DE3447397A1 - Elektrischer druckgeber - Google Patents
Elektrischer druckgeberInfo
- Publication number
- DE3447397A1 DE3447397A1 DE19843447397 DE3447397A DE3447397A1 DE 3447397 A1 DE3447397 A1 DE 3447397A1 DE 19843447397 DE19843447397 DE 19843447397 DE 3447397 A DE3447397 A DE 3447397A DE 3447397 A1 DE3447397 A1 DE 3447397A1
- Authority
- DE
- Germany
- Prior art keywords
- pressure
- membrane
- pressure chamber
- test
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 claims abstract description 57
- 238000012360 testing method Methods 0.000 claims abstract description 54
- 238000012544 monitoring process Methods 0.000 claims abstract description 9
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000002775 capsule Substances 0.000 claims description 5
- 230000001419 dependent effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000011156 evaluation Methods 0.000 abstract description 12
- 230000007547 defect Effects 0.000 abstract description 2
- 239000004020 conductor Substances 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L17/00—Devices or apparatus for measuring tyre pressure or the pressure in other inflated bodies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
- G01M3/3272—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers for verifying the internal pressure of closed containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19843447397 DE3447397A1 (de) | 1984-12-24 | 1984-12-24 | Elektrischer druckgeber |
FR8512895A FR2575289A1 (fr) | 1984-12-24 | 1985-08-29 | Indicateur electrique de pression pouvant etre utilise pour la mesure absolue d'un liquide ou d'un gaz, notamment pour la surveillance de la pression de pneus de vehicules automobiles |
IT23209/85A IT1186439B (it) | 1984-12-24 | 1985-12-13 | Trasduttore di pressione elettrico |
JP60289532A JPS61155931A (ja) | 1984-12-24 | 1985-12-24 | 電気的な圧力発生器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19843447397 DE3447397A1 (de) | 1984-12-24 | 1984-12-24 | Elektrischer druckgeber |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3447397A1 true DE3447397A1 (de) | 1986-07-03 |
Family
ID=6253893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19843447397 Withdrawn DE3447397A1 (de) | 1984-12-24 | 1984-12-24 | Elektrischer druckgeber |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS61155931A (it) |
DE (1) | DE3447397A1 (it) |
FR (1) | FR2575289A1 (it) |
IT (1) | IT1186439B (it) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3836981A1 (de) * | 1988-10-31 | 1990-05-03 | Bosch Gmbh Robert | Drucksensor, insbesondere reifendrucksensor fuer kraftfahrzeuge |
DE9006273U1 (de) * | 1990-06-02 | 1991-10-10 | Rau GmbH, 8900 Augsburg | Gasdruck-Prüfgerät für Gasanlagen |
EP1043577A1 (en) * | 1998-03-13 | 2000-10-11 | Tien-Tsai Huang | Tire pressure indicator including pressure gauges that have a self-generating power capability |
US7673494B2 (en) * | 2003-12-09 | 2010-03-09 | Robert Bosch Gmbh | Device for testing at least one pressure sensor |
DE102011111558A1 (de) * | 2011-08-26 | 2013-02-28 | Andreas Grunert | Trockener Messwertaufnehmer |
DE102021118297A1 (de) | 2021-07-15 | 2023-01-19 | Vega Grieshaber Kg | Drucksensor mit einem Überwachungselement zur Erfassung eines Eintritts von Medium und Verfahren zur Überwachung eines Drucksensors |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3705901C2 (de) * | 1987-02-24 | 1996-12-12 | Siemens Ag | Druckmeßwandler |
WO1996022515A1 (en) * | 1995-01-19 | 1996-07-25 | Honeywell Inc. | Apparatus for detection of a diaphragm rupture in a pressure sensor |
US5837935A (en) * | 1996-02-26 | 1998-11-17 | Ford Motor Company | Hermetic seal for an electronic component having a secondary chamber |
US6422088B1 (en) | 1999-09-24 | 2002-07-23 | Denso Corporation | Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus |
US6518880B2 (en) | 2000-06-28 | 2003-02-11 | Denso Corporation | Physical-quantity detection sensor |
JP2013011556A (ja) * | 2011-06-30 | 2013-01-17 | Md Innovations Kk | 隔膜気圧計 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3739644A (en) * | 1972-06-30 | 1973-06-19 | Gen Electric | Linearization of differential pressure integral silicon transducer |
DE2364027A1 (de) * | 1973-12-21 | 1975-07-03 | Siemens Ag | Differenzdruckmesszelle mit elektrischem abgriff |
US4222277A (en) * | 1979-08-13 | 1980-09-16 | Kulite Semiconductor Products, Inc. | Media compatible pressure transducer |
US4322980A (en) * | 1979-11-08 | 1982-04-06 | Hitachi, Ltd. | Semiconductor pressure sensor having plural pressure sensitive diaphragms and method |
-
1984
- 1984-12-24 DE DE19843447397 patent/DE3447397A1/de not_active Withdrawn
-
1985
- 1985-08-29 FR FR8512895A patent/FR2575289A1/fr active Pending
- 1985-12-13 IT IT23209/85A patent/IT1186439B/it active
- 1985-12-24 JP JP60289532A patent/JPS61155931A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3836981A1 (de) * | 1988-10-31 | 1990-05-03 | Bosch Gmbh Robert | Drucksensor, insbesondere reifendrucksensor fuer kraftfahrzeuge |
DE9006273U1 (de) * | 1990-06-02 | 1991-10-10 | Rau GmbH, 8900 Augsburg | Gasdruck-Prüfgerät für Gasanlagen |
EP1043577A1 (en) * | 1998-03-13 | 2000-10-11 | Tien-Tsai Huang | Tire pressure indicator including pressure gauges that have a self-generating power capability |
US7673494B2 (en) * | 2003-12-09 | 2010-03-09 | Robert Bosch Gmbh | Device for testing at least one pressure sensor |
DE10357353B4 (de) * | 2003-12-09 | 2016-06-09 | Robert Bosch Gmbh | Vorrichtung zum Testen von wenigstens einem Drucksensor |
DE102011111558A1 (de) * | 2011-08-26 | 2013-02-28 | Andreas Grunert | Trockener Messwertaufnehmer |
DE102011111558B4 (de) * | 2011-08-26 | 2020-10-15 | Andreas Grunert | Trockener Messwertaufnehmer |
DE102021118297A1 (de) | 2021-07-15 | 2023-01-19 | Vega Grieshaber Kg | Drucksensor mit einem Überwachungselement zur Erfassung eines Eintritts von Medium und Verfahren zur Überwachung eines Drucksensors |
Also Published As
Publication number | Publication date |
---|---|
IT1186439B (it) | 1987-11-26 |
IT8523209A0 (it) | 1985-12-13 |
JPS61155931A (ja) | 1986-07-15 |
FR2575289A1 (fr) | 1986-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |