DE3569411D1 - Sensing apparatus - Google Patents

Sensing apparatus

Info

Publication number
DE3569411D1
DE3569411D1 DE8585301277T DE3569411T DE3569411D1 DE 3569411 D1 DE3569411 D1 DE 3569411D1 DE 8585301277 T DE8585301277 T DE 8585301277T DE 3569411 T DE3569411 T DE 3569411T DE 3569411 D1 DE3569411 D1 DE 3569411D1
Authority
DE
Germany
Prior art keywords
sensing apparatus
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585301277T
Other languages
English (en)
Inventor
Peter Ernest Walters
Anthony Michael Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMI Ltd
Original Assignee
EMI Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EMI Ltd filed Critical EMI Ltd
Application granted granted Critical
Publication of DE3569411D1 publication Critical patent/DE3569411D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Manipulator (AREA)
DE8585301277T 1984-03-27 1985-02-26 Sensing apparatus Expired DE3569411D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB848407847A GB8407847D0 (en) 1984-03-27 1984-03-27 Sensing apparatus

Publications (1)

Publication Number Publication Date
DE3569411D1 true DE3569411D1 (en) 1989-05-18

Family

ID=10558716

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585301277T Expired DE3569411D1 (en) 1984-03-27 1985-02-26 Sensing apparatus

Country Status (4)

Country Link
US (1) US4629957A (de)
EP (1) EP0159781B1 (de)
DE (1) DE3569411D1 (de)
GB (1) GB8407847D0 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8431746D0 (en) * 1984-12-17 1985-01-30 Renishaw Plc Contact-sensing probe
JPH0799328B2 (ja) * 1987-04-16 1995-10-25 株式会社メトロ−ル タツチセンサ
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
GB8808614D0 (en) * 1988-04-12 1988-05-11 Renishaw Plc Displacement-responsive devices with capacitive transducers
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
US5345690A (en) * 1990-02-23 1994-09-13 Renishaw Metrology Limited Contact probes
US5222034A (en) * 1990-10-10 1993-06-22 Shelton Russell S Measuring method and apparatus
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
DE4331069A1 (de) * 1993-09-13 1995-03-16 Zeiss Carl Fa Koordinatenmeßgerät mit einem Taster in Form eines Festkörperschwingers
AUPM348594A0 (en) * 1994-01-21 1994-02-17 University Of Melbourne, The Improvements in syringe pumps
US5455390A (en) * 1994-02-01 1995-10-03 Tessera, Inc. Microelectronics unit mounting with multiple lead bonding
US5688716A (en) * 1994-07-07 1997-11-18 Tessera, Inc. Fan-out semiconductor chip assembly
US5798286A (en) * 1995-09-22 1998-08-25 Tessera, Inc. Connecting multiple microelectronic elements with lead deformation
US5518964A (en) * 1994-07-07 1996-05-21 Tessera, Inc. Microelectronic mounting with multiple lead deformation and bonding
US6429112B1 (en) 1994-07-07 2002-08-06 Tessera, Inc. Multi-layer substrates and fabrication processes
US5830782A (en) * 1994-07-07 1998-11-03 Tessera, Inc. Microelectronic element bonding with deformation of leads in rows
US6828668B2 (en) * 1994-07-07 2004-12-07 Tessera, Inc. Flexible lead structures and methods of making same
US6117694A (en) * 1994-07-07 2000-09-12 Tessera, Inc. Flexible lead structures and methods of making same
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US6133072A (en) 1996-12-13 2000-10-17 Tessera, Inc. Microelectronic connector with planar elastomer sockets
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
GB2336433B (en) * 1998-04-14 2002-02-06 Mitutoyo Corp Touch signal probe
JP4286019B2 (ja) * 2003-02-04 2009-06-24 株式会社根本杏林堂 薬液注入システム
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
DE102020204942B4 (de) 2020-04-20 2024-06-27 Carl Zeiss Industrielle Messtechnik Gmbh Messsensor-Trägeranordnung mit Bewegungsaktor für ein Koordinatenmessgerät

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US714923A (en) * 1902-01-25 1902-12-02 George A Le Fevre Road-bed.
US3585415A (en) * 1969-10-06 1971-06-15 Univ California Stress-strain transducer charge coupled to a piezoelectric material
US4035822A (en) * 1975-03-14 1977-07-12 Rca Corporation Pressure sensitive field effect device
DE2712181C3 (de) * 1977-03-19 1981-01-22 Fa. Carl Zeiss, 7920 Heidenheim Tastsystem
GB2025073B (en) * 1978-07-07 1982-12-15 Rolls Royce Apparatus for monitoring the state of an electrical circiut
SU1095065A2 (ru) * 1979-11-05 1984-05-30 Вильнюсский Филиал Экспериментального Научно-Исследовательского Института Металлорежущих Станков Измерительна головка
GB2101325B (en) * 1981-06-23 1984-10-17 Rank Organisation Ltd Contact sensitive probes using capacitative sensors
EP0068899B1 (de) * 1981-06-30 1988-11-30 Renishaw plc Tastkopf zur Messung von Werkstücken

Also Published As

Publication number Publication date
GB8407847D0 (en) 1984-05-02
US4629957A (en) 1986-12-16
EP0159781A1 (de) 1985-10-30
EP0159781B1 (de) 1989-04-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee