DE3325961C2 - - Google Patents

Info

Publication number
DE3325961C2
DE3325961C2 DE19833325961 DE3325961A DE3325961C2 DE 3325961 C2 DE3325961 C2 DE 3325961C2 DE 19833325961 DE19833325961 DE 19833325961 DE 3325961 A DE3325961 A DE 3325961A DE 3325961 C2 DE3325961 C2 DE 3325961C2
Authority
DE
Germany
Prior art keywords
membrane
layer
back electrode
silicon
capacitive electromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19833325961
Other languages
German (de)
English (en)
Other versions
DE3325961A1 (de
Inventor
Dietmar Hohm
Gerhard M. Prof. Dr.Rer.Nat. 6100 Darmstadt De Sessler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19833325961 priority Critical patent/DE3325961A1/de
Publication of DE3325961A1 publication Critical patent/DE3325961A1/de
Application granted granted Critical
Publication of DE3325961C2 publication Critical patent/DE3325961C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
DE19833325961 1983-07-19 1983-07-19 Kapazitive wandler auf siliziumbasis mit siliziumdioxid-elektret Granted DE3325961A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19833325961 DE3325961A1 (de) 1983-07-19 1983-07-19 Kapazitive wandler auf siliziumbasis mit siliziumdioxid-elektret

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833325961 DE3325961A1 (de) 1983-07-19 1983-07-19 Kapazitive wandler auf siliziumbasis mit siliziumdioxid-elektret

Publications (2)

Publication Number Publication Date
DE3325961A1 DE3325961A1 (de) 1985-01-31
DE3325961C2 true DE3325961C2 (fr) 1993-02-25

Family

ID=6204330

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833325961 Granted DE3325961A1 (de) 1983-07-19 1983-07-19 Kapazitive wandler auf siliziumbasis mit siliziumdioxid-elektret

Country Status (1)

Country Link
DE (1) DE3325961A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578323B1 (fr) * 1985-03-01 1987-11-20 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
DE3807251A1 (de) * 1988-03-05 1989-09-14 Sennheiser Electronic Kapazitiver schallwandler
US6192134B1 (en) * 1997-11-20 2001-02-20 Conexant Systems, Inc. System and method for a monolithic directional microphone array
US6088463A (en) 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
US6522762B1 (en) 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US7142682B2 (en) 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices

Also Published As

Publication number Publication date
DE3325961A1 (de) 1985-01-31

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licenses declared (paragraph 23)
8339 Ceased/non-payment of the annual fee