DE3276553D1 - Silicon-glass-silicon capacitive pressure transducer - Google Patents

Silicon-glass-silicon capacitive pressure transducer

Info

Publication number
DE3276553D1
DE3276553D1 DE8282903396T DE3276553T DE3276553D1 DE 3276553 D1 DE3276553 D1 DE 3276553D1 DE 8282903396 T DE8282903396 T DE 8282903396T DE 3276553 T DE3276553 T DE 3276553T DE 3276553 D1 DE3276553 D1 DE 3276553D1
Authority
DE
Germany
Prior art keywords
silicon
glass
pressure transducer
capacitive pressure
silicon capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282903396T
Other languages
English (en)
Inventor
James L Swindal
Daniel H Grantham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Breed Automotive Technology Inc
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Application granted granted Critical
Publication of DE3276553D1 publication Critical patent/DE3276553D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE8282903396T 1981-10-13 1982-09-30 Silicon-glass-silicon capacitive pressure transducer Expired DE3276553D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/310,598 US4405970A (en) 1981-10-13 1981-10-13 Silicon-glass-silicon capacitive pressure transducer
PCT/US1982/001406 WO1983001536A1 (en) 1981-10-13 1982-09-30 Silicon-glass-silicon capacitive pressure transducer

Publications (1)

Publication Number Publication Date
DE3276553D1 true DE3276553D1 (en) 1987-07-16

Family

ID=23203256

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282903396T Expired DE3276553D1 (en) 1981-10-13 1982-09-30 Silicon-glass-silicon capacitive pressure transducer

Country Status (12)

Country Link
US (1) US4405970A (de)
EP (1) EP0090845B1 (de)
JP (1) JPS58501697A (de)
AU (1) AU560246B2 (de)
BR (1) BR8207904A (de)
CA (1) CA1185454A (de)
DE (1) DE3276553D1 (de)
DK (1) DK247283A (de)
GR (1) GR76713B (de)
IE (1) IE53532B1 (de)
IT (1) IT1153238B (de)
WO (1) WO1983001536A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855732A (ja) * 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
US4527428A (en) * 1982-12-30 1985-07-09 Hitachi, Ltd. Semiconductor pressure transducer
US4513348A (en) * 1984-01-13 1985-04-23 United Technologies Corporation Low parasitic capacitance pressure transducer and etch stop method
US4530029A (en) * 1984-03-12 1985-07-16 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
FI842307A (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
US4743836A (en) * 1985-12-06 1988-05-10 United Technologies Corporation Capacitive circuit for measuring a parameter having a linear output voltage
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
JP2570420B2 (ja) * 1988-06-23 1997-01-08 富士電機株式会社 静電容量式圧力検出器
US4951174A (en) * 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
US4998179A (en) * 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
US5245504A (en) * 1989-02-28 1993-09-14 United Technologies Corporation Methodology for manufacturing hinged diaphragms for semiconductor sensors
US5009690A (en) * 1990-03-09 1991-04-23 The United States Of America As Represented By The United States Department Of Energy Method of bonding single crystal quartz by field-assisted bonding
US5155061A (en) * 1991-06-03 1992-10-13 Allied-Signal Inc. Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures
FR2701564B1 (fr) * 1993-02-12 1995-05-19 Suisse Electronique Microtech Capteur de mesure de pression absolue de type capacitif et procédé de fabrication d'une pluralité de tels capteurs.
US5440931A (en) * 1993-10-25 1995-08-15 United Technologies Corporation Reference element for high accuracy silicon capacitive pressure sensor
US5444901A (en) * 1993-10-25 1995-08-29 United Technologies Corporation Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
US5375034A (en) * 1993-12-02 1994-12-20 United Technologies Corporation Silicon capacitive pressure sensor having a glass dielectric deposited using ion milling
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer
US5381299A (en) * 1994-01-28 1995-01-10 United Technologies Corporation Capacitive pressure sensor having a substrate with a curved mesa
US5578843A (en) * 1994-10-06 1996-11-26 Kavlico Corporation Semiconductor sensor with a fusion bonded flexible structure
US5535626A (en) * 1994-12-21 1996-07-16 Breed Technologies, Inc. Sensor having direct-mounted sensing element
US5600072A (en) * 1995-06-23 1997-02-04 Motorola, Inc. Capacitive pressure sensor and method for making the same
US5966617A (en) * 1996-09-20 1999-10-12 Kavlico Corporation Multiple local oxidation for surface micromachining
US6324914B1 (en) 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US6058780A (en) * 1997-03-20 2000-05-09 Alliedsignal Inc. Capacitive pressure sensor housing having a ceramic base
US6678927B1 (en) * 1997-11-24 2004-01-20 Avx Corporation Miniature surface mount capacitor and method of making same
US6387318B1 (en) 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
JP3771425B2 (ja) 2000-07-04 2006-04-26 株式会社山武 容量式圧力センサおよびその製造方法
WO2002008712A1 (de) * 2000-07-26 2002-01-31 Endress + Hauser Gmbh + Co. Kg Kapazitiver drucksensor
US7028551B2 (en) * 2004-06-18 2006-04-18 Kavlico Corporation Linearity semi-conductive pressure sensor
US7683444B2 (en) * 2005-09-30 2010-03-23 The United States Of America As Represented By The Secretary Of The Navy Metamaterial structure has resonant and strip line elements comprising a photoconductive semiconductor material formed on substrate to induce negative permeability and negative permittivity in operating frequency range
US7345867B2 (en) 2005-11-18 2008-03-18 Alps Electric Co., Ltd Capacitive pressure sensor and method of manufacturing the same
US9837935B2 (en) 2013-10-29 2017-12-05 Honeywell International Inc. All-silicon electrode capacitive transducer on a glass substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3634727A (en) * 1968-12-03 1972-01-11 Bendix Corp Capacitance-type pressure transducer
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
US4287553A (en) * 1980-06-06 1981-09-01 The Bendix Corporation Capacitive pressure transducer

Also Published As

Publication number Publication date
DK247283D0 (da) 1983-06-01
EP0090845A4 (de) 1984-11-22
GR76713B (de) 1984-08-29
EP0090845B1 (de) 1987-06-10
WO1983001536A1 (en) 1983-04-28
US4405970A (en) 1983-09-20
AU1163083A (en) 1984-08-23
DK247283A (da) 1983-06-01
JPS58501697A (ja) 1983-10-06
AU560246B2 (en) 1987-04-02
IE53532B1 (en) 1988-12-07
BR8207904A (pt) 1983-09-13
CA1185454A (en) 1985-04-16
IT8223728A0 (it) 1982-10-13
EP0090845A1 (de) 1983-10-12
IE822453L (en) 1983-04-13
IT1153238B (it) 1987-01-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BREED AUTOMOTIVE TECHNOLOGY, INC., LAKELAND, FLA.,

8328 Change in the person/name/address of the agent

Free format text: HENKEL, FEILER & HAENZEL, 81675 MUENCHEN