DE3166692D1 - Capacitive pressure transducer - Google Patents

Capacitive pressure transducer

Info

Publication number
DE3166692D1
DE3166692D1 DE8181400874T DE3166692T DE3166692D1 DE 3166692 D1 DE3166692 D1 DE 3166692D1 DE 8181400874 T DE8181400874 T DE 8181400874T DE 3166692 T DE3166692 T DE 3166692T DE 3166692 D1 DE3166692 D1 DE 3166692D1
Authority
DE
Germany
Prior art keywords
pressure transducer
capacitive pressure
capacitive
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181400874T
Other languages
English (en)
Inventor
Peter E Braunlich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bendix Corp filed Critical Bendix Corp
Application granted granted Critical
Publication of DE3166692D1 publication Critical patent/DE3166692D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE8181400874T 1980-06-06 1981-05-29 Capacitive pressure transducer Expired DE3166692D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/156,970 US4287553A (en) 1980-06-06 1980-06-06 Capacitive pressure transducer

Publications (1)

Publication Number Publication Date
DE3166692D1 true DE3166692D1 (en) 1984-11-22

Family

ID=22561831

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181400874T Expired DE3166692D1 (en) 1980-06-06 1981-05-29 Capacitive pressure transducer

Country Status (5)

Country Link
US (1) US4287553A (de)
EP (1) EP0041886B1 (de)
JP (1) JPS5726727A (de)
CA (1) CA1144387A (de)
DE (1) DE3166692D1 (de)

Families Citing this family (62)

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US4340409A (en) * 1979-04-16 1982-07-20 The Bendix Corporation Method of fabricating a pressure sensor
US4417294A (en) * 1981-08-28 1983-11-22 Illinois Tool Works Inc. Capacitive keyswitch
DE3137219A1 (de) * 1981-09-18 1983-04-07 Robert Bosch Gmbh, 7000 Stuttgart Kapazitiver drucksensor und verfahren zu seiner herstellung
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
US4530029A (en) * 1984-03-12 1985-07-16 United Technologies Corporation Capacitive pressure sensor with low parasitic capacitance
JPH0652212B2 (ja) * 1986-12-12 1994-07-06 富士電機株式会社 静電容量式圧力センサにおけるギヤツプ形成方法
FI872049A (fi) * 1987-05-08 1988-11-09 Vaisala Oy Kondensatorkonstruktion foer anvaendning vid tryckgivare.
US4806783A (en) * 1988-02-25 1989-02-21 Transducer Technologies Inc. Transducer circuit
DE3811047A1 (de) * 1988-03-31 1989-10-12 Draegerwerk Ag Fuehler zur kapazitiven messung des druckes in gasen
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
EP0516579B1 (de) * 1991-05-26 1994-06-22 Endress + Hauser Gmbh + Co. Durchkontaktierung eines Isolierstoffteils
US5317922A (en) * 1992-04-30 1994-06-07 Ford Motor Company Capacitance transducer article and method of fabrication
US5448444A (en) * 1994-01-28 1995-09-05 United Technologies Corporation Capacitive pressure sensor having a reduced area dielectric spacer
EP0862051A4 (de) * 1996-09-19 1999-12-08 Hokuriku Elect Ind Kapazitiver druckwandler
AT406557B (de) * 1997-02-28 2000-06-26 Machner & Saurer Gmbh Verfahren zur herstellung von metallkörpern mit innerer porosität
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US6520020B1 (en) * 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US20110301569A1 (en) 2001-01-20 2011-12-08 Gordon Wayne Dyer Methods and apparatus for the CVCS
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
DE10132269B4 (de) * 2001-07-04 2008-05-29 Endress + Hauser Gmbh + Co. Kg Drucksensor
US6839546B2 (en) 2002-04-22 2005-01-04 Rosemount Inc. Process transmitter with wireless communication link
US7100453B2 (en) * 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
US7114397B2 (en) * 2004-03-12 2006-10-03 General Electric Company Microelectromechanical system pressure sensor and method for making and using
US8145180B2 (en) 2004-05-21 2012-03-27 Rosemount Inc. Power generation for process devices
US8160535B2 (en) 2004-06-28 2012-04-17 Rosemount Inc. RF adapter for field device
US7262693B2 (en) * 2004-06-28 2007-08-28 Rosemount Inc. Process field device with radio frequency communication
US7546772B2 (en) * 2004-12-30 2009-06-16 Honeywell International Inc. Piezoresistive pressure sensor
US7680460B2 (en) * 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
WO2007002769A1 (en) 2005-06-27 2007-01-04 Rosemount Inc. Field device with dynamically adjustable power consumption radio frequency communication
US7379792B2 (en) * 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
EP1795869A1 (de) 2005-12-09 2007-06-13 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Vorrichtung zur Deformationsbestimmung in einem Rollenlager
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
EP2786701B1 (de) * 2006-08-29 2015-12-23 California Institute of Technology Mikrofabrizierter implantierbarer Funkdrucksensor zur Verwendung in Biomedizinischen Anwendungen sowie Druckmessungs- und Sensorenimplantationsverfahren
US20080202251A1 (en) * 2007-02-27 2008-08-28 Iee International Electronics & Engineering S.A. Capacitive pressure sensor
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
JP5255698B2 (ja) 2008-06-17 2013-08-07 ローズマウント インコーポレイテッド 電圧降下が可変のフィールド機器用無線アダプタ
CN102084307B (zh) 2008-06-17 2014-10-29 罗斯蒙特公司 用于具有低压本质安全钳的现场设备的rf适配器
US8929948B2 (en) 2008-06-17 2015-01-06 Rosemount Inc. Wireless communication adapter for field devices
US8694060B2 (en) 2008-06-17 2014-04-08 Rosemount Inc. Form factor and electromagnetic interference protection for process device wireless adapters
JP5232299B2 (ja) 2008-06-17 2013-07-10 ローズマウント インコーポレイテッド ループ電流バイパスを備えるフィールド機器のためのｒｆアダプター
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
US7870791B2 (en) * 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US8626087B2 (en) 2009-06-16 2014-01-07 Rosemount Inc. Wire harness for field devices used in a hazardous locations
US9674976B2 (en) 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
US8096186B2 (en) * 2010-03-24 2012-01-17 Carefusion 303, Inc. Systems and methods for measuring fluid pressure within a disposable IV set connected to a fluid supply pump
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
US9310794B2 (en) 2011-10-27 2016-04-12 Rosemount Inc. Power supply for industrial process field device
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9048901B2 (en) 2013-03-15 2015-06-02 Rosemount Inc. Wireless interface within transmitter
DE102013114741A1 (de) * 2013-12-20 2015-06-25 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014101700A1 (de) 2014-02-12 2015-08-13 Vega Grieshaber Kg Druckmesszelle
GB2528855A (en) * 2014-07-31 2016-02-10 Touchnetix Ltd Displacement sensing apparatus and methods
US20210000383A1 (en) * 2018-04-10 2021-01-07 King Abdullah University Of Science And Technology Capacitive sensor
US11346698B2 (en) * 2019-06-21 2022-05-31 Sporian Microsystems, Inc. Compact pressure and flow sensors for very high temperature and corrosive fluids

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
GB1563894A (en) * 1976-03-12 1980-04-02 Kavlico Corp Capacitive pressure transducer and method for making same
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
US4225632A (en) * 1977-11-11 1980-09-30 Motorola, Inc. Fabrication of capacitive transducers
US4184189A (en) * 1978-08-14 1980-01-15 Motorola, Inc. Capacitive pressure sensor and method of making it
CA1137781A (en) * 1979-04-16 1982-12-21 Mark A. Brooks Pressure sensor

Also Published As

Publication number Publication date
US4287553A (en) 1981-09-01
JPS5726727A (en) 1982-02-12
JPH021253B2 (de) 1990-01-10
CA1144387A (en) 1983-04-12
EP0041886B1 (de) 1984-10-17
EP0041886A1 (de) 1981-12-16

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee