DE3379623D1 - Extensional mode piezoelectric microresonator - Google Patents

Extensional mode piezoelectric microresonator

Info

Publication number
DE3379623D1
DE3379623D1 DE8383810209T DE3379623T DE3379623D1 DE 3379623 D1 DE3379623 D1 DE 3379623D1 DE 8383810209 T DE8383810209 T DE 8383810209T DE 3379623 T DE3379623 T DE 3379623T DE 3379623 D1 DE3379623 D1 DE 3379623D1
Authority
DE
Germany
Prior art keywords
mode piezoelectric
extensional mode
microresonator
piezoelectric microresonator
extensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383810209T
Other languages
English (en)
Inventor
Shih S Chuang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Statek Corp
Original Assignee
Statek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Statek Corp filed Critical Statek Corp
Application granted granted Critical
Publication of DE3379623D1 publication Critical patent/DE3379623D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063—Constructional details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE8383810209T 1982-06-04 1983-05-17 Extensional mode piezoelectric microresonator Expired DE3379623D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US38506082A 1982-06-04 1982-06-04

Publications (1)

Publication Number Publication Date
DE3379623D1 true DE3379623D1 (en) 1989-05-18

Family

ID=23519862

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383810209T Expired DE3379623D1 (en) 1982-06-04 1983-05-17 Extensional mode piezoelectric microresonator

Country Status (3)

Country Link
EP (1) EP0096653B1 (de)
JP (1) JPS58220515A (de)
DE (1) DE3379623D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01293707A (ja) * 1988-05-20 1989-11-27 Seiko Electronic Components Ltd 長辺縦振動子
JPH0831764B2 (ja) * 1988-11-14 1996-03-27 セイコー電子工業株式会社 縦水晶振動子の電極構造
JPH0831768B2 (ja) * 1989-12-22 1996-03-27 セイコー電子工業株式会社 縦水晶振動子
CH683578A5 (fr) * 1990-03-08 1994-03-31 Suisse Electronique Microtech Résonateur piézoélectrique.
US5442146A (en) 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
US5313023A (en) 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5336854A (en) 1992-04-03 1994-08-09 Weigh-Tronix, Inc. Electronic force sensing load cell
US5391844A (en) 1992-04-03 1995-02-21 Weigh-Tronix Inc Load cell
US5604336A (en) * 1995-03-08 1997-02-18 Weigh-Tronix, Inc. Load cell with composite end beams having portions with different elastic modulus
US7005946B2 (en) 2002-08-06 2006-02-28 The Charles Stark Draper Laboratory, Inc. MEMS piezoelectric longitudinal mode resonator

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL62574C (de) * 1936-02-21
US2157701A (en) * 1936-05-19 1939-05-09 Beil Telephone Lab Inc Piezoelectric apparatus
GB848529A (en) * 1958-05-16 1960-09-21 Standard Telephones Cables Ltd Improved piezo-electric vibrators
CH578803A5 (de) * 1974-05-14 1976-08-13 Suisse Horlogerie
CH1212475A4 (de) * 1975-09-18 1977-07-29
JPS5340295A (en) * 1976-09-25 1978-04-12 Sharp Corp Crystal watch
CH641632B (fr) * 1981-01-15 Asulab Sa Micro-resonateur piezo-electrique.

Also Published As

Publication number Publication date
EP0096653B1 (de) 1989-04-12
EP0096653A2 (de) 1983-12-21
EP0096653A3 (en) 1985-11-21
JPS58220515A (ja) 1983-12-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition