DE3473968D1 - Ion beam deflecting apparatus - Google Patents

Ion beam deflecting apparatus

Info

Publication number
DE3473968D1
DE3473968D1 DE8484105180T DE3473968T DE3473968D1 DE 3473968 D1 DE3473968 D1 DE 3473968D1 DE 8484105180 T DE8484105180 T DE 8484105180T DE 3473968 T DE3473968 T DE 3473968T DE 3473968 D1 DE3473968 D1 DE 3473968D1
Authority
DE
Germany
Prior art keywords
ion beam
beam deflecting
deflecting apparatus
ion
deflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484105180T
Other languages
English (en)
Inventor
John Howard Keller
James Robert Winnard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3473968D1 publication Critical patent/DE3473968D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1472—Deflecting along given lines
    • H01J37/1474—Scanning means
    • H01J37/1477—Scanning means electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE8484105180T 1983-07-28 1984-05-09 Ion beam deflecting apparatus Expired DE3473968D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/518,229 US4556823A (en) 1983-07-28 1983-07-28 Multi-function charged particle apparatus

Publications (1)

Publication Number Publication Date
DE3473968D1 true DE3473968D1 (en) 1988-10-13

Family

ID=24063104

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484105180T Expired DE3473968D1 (en) 1983-07-28 1984-05-09 Ion beam deflecting apparatus

Country Status (4)

Country Link
US (1) US4556823A (de)
EP (1) EP0132522B1 (de)
JP (1) JPS6044951A (de)
DE (1) DE3473968D1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4831270A (en) * 1987-05-21 1989-05-16 Ion Implant Services Ion implantation apparatus
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
KR970002681B1 (ko) * 1990-10-03 1997-03-08 이턴 코오포레이숀 이온비임주입시스템과 그방법 및 이온비임을 편향시키는 정전렌즈
US5376864A (en) * 1992-10-29 1994-12-27 The United States Of America As Represented By The Department Of Energy Shielded serpentine traveling wave tube deflection structure
EP0843335B1 (de) * 1996-11-19 2004-09-08 Advantest Corporation Elektrostatische Vorrichtung zur Einwirkung auf einen Korpuskularstrahl
DE19907858C1 (de) * 1999-02-24 2000-10-05 Leica Microsys Lithography Ltd Vorrichtung zur elektrostatischen Ablenkung eines Korpuskularstrahles
DE10117025A1 (de) * 2001-04-05 2002-10-10 Zeiss Carl Teilchenoptische Vorrichtung,Beleuchtungsvorrichtung und Projektionssystem sowie Verfahren unter Verwendung derselben
GB0427634D0 (en) * 2004-12-17 2005-01-19 Micromass Ltd Mass spectrometer
US8927940B2 (en) * 2011-06-03 2015-01-06 Bruker Daltonics, Inc. Abridged multipole structure for the transport, selection and trapping of ions in a vacuum system
US8969798B2 (en) * 2011-07-07 2015-03-03 Bruker Daltonics, Inc. Abridged ion trap-time of flight mass spectrometer
US9184040B2 (en) * 2011-06-03 2015-11-10 Bruker Daltonics, Inc. Abridged multipole structure for the transport and selection of ions in a vacuum system

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2179097A (en) * 1938-02-10 1939-11-07 Rca Corp Cathode ray tube electrode structures
DE868322C (de) * 1949-06-23 1953-02-23 Siemens Ag Elektrostatische Ablenkvorrichtung fuer Kathodenstrahlroehren
US3147445A (en) * 1959-11-05 1964-09-01 Thompson Ramo Wooldridge Inc Quadrupole focusing means for charged particle containment
US3407323A (en) * 1966-05-23 1968-10-22 High Voltage Engineering Corp Electrode structure for a charged particle accelerating apparatus, arrayed and biased to produce an electric field between and parallel to the electrodes
US3543079A (en) * 1967-12-20 1970-11-24 Matsushita Electric Ind Co Ltd Device for correcting the path of an electron beam
US3500121A (en) * 1968-02-15 1970-03-10 Gen Time Corp Electronic counting or timekeeping system using glow discharge tube without permanent anode
US3665245A (en) * 1969-10-27 1972-05-23 Research Corp Quadrupole ionization gauge
US3648046A (en) * 1970-05-18 1972-03-07 Granville Phillips Co Quadrupole gas analyzer comprising four flat plate electrodes
NL7112210A (de) * 1971-09-04 1973-03-06
US3816748A (en) * 1972-04-28 1974-06-11 Alpha Ind Inc Ion accelerator employing crossed-field selector
JPS5123305A (en) * 1974-08-19 1976-02-24 Yokogawa Electric Works Ltd Shoshikino purosesuseigyosochiniokeru suraisuritsupukaidohenkohoho
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4214160A (en) * 1976-03-04 1980-07-22 Finnigan Corporation Mass spectrometer system and method for control of ion energy for different masses
FR2386131A1 (fr) * 1977-03-29 1978-10-27 Thomson Csf Canon d'arrosage pour tube a entretien d'image a vision directe et tube a entretien d'image utilisant un tel canon
FR2396429A1 (fr) * 1977-06-30 1979-01-26 Raytheon Co Ensemble de sonde et de dispositif d'accord pour cavite resonnante d'un oscillateur a haute frequence
US4142132A (en) * 1977-07-05 1979-02-27 Control Data Corporation Method and means for dynamic correction of electrostatic deflector for electron beam tube
US4392080A (en) * 1980-05-23 1983-07-05 The United States Of America As Represented By The United States Department Of Energy Means and method for the focusing and acceleration of parallel beams of charged particles
JPS5769653A (en) * 1980-10-20 1982-04-28 Fujitsu Ltd Charged particle beam device
DE3130276A1 (de) * 1981-07-31 1983-02-17 Hermann Prof. Dr. 6301 Fernwald Wollnik Einrichtung zur vollelektrischen justierung von teilchenspektrometern und abbildungssystemen

Also Published As

Publication number Publication date
EP0132522A2 (de) 1985-02-13
US4556823A (en) 1985-12-03
JPS6044951A (ja) 1985-03-11
EP0132522B1 (de) 1988-09-07
EP0132522A3 (en) 1986-08-20

Similar Documents

Publication Publication Date Title
GB2182485B (en) Ion beam apparatus
GB8302590D0 (en) Beam scanning method
DE3479363D1 (en) An ion beam machining device
EP0168056A3 (en) Apparatus for ion beam work
JPS57114232A (en) Electron beam drawing system
JPS57105953A (en) Electron beam projecting device
GB8308260D0 (en) Electron beam apparatus
JPS57113548A (en) Device for deflecting wide ion plasma beam
JPS5791472A (en) Curved beam apparatus
EP0146383A3 (en) Apparatus for forming electron beams
JPS57114233A (en) Electron beam drawing system
GB8320073D0 (en) Beam splice
GB8306951D0 (en) Energy beam focusing apparatus
DE3472331D1 (en) Focused ion beam column
GB2153140B (en) Apparatus for forming electron beams
DE3473968D1 (en) Ion beam deflecting apparatus
DE3367689D1 (en) Beam scanning apparatus
GB8522530D0 (en) Electron beam apparatus
DE3380504D1 (en) Electron beam apparatus
GB8325829D0 (en) Electron beam scanning device
GB8410067D0 (en) Beam scanning apparatus
DE3378145D1 (en) Ion beam source
GB2173945B (en) Scanning electron beam apparatus
GB2120846B (en) Molecular beam epitaxy apparatus
GB8510291D0 (en) Electron beam apparatus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee