DE3309122A1 - PROBE HEAD FOR MEASURING DEVICES - Google Patents

PROBE HEAD FOR MEASURING DEVICES

Info

Publication number
DE3309122A1
DE3309122A1 DE3309122A DE3309122A DE3309122A1 DE 3309122 A1 DE3309122 A1 DE 3309122A1 DE 3309122 A DE3309122 A DE 3309122A DE 3309122 A DE3309122 A DE 3309122A DE 3309122 A1 DE3309122 A1 DE 3309122A1
Authority
DE
Germany
Prior art keywords
probe
probe head
sensor
contact element
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE3309122A
Other languages
German (de)
Inventor
Otto Dr. 7238 Oberndorf Klingler
Kurt 7500 Karlsruhe Linder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mauser Werke Oberndorf GmbH
Original Assignee
Mauser Werke Oberndorf GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mauser Werke Oberndorf GmbH filed Critical Mauser Werke Oberndorf GmbH
Priority to DE3309122A priority Critical patent/DE3309122A1/en
Priority to JP59035463A priority patent/JPS59174710A/en
Priority to SE8401140A priority patent/SE8401140L/en
Priority to IT8421138U priority patent/IT8421138V0/en
Priority to IT19923/84A priority patent/IT1175429B/en
Priority to GB08406688A priority patent/GB2136573A/en
Publication of DE3309122A1 publication Critical patent/DE3309122A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Facsimiles In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Facsimile Scanning Arrangements (AREA)

Description

MP 105 Sö/Ηγ. MP 105 Sö / Ηγ.

-I*-I *

MAUSER-WERKE OBERNDORF GMBH, 7238 OberndorfMAUSER-WERKE OBERNDORF GMBH, 7238 Oberndorf

Tastkopf für MeßeinrichtungenProbe head for measuring devices

Die Erfindung betrifft einen Tastkopf für Meßeinrichtungen mit einer in einem Tastkopfgehäuse eingebauten Auslenkmechanik, an die ein außenliegendes Antastelement angeschlossen ist.The invention relates to a probe for measuring devices with a Deflection mechanism built into a probe housing to which an external contact element is connected.

Tastköpfe der vorstehend genannten Art sind allgemein bekannt und werden beispielsweise in Meßeinrichtungen eingesetzt. Solche Meßeinrichtungen können sowohl Meßmaschinen als auch Bearbeitungsmaschinen sein, die mit Meßstationen ausgerüstet sind. Diese allgemein bekannten Tastköpfe u/eisen ein Antastelement auf, das im Inneren des TastkopfgehäusesProbe heads of the type mentioned above are well known and will be used for example in measuring devices. Such measuring devices can be measuring machines as well as processing machines, which are equipped with measuring stations. These well-known probes u / iron a probe element that is inside the probe head housing

ig mit einer Auslenkmechanik und einem Sensor zur Erzeugung eines Meßsignals verbunden ist, um beim Anfahren des Tastkopfes an ein zu messendes Objekt dem Antastelement die Möglichkeit des Auslenkens nach Überwindung einer bestimmten Antastkraft zu geben. Die Tastköpfe der bekannten Art eignen sich gut für nahe am Tastkopf liegende Meßpunkte. Bei entfernt liegenden Meßpunkten, beispielsweise bei Tiefenmessungen, haftet solchen Tastköpfen der Nachteil an, daß nur über ein entsprechend langes Antastelement Messungen durchgeführt werden können. Diese unterschiedlich Jangen Antastelemente rufen jedoch ungleiche Auslenkverhältnisse in der Auslenkmechanik und dem im Tastkopfgehäuse befindlichen Sensor hervor, u/as zu Lasten der Qualität des Meßergebnisses geht. ig is connected to a deflection mechanism and a sensor for generating a measurement signal in order to give the contact element the possibility of deflection after overcoming a certain contact force when the probe head is approached to an object to be measured. The probe heads of the known type are well suited for measuring points located close to the probe head. In the case of remote measuring points, for example in the case of depth measurements, such probes have the disadvantage that measurements can only be carried out over a correspondingly long probe element. However, these different Jangen probing elements cause unequal deflection ratios in the deflection mechanism and the sensor located in the probe head housing, and this is at the expense of the quality of the measurement result.

Um diesen Nachteil auszuschalten, sind auch schon Tastköpfe mit einem langen Antastelement bekannt. Diese Tastköpfe haben wegen ihres großen Außendurchmessers allerdings den Nachteil, daß kleinere Bohrungen mit ihnen nicht ausgemessen werden können.In order to eliminate this disadvantage, probes with a long one are already available Contact element known. These probes have because of their large outer diameter however, the disadvantage that smaller bores cannot be measured with them.

Aufgabe der Erfindung ist es deshalb, einen Tastkopf der eingangs genannten Art zu schaffen, der ohne Qualitätseinbuße des Meßergebnisses für unterschiedlich weit vom Tastkopfgehäuse entfernte Antastungen ein setzbar ist.
5The object of the invention is therefore to provide a probe head of the type mentioned, which can be set for probes at different distances from the probe head housing without any loss of quality of the measurement result.
5

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß in das Antastelement ein Sensor integriert ist, der als getrenntes Bauteil zum Tast kopfgehäuse ausgebildet ist. Dabei kann das mit dem Sensor integrierte Antastelement direkt an das Tastkopfgehäuse angesetzt sein. Er kann in weiterer Ausgestaltung der Erfindung ebenso auch an ein vom Tastkopfge häuse ausgehendes Verlängerungselement angeordnet sein. Ferner kann das Antastelement mit dem Sensor zur Erkennung der Antastrichtung mit mechanischen und/oder elektrischen Einrichtungen versehen sein, die in den drei Koordinatenrichtungen wirksam sind. Diese Einrichtungen zur Erkennung der Antastrichtung können in bevorzugter Ausführung Dehnmeßstreifen sein.According to the invention this object is achieved in that in the contact element a sensor is integrated, which is designed as a separate component to the probe head housing. This can be integrated with the sensor Probe element be attached directly to the probe head housing. He can in Another embodiment of the invention can also be arranged on an extension element extending from the Tastkopfge housing. Furthermore, the contact element with the sensor can be used to detect the direction of contact be provided with mechanical and / or electrical devices that are effective in the three coordinate directions. These bodies In a preferred embodiment, strain gauges can be used to identify the scanning direction.

Ferner kann die Meßkraft einstellbar und unabhängig von der Auslenkmechanik des wahlweise eingesetzten Verlängerungselementes und den Aus lenkkräften sein.Furthermore, the measuring force can be adjusted and independent of the deflection mechanism of the optionally used extension element and the steering forces off.

Der besondere Vorteil der Erfindung liegt in der weglosen Signalerkennung nahe der Antastung, was trotz einer großen zulässigen Auslenkbewegung der Auslenkmechanik möglich ist. Es sind ausgehend vom Tastkopfgehäuse demzufolge beliebige Verlängerungen möglich, ohne daß die Antastverhältnisse verändert werden.The particular advantage of the invention lies in the pathless signal detection close to the contact, which is possible despite a large permissible deflection movement of the deflection mechanism. They are based on the probe head housing consequently, any extensions are possible without changing the contact conditions.

Die Meßkräfte sind bei Anwendung der erfinderischen Lösung nicht mehr von der Auslenkmechanik und den eingesetzten Verlängerungselementen bzw. den Auslenkkräften abhängig, sondern allein durch die einstellbare Empfindlichkeit der Antastsensoren bestimmt.The measuring forces are no longer when the inventive solution is used depends on the deflection mechanism and the extension elements used or the deflection forces, but solely through the adjustable ones Sensitivity of the touch sensors determined.

In der Zeichnung ist ein Beispiel der Erfindung dargestellt. Es zeigen:An example of the invention is shown in the drawing. Show it:

Fig. 1 einen Tastkopf in schematischer Darstellung Fig. 2 eine Kennlinie der Auslenkmechanik mit Arbeitspunkten des Sensors zur Abgabe des Meßsignals. 1 shows a schematic representation of a probe head. FIG. 2 shows a characteristic curve of the deflection mechanism with operating points of the sensor for outputting the measurement signal.

An das Tastkopfgehäuse 1 des erfindungsgemäßen Tastkopfes ist zentral ein Verlängerungselement 2 angesetzt, an dessen stirnseitigem Ende das Antastelement 4 mit dem integrierten Sensor 3 angeordnet ist. Das Antastelement 4 trägt an seinem freien Ende zum Antasten an ein zu messendes Objekt eine Tastkugel 5. Statt der dargestellten Kugel können inThe probe head housing 1 of the probe head according to the invention is central an extension element 2 is attached, at the front end of which the contact element 4 with the integrated sensor 3 is arranged. The contact element 4 carries a probe ball 5 at its free end for probing an object to be measured. Instead of the ball shown, in

ig Anpassung an die zu lösende Meßaufgabe auch andere geometrische Körper gewählt werden. Das Verlängerungselement 2 kann nun beliebig gegen andere Verlängerungsstücke mit unterschiedlicher Länge ausgetauscht werden. Bei nahe am Tastkopfgehäuse 1 liegenden Meßpunkten eines Bauteiles kann das Verlängerungselement 2 beispielsweise auch völlig entfallen.ig adaptation to the measuring task to be solved also other geometrical bodies to get voted. The extension element 2 can now be exchanged for other extension pieces of different lengths. If the measuring points of a component are close to the probe head housing 1, the extension element 2 can, for example, also be completely omitted.

Der vom Tastkopfgehäuse 1 externe Sensor befindet sich in diesem Fall in direkter Anordnung mit dem Antastelement 4 am Tastkopfgehäuse 1.The sensor external to the probe housing 1 is located in this case in direct arrangement with the probe element 4 on the probe head housing 1.

Der Sensor 3 befindet sich in dem Gehäuse des Antastelementes 4, welches in den drei Koordinatenrichtungen mit den Dehnmeßstreifen 6 in on Wirkverbindung steht. Durch die eingesetzten Dehnmeßstreifen ist eine Erkennung der Antastrichtung möglich. Bei Überschreiten einer bestimmten Kraft lenkt das Antastelement 4 infolge der im Tastkopfgehäuse eingesetzten Auslenkmechanik aus.The sensor 3 is located in the housing of the contact element 4, which is in the three coordinate directions with the strain gauges 6 in on operative connection. Due to the strain gauges used, there is a Detection of the probing direction possible. When a certain force is exceeded, the probe element 4 steers as a result of the elements used in the probe head housing Deflection mechanism off.

Die Fig. 2 zeigt die Kennlinie der Auslenkkraft der Auslenkmechanik als Funktion des Auslenkweges. Dabei ist auf der Achse "F" die Auslenkkraft und auf der Achse "S" der Auslenkweg aufgetragen. Die Bereiche A, und A„ bilden den Einstellbereich der Meßkraft, da über diesen Bereich zwischen den Punkten 7 und 8 der starre Bereich ist. Der2 shows the characteristic curve of the deflection force of the deflection mechanism as a function of the deflection path. The deflection force is plotted on the "F" axis and the deflection path is plotted on the "S" axis. The areas A, and A "form the setting range of the measuring force, because over this The area between points 7 and 8 is the rigid area. Of the

•jQ Beginn der oberen Auslenkkraft ist bei 9 und der Beginn der unteren Auslenkkraft bei 10 dargestellt.• jQ start of the upper deflection force is at 9 and the start of the lower one Deflection force shown at 10.

Claims (5)

MP 105 Sö/Ηγ. ■Γ""it!π -■'.· v ·■.<- r -·■■ ■ y PatentansprücheMP 105 Sö / Ηγ. ■ Γ "" it! Π - ■ '. · V · ■. <- r - · ■■ ■ y claims 1. Tastkopf für Meßeinrichtungen mit einer in einem Tastkopfgehäuse eingebauten Auslenkmechanik, an die ein außenliegendes Antastelement angeschlossen ist,1. Probe for measuring devices with one in a probe housing built-in deflection mechanism to which an external contact element is connected, dadurch gekennzeichnet,characterized, daß in das Antastelement (4) ein Sensor (3) integriert ist, der als getrenntes Bauteil zum Tastkopfgehäuse (1) ausgebildet ist.that in the contact element (4) a sensor (3) is integrated, which as is designed as a separate component to the probe head housing (1). 2. Tastkopf nach Anspruch 1,
dadurch gekennzeichnet,2. probe head according to claim 1,
characterized, ^g daß das Antastelement (4) mit Sensor (3) an ein vom Tastkopfgehäuse (1) ausgehendes Verlängerungselement (2) angeordnet ist.^ g that the contact element (4) with sensor (3) to one of the probe head housing (1) outgoing extension element (2) is arranged. 3. Tastkopf nach den Ansprüchen 1 und 2,
dadurch gekennzeichnet,3. Probe according to claims 1 and 2,
characterized, daß das Antastelement (4) mit Sensor (3) zur Erkennung der Antastrichtung mit mechanischen und/oder elektrischen Einrichtungen , (6) versehen ist, die in den drei Koordinatenrichtungen wirksam sinthat the contact element (4) with sensor (3) to detect the contact direction is provided with mechanical and / or electrical devices (6) which are effective in the three coordinate directions 4. Tastkopf nach Anspruch 3,
2Q dadurch gekennzeichnet,4. probe head according to claim 3,
2Q characterized by daß die Einrichtungen zur Erkennung der Antastrichtung Dehnmeßstreifen (6) sind.that the devices for detecting the scanning direction strain gauges (6) are. 5. Tastkopf nach den vorgenannten Ansprüchen,5. Probe according to the preceding claims, dadurch gekennzeichnet, ;characterized, ; daß die Meßkraft (A,, A«) einstellbar und unabhängig von der Aus- , lenkmechanik des u/ahlu/eise eingesetzten Verlängerungselementes (2)' und den Auslenkkräften (F) ist. 'that the measuring force (A ,, A «) is adjustable and independent of the steering mechanism of the extension element used (2) ' and the deflection forces (F). '
DE3309122A 1983-03-15 1983-03-15 PROBE HEAD FOR MEASURING DEVICES Withdrawn DE3309122A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3309122A DE3309122A1 (en) 1983-03-15 1983-03-15 PROBE HEAD FOR MEASURING DEVICES
JP59035463A JPS59174710A (en) 1983-03-15 1984-02-28 Probe for measuring device
SE8401140A SE8401140L (en) 1983-03-15 1984-03-01 METHOD HEAD FOR METAR DEVICES
IT8421138U IT8421138V0 (en) 1983-03-15 1984-03-06 PROBE HEAD FOR MEASURING DEVICES.
IT19923/84A IT1175429B (en) 1983-03-15 1984-03-06 PROBE HEAD FOR MEASURING DEVICES
GB08406688A GB2136573A (en) 1983-03-15 1984-03-14 Measuring head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3309122A DE3309122A1 (en) 1983-03-15 1983-03-15 PROBE HEAD FOR MEASURING DEVICES

Publications (1)

Publication Number Publication Date
DE3309122A1 true DE3309122A1 (en) 1984-09-20

Family

ID=6193452

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3309122A Withdrawn DE3309122A1 (en) 1983-03-15 1983-03-15 PROBE HEAD FOR MEASURING DEVICES

Country Status (5)

Country Link
JP (1) JPS59174710A (en)
DE (1) DE3309122A1 (en)
GB (1) GB2136573A (en)
IT (2) IT1175429B (en)
SE (1) SE8401140L (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3604526A1 (en) * 1986-02-13 1987-08-20 Kurt Kern Gmbh & Co Kg Device for spatially scanning objects
WO1990007097A1 (en) * 1988-12-19 1990-06-28 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US5152072A (en) * 1988-02-18 1992-10-06 Renishaw Plc Surface-sensing device
US5189806A (en) * 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US5212646A (en) * 1987-12-19 1993-05-18 Renishaw Plc Method of using a mounting for surface-sensing stylus
EP0780660A2 (en) 1995-12-21 1997-06-25 Carl Zeiss Probe system for coordinate measuring machines
DE19941899B4 (en) * 1998-09-02 2009-07-30 Mitutoyo Corp., Kawasaki Surface scanning measuring machine

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3728578A1 (en) * 1987-08-27 1989-03-09 Zeiss Carl Fa KEY SYSTEM FOR COORDINATE MEASURING DEVICES
GB8803847D0 (en) * 1988-02-18 1988-03-16 Renishaw Plc Mounting for surface-sensing device
GB8812579D0 (en) * 1988-05-27 1988-06-29 Renishaw Plc Test bar for position determination apparatus
US4958438A (en) * 1989-03-30 1990-09-25 The Warner & Swasey Company Rotary table for a coordinate measuring machine and method of determining the axis of table rotation
GB8920447D0 (en) * 1989-09-09 1989-10-25 Renishaw Plc Method and apparatus of datuming a coordinate positioning machine
EP0471371B1 (en) * 1990-08-17 1995-04-12 Kabushiki Kaisha Toshiba Displacement-measuring apparatus

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DE1295199B (en) * 1963-03-01 1969-05-14 Portage Machine Company Measuring machine for checking the dimensional accuracy of workpieces
DE1573731A1 (en) * 1966-08-29 1970-05-21 Nii Osnowanij I Podsemnych Soo Measuring device for determining deformations in solid rock
DE1804253A1 (en) * 1968-10-21 1970-06-25 Wolfram Pahl Two-coordinate dial indicator
DE2242355B1 (en) * 1972-08-29 1974-03-07 Fa. Carl Zeiss, 7920 Heidenheim Electronic multi-coordinate probe
DE2841424B2 (en) * 1977-09-27 1980-07-03 Meseltron S.A., Corcelles, Neuenburg (Schweiz)
FR2468875A1 (en) * 1979-11-05 1981-05-08 Vilnjussky Ex RESONANCE PIEZOELECTRIC TOUCH SENSOR

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1295199B (en) * 1963-03-01 1969-05-14 Portage Machine Company Measuring machine for checking the dimensional accuracy of workpieces
DE1573731A1 (en) * 1966-08-29 1970-05-21 Nii Osnowanij I Podsemnych Soo Measuring device for determining deformations in solid rock
DE1804253A1 (en) * 1968-10-21 1970-06-25 Wolfram Pahl Two-coordinate dial indicator
DE2242355B1 (en) * 1972-08-29 1974-03-07 Fa. Carl Zeiss, 7920 Heidenheim Electronic multi-coordinate probe
DE2841424B2 (en) * 1977-09-27 1980-07-03 Meseltron S.A., Corcelles, Neuenburg (Schweiz)
FR2468875A1 (en) * 1979-11-05 1981-05-08 Vilnjussky Ex RESONANCE PIEZOELECTRIC TOUCH SENSOR

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3604526A1 (en) * 1986-02-13 1987-08-20 Kurt Kern Gmbh & Co Kg Device for spatially scanning objects
US5212646A (en) * 1987-12-19 1993-05-18 Renishaw Plc Method of using a mounting for surface-sensing stylus
US5152072A (en) * 1988-02-18 1992-10-06 Renishaw Plc Surface-sensing device
WO1990007097A1 (en) * 1988-12-19 1990-06-28 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US5189806A (en) * 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
EP0780660A2 (en) 1995-12-21 1997-06-25 Carl Zeiss Probe system for coordinate measuring machines
DE19941899B4 (en) * 1998-09-02 2009-07-30 Mitutoyo Corp., Kawasaki Surface scanning measuring machine

Also Published As

Publication number Publication date
IT1175429B (en) 1987-07-01
SE8401140D0 (en) 1984-03-01
GB8406688D0 (en) 1984-04-18
SE8401140L (en) 1984-09-16
JPS59174710A (en) 1984-10-03
IT8419923A0 (en) 1984-03-06
GB2136573A (en) 1984-09-19
IT8421138V0 (en) 1984-03-06

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