DE3374441D1 - Method and apparatus for exposing photosensitive material - Google Patents

Method and apparatus for exposing photosensitive material

Info

Publication number
DE3374441D1
DE3374441D1 DE8484900469T DE3374441T DE3374441D1 DE 3374441 D1 DE3374441 D1 DE 3374441D1 DE 8484900469 T DE8484900469 T DE 8484900469T DE 3374441 T DE3374441 T DE 3374441T DE 3374441 D1 DE3374441 D1 DE 3374441D1
Authority
DE
Germany
Prior art keywords
photosensitive material
exposing photosensitive
exposing
photosensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484900469T
Other languages
English (en)
Inventor
James Cowan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polaroid Corp
Original Assignee
Polaroid Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polaroid Corp filed Critical Polaroid Corp
Application granted granted Critical
Publication of DE3374441D1 publication Critical patent/DE3374441D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • G03F7/2006—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light using coherent light; using polarised light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Holo Graphy (AREA)
DE8484900469T 1982-12-30 1983-12-28 Method and apparatus for exposing photosensitive material Expired DE3374441D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/454,728 US4496216A (en) 1982-12-30 1982-12-30 Method and apparatus for exposing photosensitive material
PCT/US1983/002032 WO1984002781A1 (en) 1982-12-30 1983-12-28 Method and apparatus for exposing photosensitive material

Publications (1)

Publication Number Publication Date
DE3374441D1 true DE3374441D1 (en) 1987-12-17

Family

ID=23805825

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484900469T Expired DE3374441D1 (en) 1982-12-30 1983-12-28 Method and apparatus for exposing photosensitive material

Country Status (7)

Country Link
US (1) US4496216A (de)
EP (1) EP0130214B1 (de)
JP (1) JPS60500100A (de)
AU (1) AU563318B2 (de)
CA (1) CA1207580A (de)
DE (1) DE3374441D1 (de)
WO (1) WO1984002781A1 (de)

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TWI484307B (zh) * 2012-10-29 2015-05-11 Nat Univ Tsing Hua 以光纖作為空間濾波器與擴束器之雷射干涉微影設備
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JP2015129894A (ja) 2014-01-09 2015-07-16 セイコーエプソン株式会社 マイクロレンズアレイ、マイクロレンズアレイの製造方法、電気光学装置、及び電子機器
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JP6547283B2 (ja) * 2014-12-02 2019-07-24 ウシオ電機株式会社 基板上構造体の製造方法
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DE3125317A1 (de) * 1980-06-27 1982-04-01 Canon K.K., Tokyo Einstellscheibe

Also Published As

Publication number Publication date
AU563318B2 (en) 1987-07-02
CA1207580A (en) 1986-07-15
EP0130214B1 (de) 1987-11-11
JPS60500100A (ja) 1985-01-24
EP0130214A1 (de) 1985-01-09
US4496216A (en) 1985-01-29
AU2432284A (en) 1984-08-02
WO1984002781A1 (en) 1984-07-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee