器製作所 | シ−ト状物体の含水率、坪量測定装置 |
SU832430A1 (ru) * | 1979-04-24 | 1981-05-23 | Государственный Всесоюзный Научно- Исследовательский Институт Строи-Тельных Материалов И Конструкцийим. П.П.Будникова | Устройство дл измерени влажностиТОлщиНы гипСОКАРТОННыХ лиСТОВ |
JPS5643540A (en) * | 1979-09-19 | 1981-04-22 | Shinichi Sasaki | Water content measuring unit of pulverulent fluid and conttonlike body |
US4319185A (en) * | 1979-12-05 | 1982-03-09 | Sentrol Systems Ltd. | Delay line microwave moisture measuring apparatus |
JPS57112041A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Evaluation for silicon single crystal |
US4507602A (en) * | 1982-08-13 | 1985-03-26 | The United States Of America As Represented By The Secretary Of The Air Force | Measurement of permittivity and permeability of microwave materials |
US4514680A (en) * | 1983-01-28 | 1985-04-30 | A.Ahlstrom Osakeyhtio | Flaw detection system using microwaves |
-
1984
- 1984-09-06 US US06/647,785 patent/US4605893A/en not_active Expired - Lifetime
-
1985
- 1985-06-04 JP JP60119894A patent/JPS6166975A/ja active Pending
- 1985-08-28 EP EP85110805A patent/EP0175182B1/de not_active Expired
- 1985-08-28 DE DE8585110805T patent/DE3580229D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US4605893A (en) | 1986-08-12 |
EP0175182A1 (de) | 1986-03-26 |
JPS6166975A (ja) | 1986-04-05 |
EP0175182B1 (de) | 1990-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |