DE3422850C2 - - Google Patents

Info

Publication number
DE3422850C2
DE3422850C2 DE19843422850 DE3422850A DE3422850C2 DE 3422850 C2 DE3422850 C2 DE 3422850C2 DE 19843422850 DE19843422850 DE 19843422850 DE 3422850 A DE3422850 A DE 3422850A DE 3422850 C2 DE3422850 C2 DE 3422850C2
Authority
DE
Germany
Prior art keywords
coordinate table
grating
coordinate
diffraction grating
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19843422850
Other languages
German (de)
English (en)
Other versions
DE3422850A1 (de
Inventor
Valentin Andreevic Zajcev
Valentin Ivanovic Kuzelev
Igor' Aleksandrovic Kadomskij
Evgenij Evgen'evic Onegin
Anatolij Petrovic Pockaev
Valerij Antonovic Plavinskij
Jakov Aronovic Rajchman
Arnol'd Petrovic Svidel'skij
Vladimir Ivanovic Minsk Su Cuchlib
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19843422850 priority Critical patent/DE3422850A1/de
Publication of DE3422850A1 publication Critical patent/DE3422850A1/de
Application granted granted Critical
Publication of DE3422850C2 publication Critical patent/DE3422850C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
DE19843422850 1984-06-20 1984-06-20 Koordinatenmessvorrichtung fuer ein vergroesserungskopieren Granted DE3422850A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19843422850 DE3422850A1 (de) 1984-06-20 1984-06-20 Koordinatenmessvorrichtung fuer ein vergroesserungskopieren

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843422850 DE3422850A1 (de) 1984-06-20 1984-06-20 Koordinatenmessvorrichtung fuer ein vergroesserungskopieren

Publications (2)

Publication Number Publication Date
DE3422850A1 DE3422850A1 (de) 1986-01-02
DE3422850C2 true DE3422850C2 (enrdf_load_stackoverflow) 1987-11-12

Family

ID=6238793

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843422850 Granted DE3422850A1 (de) 1984-06-20 1984-06-20 Koordinatenmessvorrichtung fuer ein vergroesserungskopieren

Country Status (1)

Country Link
DE (1) DE3422850A1 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU680466A1 (ru) * 1977-03-29 1984-03-30 Предприятие П/Я Р-6495 Фотоповторитель
SU838649A1 (ru) * 1979-09-05 1981-06-15 Предприятие П/Я Р-6495 Координатна система дл устройствпРОЕКциОННОй пЕчАТи

Also Published As

Publication number Publication date
DE3422850A1 (de) 1986-01-02

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee