DE3417176C2 - Photoelektrische Meßeinrichtung - Google Patents

Photoelektrische Meßeinrichtung

Info

Publication number
DE3417176C2
DE3417176C2 DE3417176A DE3417176A DE3417176C2 DE 3417176 C2 DE3417176 C2 DE 3417176C2 DE 3417176 A DE3417176 A DE 3417176A DE 3417176 A DE3417176 A DE 3417176A DE 3417176 C2 DE3417176 C2 DE 3417176C2
Authority
DE
Germany
Prior art keywords
scanning
grating
field
distance
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3417176A
Other languages
German (de)
English (en)
Other versions
DE3417176A1 (de
Inventor
Dieter Dipl.-Ing. Michel (FH), 8220 Traunstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE3417176A priority Critical patent/DE3417176C2/de
Priority to AT85103054T priority patent/ATE57257T1/de
Priority to DE8585103054T priority patent/DE3579944D1/de
Priority to EP85103054A priority patent/EP0163824B1/de
Priority to JP60096173A priority patent/JPS60243515A/ja
Publication of DE3417176A1 publication Critical patent/DE3417176A1/de
Application granted granted Critical
Publication of DE3417176C2 publication Critical patent/DE3417176C2/de
Priority to US07/110,566 priority patent/US4778273A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE3417176A 1984-05-09 1984-05-09 Photoelektrische Meßeinrichtung Expired DE3417176C2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3417176A DE3417176C2 (de) 1984-05-09 1984-05-09 Photoelektrische Meßeinrichtung
AT85103054T ATE57257T1 (de) 1984-05-09 1985-03-16 Photoelektrische messeinrichtung.
DE8585103054T DE3579944D1 (de) 1984-05-09 1985-03-16 Photoelektrische messeinrichtung.
EP85103054A EP0163824B1 (de) 1984-05-09 1985-03-16 Photoelektrische Messeinrichtung
JP60096173A JPS60243515A (ja) 1984-05-09 1985-05-08 光電的測定装置
US07/110,566 US4778273A (en) 1984-05-09 1987-10-19 Photoelectric measuring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3417176A DE3417176C2 (de) 1984-05-09 1984-05-09 Photoelektrische Meßeinrichtung

Publications (2)

Publication Number Publication Date
DE3417176A1 DE3417176A1 (de) 1985-11-21
DE3417176C2 true DE3417176C2 (de) 1986-07-31

Family

ID=6235363

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3417176A Expired DE3417176C2 (de) 1984-05-09 1984-05-09 Photoelektrische Meßeinrichtung
DE8585103054T Expired - Fee Related DE3579944D1 (de) 1984-05-09 1985-03-16 Photoelektrische messeinrichtung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8585103054T Expired - Fee Related DE3579944D1 (de) 1984-05-09 1985-03-16 Photoelektrische messeinrichtung.

Country Status (5)

Country Link
US (1) US4778273A (en, 2012)
EP (1) EP0163824B1 (en, 2012)
JP (1) JPS60243515A (en, 2012)
AT (1) ATE57257T1 (en, 2012)
DE (2) DE3417176C2 (en, 2012)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3801763C1 (en, 2012) * 1988-01-22 1989-06-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE4122932A1 (de) * 1991-05-18 1992-11-19 Heidenhain Gmbh Dr Johannes Interferentielle positionsmessvorrichtung
DE4125865A1 (de) * 1991-08-03 1993-02-04 Heidenhain Gmbh Dr Johannes Laengen- oder winkelmesseinrichtung
DE4212281A1 (de) * 1991-07-11 1993-10-14 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmeßvorrichtung

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3543179A1 (de) * 1985-12-06 1987-06-11 Philips Patentverwaltung Optischer weg-sensor mit einem filter
DE3616144A1 (de) * 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
DE8717558U1 (de) * 1987-02-21 1989-02-23 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Positionsmeßeinrichtung
DE3844705C2 (en, 2012) * 1987-09-30 1992-06-17 Kabushiki Kaisha Okuma Tekkosho, Nagoya, Aichi, Jp
US4943716A (en) * 1988-01-22 1990-07-24 Mitutoyo Corporation Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
GB2246431B (en) * 1988-01-22 1992-05-13 Mitutoyo Corp Optical encoder
US4849624A (en) * 1988-06-24 1989-07-18 The Boeing Company Optical wavelength division multiplexing of digital encoder tracks
GB2230666B (en) * 1989-04-19 1993-04-28 Mitutoyo Corp Displacement detector
JPH0810145B2 (ja) * 1989-07-28 1996-01-31 オ−クマ株式会社 光学式エンコーダ及びその光学スケール
AT395914B (de) * 1991-04-18 1993-04-26 Rsf Elektronik Gmbh Photoelektrische positionsmesseinrichtung
EP0576004B2 (en) * 1992-06-24 2004-10-13 Kabushiki Kaisha Topcon Electronic levelling apparatus and levelling staff used with the same
EP0579846B1 (de) * 1992-07-18 1995-08-23 Dr. Johannes Heidenhain GmbH Optische Vorrichtung
DE4229575C1 (de) * 1992-09-04 1993-11-25 Heidenhain Gmbh Dr Johannes Verfahren bei Längen- oder Winkelmeßeinrichtungen
ATE192566T1 (de) * 1994-02-23 2000-05-15 Heidenhain Gmbh Dr Johannes Positionsmessvorrichtung
DE19511068A1 (de) * 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE19652562C2 (de) * 1996-12-17 1999-07-22 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
US6327791B1 (en) 1999-06-09 2001-12-11 The Government Of The United States As Represented By The Secretary Of Commerce Chain code position detector
AU5737600A (en) * 1999-06-16 2001-01-02 Snorkel International, Inc Chain code position detector
DE19937023A1 (de) 1999-08-05 2001-02-08 Heidenhain Gmbh Dr Johannes Reflexions-Maßverkörperung und Verfahren zur Herstellung einer Reflexions-Maßverkörperung
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JP4476682B2 (ja) * 2003-05-16 2010-06-09 株式会社ミツトヨ 光電式エンコーダ
US8436293B2 (en) * 2009-02-23 2013-05-07 Christopher C. Chang Optical encoder and method for measuring displacement information using multiple optical tracks of diffractive optical regions having different periodicities
JP5982161B2 (ja) 2012-04-11 2016-08-31 株式会社ミツトヨ エンコーダ
DE102014112459B4 (de) * 2014-08-29 2017-02-16 Ic-Haus Gmbh Optischer Positionsencoder
GB201916662D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1548707C3 (de) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Fotoelektrischer Schrittgeber
DE1814785A1 (de) * 1968-12-14 1970-06-25 Johannes Heidenhain Feinmechan Zaehlanordnung
US3816003A (en) * 1973-03-12 1974-06-11 Dynamics Res Corp Sealed linear encoder
DE2316248A1 (de) * 1973-03-31 1974-10-10 Leitz Ernst Gmbh Fotoelektrischer schrittgeber
CH626169A5 (en, 2012) * 1976-11-25 1981-10-30 Leitz Ernst Gmbh
US4340305A (en) * 1977-05-03 1982-07-20 Massachusetts Institute Of Technology Plate aligning
DE3104972C2 (de) * 1981-02-12 1985-06-20 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische inkrementale Positioniereinrichtung
US4572952A (en) * 1982-07-28 1986-02-25 Adrian March Research Ltd. Position sensor with moire interpolation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3801763C1 (en, 2012) * 1988-01-22 1989-06-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE4122932A1 (de) * 1991-05-18 1992-11-19 Heidenhain Gmbh Dr Johannes Interferentielle positionsmessvorrichtung
DE4212281A1 (de) * 1991-07-11 1993-10-14 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmeßvorrichtung
DE4125865A1 (de) * 1991-08-03 1993-02-04 Heidenhain Gmbh Dr Johannes Laengen- oder winkelmesseinrichtung

Also Published As

Publication number Publication date
DE3417176A1 (de) 1985-11-21
EP0163824B1 (de) 1990-10-03
EP0163824A3 (en) 1988-01-13
ATE57257T1 (de) 1990-10-15
US4778273A (en) 1988-10-18
JPH0131127B2 (en, 2012) 1989-06-23
JPS60243515A (ja) 1985-12-03
DE3579944D1 (de) 1990-11-08
EP0163824A2 (de) 1985-12-11

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee