DE3280051D1 - Einschrittabstandszentrierungsvorrichtung. - Google Patents
Einschrittabstandszentrierungsvorrichtung.Info
- Publication number
- DE3280051D1 DE3280051D1 DE8282903543T DE3280051T DE3280051D1 DE 3280051 D1 DE3280051 D1 DE 3280051D1 DE 8282903543 T DE8282903543 T DE 8282903543T DE 3280051 T DE3280051 T DE 3280051T DE 3280051 D1 DE3280051 D1 DE 3280051D1
- Authority
- DE
- Germany
- Prior art keywords
- centering device
- distance centering
- distance
- centering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
- B23P19/10—Aligning parts to be fitted together
- B23P19/102—Aligning parts to be fitted together using remote centre compliance devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
- B25J17/0208—Compliance devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B5/25—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Manipulator (AREA)
- Springs (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/312,513 US4414750A (en) | 1981-10-19 | 1981-10-19 | Single stage remote center compliance device |
PCT/US1982/001479 WO1983001504A1 (en) | 1981-10-19 | 1982-10-15 | Single stage remote center compliance device |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3280051D1 true DE3280051D1 (de) | 1990-01-11 |
Family
ID=23211795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8282903543T Expired - Fee Related DE3280051D1 (de) | 1981-10-19 | 1982-10-15 | Einschrittabstandszentrierungsvorrichtung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4414750A (de) |
EP (1) | EP0091487B1 (de) |
JP (1) | JPS58501736A (de) |
CA (1) | CA1181259A (de) |
DE (1) | DE3280051D1 (de) |
WO (1) | WO1983001504A1 (de) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3378279D1 (en) * | 1982-03-05 | 1988-11-24 | Sony Magnescale Inc | Apparatus for determining the location of the surface of a solid object |
US4537557A (en) * | 1982-04-23 | 1985-08-27 | The Charles Stark Draper Laboratory, Inc. | Remote center compliance gripper system |
FR2564363A1 (fr) * | 1984-05-17 | 1985-11-22 | Sormel Sa | Organe d'extremite pour robot d'assemblage destine a l'insertion automatique de pieces dans des trous |
EP0198134B1 (de) * | 1985-04-17 | 1989-06-28 | International Business Machines Corporation | Bewegliches System mit mehreren Freiheitsgraden |
US4627169A (en) * | 1986-01-27 | 1986-12-09 | Westinghouse Electric Corp. | Remote center compliance device |
DE3614365A1 (de) * | 1986-04-28 | 1987-10-29 | Messerschmitt Boelkow Blohm | Vorrichtung zum ablegen eines vorimpraegnierten faserbandes |
US5068975A (en) * | 1986-12-15 | 1991-12-03 | Gte Valenite | Precision parallel mechanical float |
US4803786A (en) * | 1986-12-15 | 1989-02-14 | Gte Valeron Corporation | Precision parallel mechanical float |
US4897930A (en) * | 1986-12-15 | 1990-02-06 | Gte Valenite Corporation | Precision parallel mechanical float |
US5113593A (en) * | 1986-12-15 | 1992-05-19 | Gte Valenite Corporation | Precision parallel mechanical float |
DE3710381A1 (de) * | 1987-03-28 | 1988-10-13 | Fein C & E | Haltevorrichtung zur beweglichen lagerung einer aufnahme, insbesondere einer werkzeugaufnahme fuer industrieroboter |
US4848757A (en) * | 1988-01-25 | 1989-07-18 | The Charles Stark Draper Laboratory, Inc. | Remote center compliance device with fully or partially coil-bound springs |
JPH01141644U (de) * | 1988-03-17 | 1989-09-28 | ||
US4919586A (en) * | 1988-05-25 | 1990-04-24 | Grasp, Inc. | Mechanical closed loop robotic arm end effector positioning system |
US4945979A (en) * | 1988-06-23 | 1990-08-07 | Westinghouse Electric Corp. | Robotic arm for delivering a tube plugging tool |
FR2639573A1 (fr) * | 1988-11-30 | 1990-06-01 | Snecma | Support souple dispose entre un porte-outil et un bras mobile de robot |
US4995148A (en) * | 1990-03-30 | 1991-02-26 | Imta | Robotically controlled multi-task end effector |
DE69532144D1 (de) | 1994-04-28 | 2003-12-18 | Jimmie Jay Dallman | Schlegelmäher für Buschmäher |
US6334960B1 (en) | 1999-03-11 | 2002-01-01 | Board Of Regents, The University Of Texas System | Step and flash imprint lithography |
US6873087B1 (en) | 1999-10-29 | 2005-03-29 | Board Of Regents, The University Of Texas System | High precision orientation alignment and gap control stages for imprint lithography processes |
US6408531B1 (en) | 2000-01-20 | 2002-06-25 | Mechsys, L.L.C. | Method and apparatus for assembling rigid parts |
KR100374783B1 (ko) * | 2000-03-03 | 2003-03-04 | 학교법인 포항공과대학교 | 순응 중심 가변형 원격 순응 중심 장치 |
US6921615B2 (en) | 2000-07-16 | 2005-07-26 | Board Of Regents, The University Of Texas System | High-resolution overlay alignment methods for imprint lithography |
WO2002006902A2 (en) | 2000-07-17 | 2002-01-24 | Board Of Regents, The University Of Texas System | Method and system of automatic fluid dispensing for imprint lithography processes |
US6954275B2 (en) | 2000-08-01 | 2005-10-11 | Boards Of Regents, The University Of Texas System | Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography |
US8016277B2 (en) | 2000-08-21 | 2011-09-13 | Board Of Regents, The University Of Texas System | Flexure based macro motion translation stage |
KR101031528B1 (ko) | 2000-10-12 | 2011-04-27 | 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 | 실온 저압 마이크로- 및 나노- 임프린트 리소그래피용템플릿 |
US6964793B2 (en) | 2002-05-16 | 2005-11-15 | Board Of Regents, The University Of Texas System | Method for fabricating nanoscale patterns in light curable compositions using an electric field |
KR100470347B1 (ko) * | 2001-07-16 | 2005-02-07 | 주상완 | 압입용 탄성중심기기 |
US7077992B2 (en) | 2002-07-11 | 2006-07-18 | Molecular Imprints, Inc. | Step and repeat imprint lithography processes |
US6932934B2 (en) * | 2002-07-11 | 2005-08-23 | Molecular Imprints, Inc. | Formation of discontinuous films during an imprint lithography process |
US6916584B2 (en) | 2002-08-01 | 2005-07-12 | Molecular Imprints, Inc. | Alignment methods for imprint lithography |
US7071088B2 (en) | 2002-08-23 | 2006-07-04 | Molecular Imprints, Inc. | Method for fabricating bulbous-shaped vias |
US8349241B2 (en) | 2002-10-04 | 2013-01-08 | Molecular Imprints, Inc. | Method to arrange features on a substrate to replicate features having minimal dimensional variability |
DE10348887A1 (de) * | 2002-10-23 | 2004-05-13 | Carl Zeiss | Tastkopf für ein Koordinatenmessgerät |
US6929762B2 (en) | 2002-11-13 | 2005-08-16 | Molecular Imprints, Inc. | Method of reducing pattern distortions during imprint lithography processes |
US6871558B2 (en) | 2002-12-12 | 2005-03-29 | Molecular Imprints, Inc. | Method for determining characteristics of substrate employing fluid geometries |
US7452574B2 (en) | 2003-02-27 | 2008-11-18 | Molecular Imprints, Inc. | Method to reduce adhesion between a polymerizable layer and a substrate employing a fluorine-containing layer |
US7122079B2 (en) | 2004-02-27 | 2006-10-17 | Molecular Imprints, Inc. | Composition for an etching mask comprising a silicon-containing material |
US7157036B2 (en) | 2003-06-17 | 2007-01-02 | Molecular Imprints, Inc | Method to reduce adhesion between a conformable region and a pattern of a mold |
US7136150B2 (en) | 2003-09-25 | 2006-11-14 | Molecular Imprints, Inc. | Imprint lithography template having opaque alignment marks |
US8076386B2 (en) | 2004-02-23 | 2011-12-13 | Molecular Imprints, Inc. | Materials for imprint lithography |
US7906180B2 (en) * | 2004-02-27 | 2011-03-15 | Molecular Imprints, Inc. | Composition for an etching mask comprising a silicon-containing material |
ATE506141T1 (de) * | 2006-06-16 | 2011-05-15 | Sang-Wan Joo | Fernzentralenkonforme vorrichtung mit messsensor |
US7421799B2 (en) * | 2006-06-22 | 2008-09-09 | Sang-Wan Joo | Remote center compliance device with one elastic body |
TWI404612B (zh) * | 2010-11-12 | 2013-08-11 | Ind Tech Res Inst | 順應性位置補正裝置 |
KR101440952B1 (ko) * | 2013-06-28 | 2014-09-17 | 주식회사 싸이텍 | 자동 조심형 압입 유니트 |
CN107511649B (zh) * | 2016-06-15 | 2019-04-05 | 上海交通大学 | 气动型可调远中心柔顺装置 |
EP3670067B1 (de) * | 2018-12-20 | 2022-07-27 | Etel S.A. | Positioniereinrichtung in portalbauweise |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB553793A (en) * | 1941-11-29 | 1943-06-07 | Metalastik Ltd | Improvements relating to resilient mountings for instruments and machines |
US3367609A (en) * | 1966-07-01 | 1968-02-06 | Gen Electric | Hermetic compressor unit and spring support means thereof |
US4098001A (en) * | 1976-10-13 | 1978-07-04 | The Charles Stark Draper Laboratory, Inc. | Remote center compliance system |
US4155169A (en) * | 1978-03-16 | 1979-05-22 | The Charles Stark Draper Laboratory, Inc. | Compliant assembly system device |
US4202107A (en) * | 1978-10-23 | 1980-05-13 | Watson Paul C | Remote axis admittance system |
US4283153A (en) * | 1978-12-21 | 1981-08-11 | Cincinnati Milacron Inc. | Compliant apparatus with remote smeared centers |
US4337579A (en) * | 1980-04-16 | 1982-07-06 | The Charles Stark Draper Laboratory, Inc. | Deformable remote center compliance device |
US4276697A (en) * | 1980-04-21 | 1981-07-07 | Astek Engineering, Inc. | Compliance element for remote center compliance unit |
US4355469A (en) * | 1980-11-28 | 1982-10-26 | The Charles Stark Draper Laboratory, Inc. | Folded remote center compliance device |
US4440031A (en) * | 1981-07-31 | 1984-04-03 | The Charles Stark Draper Laboratory | Force detecting system for remote center compliance device |
-
1981
- 1981-10-19 US US06/312,513 patent/US4414750A/en not_active Expired - Lifetime
-
1982
- 1982-10-15 WO PCT/US1982/001479 patent/WO1983001504A1/en active IP Right Grant
- 1982-10-15 EP EP82903543A patent/EP0091487B1/de not_active Expired
- 1982-10-15 JP JP57503460A patent/JPS58501736A/ja active Granted
- 1982-10-15 DE DE8282903543T patent/DE3280051D1/de not_active Expired - Fee Related
- 1982-10-19 CA CA000413699A patent/CA1181259A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0091487B1 (de) | 1989-12-06 |
US4414750A (en) | 1983-11-15 |
JPS58501736A (ja) | 1983-10-13 |
EP0091487A4 (de) | 1986-04-02 |
CA1181259A (en) | 1985-01-22 |
WO1983001504A1 (en) | 1983-04-28 |
EP0091487A1 (de) | 1983-10-19 |
JPS633241B2 (de) | 1988-01-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |