DE3327497C2 - - Google Patents
Info
- Publication number
- DE3327497C2 DE3327497C2 DE3327497A DE3327497A DE3327497C2 DE 3327497 C2 DE3327497 C2 DE 3327497C2 DE 3327497 A DE3327497 A DE 3327497A DE 3327497 A DE3327497 A DE 3327497A DE 3327497 C2 DE3327497 C2 DE 3327497C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
- H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57141511A JPS5931549A (ja) | 1982-08-13 | 1982-08-13 | ストロボ走査形電子顕微鏡の像表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3327497A1 DE3327497A1 (de) | 1984-02-16 |
DE3327497C2 true DE3327497C2 (US06312121-20011106-C00033.png) | 1987-03-12 |
Family
ID=15293655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19833327497 Granted DE3327497A1 (de) | 1982-08-13 | 1983-07-29 | Bildwiedergabesystem fuer ein abtast-elektronenmikroskop |
Country Status (3)
Country | Link |
---|---|
US (1) | US4581534A (US06312121-20011106-C00033.png) |
JP (1) | JPS5931549A (US06312121-20011106-C00033.png) |
DE (1) | DE3327497A1 (US06312121-20011106-C00033.png) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3407041A1 (de) * | 1984-02-27 | 1985-09-05 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur automatischen einstellung des arbeitspunktes bei signalverlaufsmessungen mit korpuskularstrahl-messgeraeten |
SE452526B (sv) * | 1984-05-09 | 1987-11-30 | Stiftelsen Inst Mikrovags | Forfarande for att inspektera integrerade kretsar eller andra objekt |
EP0166814B1 (de) * | 1984-05-30 | 1990-07-18 | Siemens Aktiengesellschaft | Verfahren und Vorrichtung zur Detektion und Abbildung eines Messpunkts, der eine Spannung wenigstens einer bestimmten Frequenz führt |
US4864228A (en) * | 1985-03-15 | 1989-09-05 | Fairchild Camera And Instrument Corporation | Electron beam test probe for integrated circuit testing |
EP0226913A3 (de) * | 1985-12-17 | 1988-10-05 | Siemens Aktiengesellschaft | Verfahren und Anordnung zur Lokalisierung und/oder Abbildung der ein bestimmtes zeitabhängiges Signal führenden Punkte einer Probe |
JPS62221955A (ja) * | 1986-03-20 | 1987-09-30 | Mazda Motor Corp | 自動車のリヤワイパ−格納装置 |
DE3617044A1 (de) * | 1986-05-21 | 1987-11-26 | Siemens Ag | Messverarbeitungsanordnung fuer korpuskularstrahlung |
US4902967A (en) * | 1989-05-18 | 1990-02-20 | The United States Of America As Represented By The Secretary Of The Navy | Scanning electron microscopy by photovoltage contrast imaging |
US5210487A (en) * | 1991-06-04 | 1993-05-11 | Schlumberger Technologies Inc. | Double-gated integrating scheme for electron beam tester |
JP2985826B2 (ja) * | 1997-04-09 | 1999-12-06 | 日本電気株式会社 | 位置検出装置および方法 |
US5848118A (en) * | 1997-06-19 | 1998-12-08 | Lear Corporation | Method and apparatus for detecting inhomogeneities in seat assemblies |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2813948A1 (de) * | 1978-03-31 | 1979-10-11 | Siemens Ag | Verfahren zur elektronischen abbildung der potentialverteilung in einem elektronischen bauelement |
JPS5760649A (en) * | 1980-09-26 | 1982-04-12 | Jeol Ltd | Strobe electron microscope |
JPS5760650A (en) * | 1980-09-26 | 1982-04-12 | Jeol Ltd | Strobe electron microscope |
DE3036708A1 (de) * | 1980-09-29 | 1982-05-13 | Siemens AG, 1000 Berlin und 8000 München | Elektronenstrahl-messgeraet zur stroboskopischen messung hochfrequenter periodischer vorgaenge |
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1982
- 1982-08-13 JP JP57141511A patent/JPS5931549A/ja active Granted
-
1983
- 1983-07-27 US US06/517,818 patent/US4581534A/en not_active Expired - Fee Related
- 1983-07-29 DE DE19833327497 patent/DE3327497A1/de active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5931549A (ja) | 1984-02-20 |
US4581534A (en) | 1986-04-08 |
DE3327497A1 (de) | 1984-02-16 |
JPH05814B2 (US06312121-20011106-C00033.png) | 1993-01-06 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8363 | Opposition against the patent | ||
8365 | Fully valid after opposition proceedings | ||
8339 | Ceased/non-payment of the annual fee |