DE3377038D1 - Charged particle energy analyzer - Google Patents

Charged particle energy analyzer

Info

Publication number
DE3377038D1
DE3377038D1 DE8383102947T DE3377038T DE3377038D1 DE 3377038 D1 DE3377038 D1 DE 3377038D1 DE 8383102947 T DE8383102947 T DE 8383102947T DE 3377038 T DE3377038 T DE 3377038T DE 3377038 D1 DE3377038 D1 DE 3377038D1
Authority
DE
Germany
Prior art keywords
reflector
sample
charged particles
detector
charged particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383102947T
Other languages
German (de)
Inventor
Hiroshi Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Application granted granted Critical
Publication of DE3377038D1 publication Critical patent/DE3377038D1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

The analyser includes a source for generating radiation to be incident on a sample so as to emit charged particles from the sample. A reflection filter, having a reflector and a grid selectively reflects the charged particles having energy lower than a first value. The reflector has two complex foci, in a symmetric manner, at which the sample and a detector are disposed, the detector detecting the charged particles. A transmission filter selectively transmits photoelectrons having energy higher than a second value. The reflector may be a spheroid mirror or a spherical mirror. An additional grid may be disposed between the transmission filter and the detector to accelerate the photoelectrons.
DE8383102947T 1983-03-24 1983-03-24 Charged particle energy analyzer Expired DE3377038D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19830102947 EP0120106B1 (en) 1983-03-24 1983-03-24 Charged particle energy analyzer

Publications (1)

Publication Number Publication Date
DE3377038D1 true DE3377038D1 (en) 1988-07-14

Family

ID=8190371

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383102947T Expired DE3377038D1 (en) 1983-03-24 1983-03-24 Charged particle energy analyzer

Country Status (2)

Country Link
EP (1) EP0120106B1 (en)
DE (1) DE3377038D1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935454A (en) * 1974-06-28 1976-01-27 E. I. Du Pont De Nemours & Company Electron collection in electron spectrometers

Also Published As

Publication number Publication date
EP0120106B1 (en) 1988-06-08
EP0120106A1 (en) 1984-10-03

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: SHIMADZU CORP., KYOTO, JP

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee