DE3376889D1 - A method for etching polyimides - Google Patents
A method for etching polyimidesInfo
- Publication number
- DE3376889D1 DE3376889D1 DE8383105700T DE3376889T DE3376889D1 DE 3376889 D1 DE3376889 D1 DE 3376889D1 DE 8383105700 T DE8383105700 T DE 8383105700T DE 3376889 T DE3376889 T DE 3376889T DE 3376889 D1 DE3376889 D1 DE 3376889D1
- Authority
- DE
- Germany
- Prior art keywords
- etching polyimides
- polyimides
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Drying Of Semiconductors (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43330382A | 1982-10-07 | 1982-10-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3376889D1 true DE3376889D1 (en) | 1988-07-07 |
Family
ID=23719664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383105700T Expired DE3376889D1 (en) | 1982-10-07 | 1983-06-10 | A method for etching polyimides |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0108189B1 (de) |
JP (1) | JPS5969931A (de) |
DE (1) | DE3376889D1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6068618A (ja) * | 1983-09-26 | 1985-04-19 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS60236248A (ja) * | 1984-05-09 | 1985-11-25 | Matsushita Electric Ind Co Ltd | 多層配線形成方法 |
JPH0727887B2 (ja) * | 1984-12-25 | 1995-03-29 | 株式会社東芝 | 有機物の灰化方法 |
US4904328A (en) * | 1987-09-08 | 1990-02-27 | Gencorp Inc. | Bonding of FRP parts |
JP2555167B2 (ja) * | 1988-11-07 | 1996-11-20 | 工業技術院長 | 非晶性プラスチック成形品の光加工法 |
EP0379639A3 (de) * | 1988-09-26 | 1991-02-06 | International Business Machines Corporation | Elektronenstrahl-empfindliches, positives Polyimid |
US4877718A (en) * | 1988-09-26 | 1989-10-31 | Rennsselaer Polytechnic Institute | Positive-working photosensitive polyimide operated by photo induced molecular weight changes |
GB2227701B (en) * | 1989-02-07 | 1993-01-06 | Stc Plc | Selective etching process |
JPH0352936A (ja) * | 1989-07-19 | 1991-03-07 | Nitto Denko Corp | 表面改質方法 |
US5178726A (en) * | 1991-03-07 | 1993-01-12 | Minnesota Mining And Manufacturing Company | Process for producing a patterned metal surface |
CA2084451A1 (en) * | 1992-02-18 | 1993-08-19 | Cameron T. Murray | Polyimide surfaces having enhanced adhesion |
WO2023100387A1 (ja) * | 2021-11-30 | 2023-06-08 | ウシオ電機株式会社 | 表面改質方法、樹脂めっき材の製造方法、及び無電解めっき装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2450535A1 (de) * | 1974-10-24 | 1976-04-29 | Crosfield Electronics Ltd | Druckplatte sowie verfahren und vorrichtung zur herstellung derselben |
JPS57198631A (en) * | 1981-05-29 | 1982-12-06 | Ibm | Exposing method and device |
-
1983
- 1983-06-10 DE DE8383105700T patent/DE3376889D1/de not_active Expired
- 1983-06-10 EP EP19830105700 patent/EP0108189B1/de not_active Expired
- 1983-06-24 JP JP11298883A patent/JPS5969931A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0566010B2 (de) | 1993-09-20 |
JPS5969931A (ja) | 1984-04-20 |
EP0108189A3 (en) | 1984-07-04 |
EP0108189B1 (de) | 1988-06-01 |
EP0108189A2 (de) | 1984-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |