DE3377038D1 - Charged particle energy analyzer - Google Patents
Charged particle energy analyzerInfo
- Publication number
- DE3377038D1 DE3377038D1 DE8383102947T DE3377038T DE3377038D1 DE 3377038 D1 DE3377038 D1 DE 3377038D1 DE 8383102947 T DE8383102947 T DE 8383102947T DE 3377038 T DE3377038 T DE 3377038T DE 3377038 D1 DE3377038 D1 DE 3377038D1
- Authority
- DE
- Germany
- Prior art keywords
- reflector
- sample
- charged particles
- detector
- charged particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
The analyser includes a source for generating radiation to be incident on a sample so as to emit charged particles from the sample. A reflection filter, having a reflector and a grid selectively reflects the charged particles having energy lower than a first value. The reflector has two complex foci, in a symmetric manner, at which the sample and a detector are disposed, the detector detecting the charged particles. A transmission filter selectively transmits photoelectrons having energy higher than a second value. The reflector may be a spheroid mirror or a spherical mirror. An additional grid may be disposed between the transmission filter and the detector to accelerate the photoelectrons.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19830102947 EP0120106B1 (en) | 1983-03-24 | 1983-03-24 | Charged particle energy analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3377038D1 true DE3377038D1 (en) | 1988-07-14 |
Family
ID=8190371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383102947T Expired DE3377038D1 (en) | 1983-03-24 | 1983-03-24 | Charged particle energy analyzer |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0120106B1 (en) |
DE (1) | DE3377038D1 (en) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3935454A (en) * | 1974-06-28 | 1976-01-27 | E. I. Du Pont De Nemours & Company | Electron collection in electron spectrometers |
-
1983
- 1983-03-24 EP EP19830102947 patent/EP0120106B1/en not_active Expired
- 1983-03-24 DE DE8383102947T patent/DE3377038D1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0120106B1 (en) | 1988-06-08 |
EP0120106A1 (en) | 1984-10-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: SHIMADZU CORP., KYOTO, JP |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |