DE3150848C2 - - Google Patents
Info
- Publication number
- DE3150848C2 DE3150848C2 DE3150848A DE3150848A DE3150848C2 DE 3150848 C2 DE3150848 C2 DE 3150848C2 DE 3150848 A DE3150848 A DE 3150848A DE 3150848 A DE3150848 A DE 3150848A DE 3150848 C2 DE3150848 C2 DE 3150848C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18551880A JPS57128433A (en) | 1980-12-27 | 1980-12-27 | High luminance electron gun |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE3150848A1 DE3150848A1 (de) | 1982-08-19 |
| DE3150848C2 true DE3150848C2 (US20040232935A1-20041125-M00002.png) | 1987-03-05 |
| DE3150848C3 DE3150848C3 (de) | 1994-12-22 |
Family
ID=16172185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3150848A Expired - Fee Related DE3150848C3 (de) | 1980-12-27 | 1981-12-22 | Elektronenstrahlerzeugungssystem für hohe Helligkeit |
Country Status (4)
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0309767A1 (de) * | 1987-09-28 | 1989-04-05 | Siemens Aktiengesellschaft | Strahlerzeugendes System für Elektronenstrahlmessgeräte |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3887891T2 (de) * | 1988-11-01 | 1994-08-11 | Ibm | Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel. |
| US5633507A (en) * | 1995-09-19 | 1997-05-27 | International Business Machines Corporation | Electron beam lithography system with low brightness |
| JP4052731B2 (ja) * | 1998-06-18 | 2008-02-27 | 株式会社アドバンテスト | 電子銃 |
| US6252339B1 (en) | 1998-09-17 | 2001-06-26 | Nikon Corporation | Removable bombardment filament-module for electron beam projection systems |
| JP2009146884A (ja) * | 2007-11-22 | 2009-07-02 | Mamoru Nakasuji | 電子銃及び電子線装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148B2 (ja) * | 1972-08-22 | 1983-01-05 | 日本電子株式会社 | デンシジユウ |
| US4055780A (en) * | 1975-04-10 | 1977-10-25 | National Institute For Researches In Inorganic Materials | Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride |
| JPS5277661A (en) * | 1975-12-24 | 1977-06-30 | Jeol Ltd | Electron gun |
| US4054946A (en) * | 1976-09-28 | 1977-10-18 | Bell Telephone Laboratories, Incorporated | Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane |
| JPS55131946A (en) * | 1979-03-31 | 1980-10-14 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron gun |
-
1980
- 1980-12-27 JP JP18551880A patent/JPS57128433A/ja active Pending
-
1981
- 1981-12-11 GB GB8137445A patent/GB2090698B/en not_active Expired
- 1981-12-22 DE DE3150848A patent/DE3150848C3/de not_active Expired - Fee Related
-
1985
- 1985-04-22 US US06/724,948 patent/US4591754A/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0309767A1 (de) * | 1987-09-28 | 1989-04-05 | Siemens Aktiengesellschaft | Strahlerzeugendes System für Elektronenstrahlmessgeräte |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2090698B (en) | 1984-08-30 |
| DE3150848C3 (de) | 1994-12-22 |
| JPS57128433A (en) | 1982-08-10 |
| DE3150848A1 (de) | 1982-08-19 |
| US4591754A (en) | 1986-05-27 |
| GB2090698A (en) | 1982-07-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8125 | Change of the main classification |
Ipc: H01J 37/063 |
|
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8366 | Restricted maintained after opposition proceedings | ||
| 8305 | Restricted maintenance of patent after opposition | ||
| D4 | Patent maintained restricted | ||
| 8339 | Ceased/non-payment of the annual fee |