DE3474068D1 - Method and apparatus for measuring the difference in concentration of paramagnetic components in gases - Google Patents

Method and apparatus for measuring the difference in concentration of paramagnetic components in gases

Info

Publication number
DE3474068D1
DE3474068D1 DE8484112178T DE3474068T DE3474068D1 DE 3474068 D1 DE3474068 D1 DE 3474068D1 DE 8484112178 T DE8484112178 T DE 8484112178T DE 3474068 T DE3474068 T DE 3474068T DE 3474068 D1 DE3474068 D1 DE 3474068D1
Authority
DE
Germany
Prior art keywords
gas
measurement
difference
flow
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484112178T
Other languages
German (de)
Inventor
Heinz Dr Hummel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority claimed from EP19840112178 external-priority patent/EP0177629B1/en
Application granted granted Critical
Publication of DE3474068D1 publication Critical patent/DE3474068D1/en
Expired legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

A measurement and a reference gas or gas mixture are periodically alternately fed into the gap chamber of a magnetic circuit and the resulting force flux variations measured to determine the measurement conc. difference. An alternating flow source (7,8) is connected to the measurement space (2) via gas lines. The gas vol. consisting of the measurement space (2), gas lines (5) and flow alternator (7,8) is provided with the measurement gas (M) via a flow valve (DM). The flow alternator contains neither valves nor gas changeover devices. The measurement space has an outlet aperture around which flows the comparison or measurement gas.
DE8484112178T 1984-10-11 1984-10-11 Method and apparatus for measuring the difference in concentration of paramagnetic components in gases Expired DE3474068D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19840112178 EP0177629B1 (en) 1983-04-14 1984-10-11 Method and apparatus for measuring the difference in concentration of paramagnetic components in gases

Publications (1)

Publication Number Publication Date
DE3474068D1 true DE3474068D1 (en) 1988-10-20

Family

ID=8192209

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484112178T Expired DE3474068D1 (en) 1984-10-11 1984-10-11 Method and apparatus for measuring the difference in concentration of paramagnetic components in gases

Country Status (2)

Country Link
AT (1) ATE37237T1 (en)
DE (1) DE3474068D1 (en)

Also Published As

Publication number Publication date
ATE37237T1 (en) 1988-09-15

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee