DE3363034D1 - Gas laser device - Google Patents

Gas laser device

Info

Publication number
DE3363034D1
DE3363034D1 DE8383105336T DE3363034T DE3363034D1 DE 3363034 D1 DE3363034 D1 DE 3363034D1 DE 8383105336 T DE8383105336 T DE 8383105336T DE 3363034 T DE3363034 T DE 3363034T DE 3363034 D1 DE3363034 D1 DE 3363034D1
Authority
DE
Germany
Prior art keywords
laser device
gas laser
gas
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383105336T
Other languages
English (en)
Inventor
Yukio Kawakubo
Hiroyuki Sugawara
Kouji Kuwabara
Toshiharu Shirakura
Satoshi Takemori
Kouji Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE3363034D1 publication Critical patent/DE3363034D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE8383105336T 1982-06-02 1983-05-30 Gas laser device Expired DE3363034D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57093211A JPS58212189A (ja) 1982-06-02 1982-06-02 ガスレ−ザ発生装置

Publications (1)

Publication Number Publication Date
DE3363034D1 true DE3363034D1 (en) 1986-05-22

Family

ID=14076229

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383105336T Expired DE3363034D1 (en) 1982-06-02 1983-05-30 Gas laser device

Country Status (4)

Country Link
US (1) US4590599A (de)
EP (1) EP0095770B1 (de)
JP (1) JPS58212189A (de)
DE (1) DE3363034D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6114776A (ja) * 1984-06-29 1986-01-22 Matsushita Electric Ind Co Ltd ガスレ−ザ発生器
JPS6195588A (ja) * 1984-10-17 1986-05-14 Matsushita Electric Ind Co Ltd ガスレ−ザ発振器
US4710942A (en) * 1986-02-27 1987-12-01 Spectra-Physics, Inc. Variable power gas laser tube
EP0317722A3 (de) * 1987-09-28 1989-07-12 Siemens Aktiengesellschaft Gaslaser-Anordnung mit einer Entladungsröhre
GB2212322A (en) * 1987-11-13 1989-07-19 Ferranti Plc Gas discharge laser apparatus
KR910001160B1 (ko) * 1988-07-13 1991-02-25 한국표준 연구소 보조전극을 사용하여 기체방전 레이저의 출력을 안정화시키는 방법
US10375901B2 (en) 2014-12-09 2019-08-13 Mtd Products Inc Blower/vacuum
CN111585152B (zh) * 2020-04-08 2022-02-08 中国科学院微电子研究所 用于激光器腔室的电极、激光器系统及曝光设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3777279A (en) * 1972-03-30 1973-12-04 United Aircraft Corp Deposition of power in a moving gas stream by electric discharge means
DE2523153A1 (de) * 1975-05-24 1976-12-09 Eltro Gmbh Elektrodensystem
US4166986A (en) * 1977-06-10 1979-09-04 Westinghouse Electric Corp. Ballast technique for laser cathode pins
JPS5839396B2 (ja) * 1978-08-25 1983-08-30 株式会社日立製作所 ガスレ−ザ発生装置
US4255720A (en) * 1978-10-02 1981-03-10 Xerox Corporation Variable diameter segmented hollow cathode laser device
US4342115A (en) * 1980-10-06 1982-07-27 United Technologies Corporation Laser discharge electrode configuration
JPS57188892A (en) * 1981-05-18 1982-11-19 Matsushita Electric Ind Co Ltd Coaxial carbon dioxide laser oscillator

Also Published As

Publication number Publication date
US4590599A (en) 1986-05-20
EP0095770B1 (de) 1986-04-16
JPS58212189A (ja) 1983-12-09
EP0095770A1 (de) 1983-12-07
JPH0373151B2 (de) 1991-11-20

Similar Documents

Publication Publication Date Title
EP0075964A3 (en) Laser device
GB8601392D0 (en) Gas laser device
GB8300821D0 (en) Laser apparatus
DE3379309D1 (en) Gas laser generator
EP0152084A3 (en) Gas laser device
EP0065761A3 (en) Laser device
GB2150742B (en) Gas laser
GB8317009D0 (en) Gas laser
DE3277164D1 (en) Gas laser device
GB2161318B (en) Gas laser device
GB2126412B (en) Gas laser apparatus
DE3363034D1 (en) Gas laser device
DE3271778D1 (en) Gas laser apparatus
GB2125612B (en) Flowing-gas laser
JPS56162888A (en) Circulating gas laser device
IL64884A0 (en) Chemical laser
DE3379322D1 (en) Laser device
EP0057395A3 (en) Gas laser
GB2061606B (en) Gas dircharge laser device
DE3176078D1 (en) Laser device
GB2084392B (en) Laser device
JPS571280A (en) Laser device
DE3277487D1 (en) Improved gas laser
DE3168053D1 (en) Gas laser
DE3269887D1 (en) Gas laser apparatus

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: STREHL, P., DIPL.-ING. DIPL.-WIRTSCH.-ING. SCHUEBEL-HOPF, U., DIPL.-CHEM. DR.RER.NAT., PAT.-ANWAELTE, 8000 MUENCHEN

8339 Ceased/non-payment of the annual fee