DE3139781A1 - Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases - Google Patents
Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gasesInfo
- Publication number
- DE3139781A1 DE3139781A1 DE19813139781 DE3139781A DE3139781A1 DE 3139781 A1 DE3139781 A1 DE 3139781A1 DE 19813139781 DE19813139781 DE 19813139781 DE 3139781 A DE3139781 A DE 3139781A DE 3139781 A1 DE3139781 A1 DE 3139781A1
- Authority
- DE
- Germany
- Prior art keywords
- filter
- container
- gas
- pollutants
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0423—Beds in columns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
- B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
- B01D2259/40096—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating by using electrical resistance heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/402—Further details for adsorption processes and devices using two beds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0446—Means for feeding or distributing gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813139781 DE3139781A1 (de) | 1981-10-07 | 1981-10-07 | Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases |
FI823293A FI823293L (fi) | 1981-10-07 | 1982-09-24 | Foerfarande och anordning foer rening av en aongformade skadematerial innehaollande gas |
SE8205567A SE8205567L (sv) | 1981-10-07 | 1982-09-29 | Forfarande och anordning for rening av en gas innehallande skadliga emnen iangform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813139781 DE3139781A1 (de) | 1981-10-07 | 1981-10-07 | Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3139781A1 true DE3139781A1 (de) | 1983-04-21 |
Family
ID=6143546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19813139781 Ceased DE3139781A1 (de) | 1981-10-07 | 1981-10-07 | Verfahren und vorrichtung zur reinigung eines dampffoermige schadstoffe enthaltenden gases |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE3139781A1 (sv) |
FI (1) | FI823293L (sv) |
SE (1) | SE8205567L (sv) |
Cited By (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3713346A1 (de) * | 1987-04-21 | 1988-11-03 | Herbert Seus | Verfahren und vorrichtung zur reinigung industrieller abluft |
DE3821523A1 (de) * | 1988-06-25 | 1989-12-28 | Rombach Gmbh Johann B | Vorrichtung zur kontinuierlichen abtrennung und wiedergewinnung eines loesungsmittels aus loesungsmittelhaltiger abluft |
DE4010482A1 (de) * | 1990-03-31 | 1990-12-20 | Dieter Schweikert | Vermeidung von nebel- und aerosolbildung bei messgasaufbereitungsanlagen |
EP0462607A1 (en) * | 1990-06-21 | 1991-12-27 | MULTIMAX S.r.l. | Device for recovering solvents in dry-cleaning machines |
US5110328A (en) * | 1989-06-07 | 1992-05-05 | Kabushiki Kaisha Kobe Seiko Sho | Solvent adsorber and solvent recovery system |
US5268022A (en) * | 1991-03-07 | 1993-12-07 | The Boc Group Plc | Gas separation method and apparatus |
EP0617995A1 (en) * | 1993-03-30 | 1994-10-05 | SODIBO S.p.A. | Activated-carbon solvent treatment unit for dry-cleaning machines with increased absorption |
US5518528A (en) * | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
US5676735A (en) * | 1996-10-31 | 1997-10-14 | Advanced Technology Materials, Inc. | Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas |
US5704967A (en) * | 1995-10-13 | 1998-01-06 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
US5707424A (en) * | 1994-10-13 | 1998-01-13 | Advanced Technology Materials, Inc. | Process system with integrated gas storage and delivery unit |
US5851270A (en) * | 1997-05-20 | 1998-12-22 | Advanced Technology Materials, Inc. | Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means |
US5916245A (en) * | 1996-05-20 | 1999-06-29 | Advanced Technology Materials, Inc. | High capacity gas storage and dispensing system |
US5980608A (en) * | 1998-01-07 | 1999-11-09 | Advanced Technology Materials, Inc. | Throughflow gas storage and dispensing system |
US5985008A (en) * | 1997-05-20 | 1999-11-16 | Advanced Technology Materials, Inc. | Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium |
US6019823A (en) * | 1997-05-16 | 2000-02-01 | Advanced Technology Materials, Inc. | Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members |
US6027547A (en) * | 1997-05-16 | 2000-02-22 | Advanced Technology Materials, Inc. | Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium |
US6070576A (en) * | 1998-06-02 | 2000-06-06 | Advanced Technology Materials, Inc. | Adsorbent-based storage and dispensing system |
US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
US6132492A (en) * | 1994-10-13 | 2000-10-17 | Advanced Technology Materials, Inc. | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
US6204180B1 (en) | 1997-05-16 | 2001-03-20 | Advanced Technology Materials, Inc. | Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery |
US6406519B1 (en) * | 1998-03-27 | 2002-06-18 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
FR2818919A1 (fr) * | 2001-01-04 | 2002-07-05 | Jean Charles Weber | Procede et dispositif pour le traitement et la recuperation integres des effluents gazeuse polluants |
US6660063B2 (en) | 1998-03-27 | 2003-12-09 | Advanced Technology Materials, Inc | Sorbent-based gas storage and delivery system |
US6991671B2 (en) | 2002-12-09 | 2006-01-31 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
US7857880B2 (en) | 2002-10-31 | 2010-12-28 | Advanced Technology Materials, Inc. | Semiconductor manufacturing facility utilizing exhaust recirculation |
US8002880B2 (en) | 2002-12-10 | 2011-08-23 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
US9126139B2 (en) | 2012-05-29 | 2015-09-08 | Entegris, Inc. | Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent |
-
1981
- 1981-10-07 DE DE19813139781 patent/DE3139781A1/de not_active Ceased
-
1982
- 1982-09-24 FI FI823293A patent/FI823293L/fi not_active Application Discontinuation
- 1982-09-29 SE SE8205567A patent/SE8205567L/sv not_active Application Discontinuation
Cited By (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3713346A1 (de) * | 1987-04-21 | 1988-11-03 | Herbert Seus | Verfahren und vorrichtung zur reinigung industrieller abluft |
DE3821523A1 (de) * | 1988-06-25 | 1989-12-28 | Rombach Gmbh Johann B | Vorrichtung zur kontinuierlichen abtrennung und wiedergewinnung eines loesungsmittels aus loesungsmittelhaltiger abluft |
EP0350677A1 (de) * | 1988-06-25 | 1990-01-17 | Johann Baptist Rombach GmbH & Co KG | Vorrichtung zur kontinuierlichen Abtrennung und Wiedergewinnung eines Lösungsmittels aus lösungsmittelhaltiger Abluft |
US5110328A (en) * | 1989-06-07 | 1992-05-05 | Kabushiki Kaisha Kobe Seiko Sho | Solvent adsorber and solvent recovery system |
DE4010482A1 (de) * | 1990-03-31 | 1990-12-20 | Dieter Schweikert | Vermeidung von nebel- und aerosolbildung bei messgasaufbereitungsanlagen |
EP0462607A1 (en) * | 1990-06-21 | 1991-12-27 | MULTIMAX S.r.l. | Device for recovering solvents in dry-cleaning machines |
US5268022A (en) * | 1991-03-07 | 1993-12-07 | The Boc Group Plc | Gas separation method and apparatus |
EP0617995A1 (en) * | 1993-03-30 | 1994-10-05 | SODIBO S.p.A. | Activated-carbon solvent treatment unit for dry-cleaning machines with increased absorption |
US5518528A (en) * | 1994-10-13 | 1996-05-21 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds |
US6132492A (en) * | 1994-10-13 | 2000-10-17 | Advanced Technology Materials, Inc. | Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same |
US5704965A (en) * | 1994-10-13 | 1998-01-06 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing carbon sorbent medium |
US5935305A (en) * | 1994-10-13 | 1999-08-10 | Advanced Technology Materials, Inc. | Storage and delivery system for gaseous compounds |
US5707424A (en) * | 1994-10-13 | 1998-01-13 | Advanced Technology Materials, Inc. | Process system with integrated gas storage and delivery unit |
US6125131A (en) * | 1994-10-13 | 2000-09-26 | Advanced Technology Materials, Inc. | Laser system utilizing sorbent-based gas storage and delivery system |
US6083298A (en) * | 1994-10-13 | 2000-07-04 | Advanced Technology Materials, Inc. | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment |
US5704967A (en) * | 1995-10-13 | 1998-01-06 | Advanced Technology Materials, Inc. | Fluid storage and delivery system comprising high work capacity physical sorbent |
US5916245A (en) * | 1996-05-20 | 1999-06-29 | Advanced Technology Materials, Inc. | High capacity gas storage and dispensing system |
US5676735A (en) * | 1996-10-31 | 1997-10-14 | Advanced Technology Materials, Inc. | Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas |
US6204180B1 (en) | 1997-05-16 | 2001-03-20 | Advanced Technology Materials, Inc. | Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery |
US6019823A (en) * | 1997-05-16 | 2000-02-01 | Advanced Technology Materials, Inc. | Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members |
US6027547A (en) * | 1997-05-16 | 2000-02-22 | Advanced Technology Materials, Inc. | Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium |
US5985008A (en) * | 1997-05-20 | 1999-11-16 | Advanced Technology Materials, Inc. | Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium |
US5851270A (en) * | 1997-05-20 | 1998-12-22 | Advanced Technology Materials, Inc. | Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means |
US5980608A (en) * | 1998-01-07 | 1999-11-09 | Advanced Technology Materials, Inc. | Throughflow gas storage and dispensing system |
US6660063B2 (en) | 1998-03-27 | 2003-12-09 | Advanced Technology Materials, Inc | Sorbent-based gas storage and delivery system |
US6540819B2 (en) * | 1998-03-27 | 2003-04-01 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
US6406519B1 (en) * | 1998-03-27 | 2002-06-18 | Advanced Technology Materials, Inc. | Gas cabinet assembly comprising sorbent-based gas storage and delivery system |
US6070576A (en) * | 1998-06-02 | 2000-06-06 | Advanced Technology Materials, Inc. | Adsorbent-based storage and dispensing system |
FR2818919A1 (fr) * | 2001-01-04 | 2002-07-05 | Jean Charles Weber | Procede et dispositif pour le traitement et la recuperation integres des effluents gazeuse polluants |
WO2002053266A2 (fr) * | 2001-01-04 | 2002-07-11 | Jean-Charles Weber | Dispositif et procede pour le traitement d'effluents gazeux |
WO2002053266A3 (fr) * | 2001-01-04 | 2002-08-22 | Jean-Charles Weber | Dispositif et procede pour le traitement d'effluents gazeux |
US7857880B2 (en) | 2002-10-31 | 2010-12-28 | Advanced Technology Materials, Inc. | Semiconductor manufacturing facility utilizing exhaust recirculation |
US9062829B2 (en) | 2002-12-09 | 2015-06-23 | Entegris, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
US7501010B2 (en) | 2002-12-09 | 2009-03-10 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispending vessel |
US7972421B2 (en) | 2002-12-09 | 2011-07-05 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
US9636626B2 (en) | 2002-12-09 | 2017-05-02 | Entegris, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
US6991671B2 (en) | 2002-12-09 | 2006-01-31 | Advanced Technology Materials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
US8506689B2 (en) | 2002-12-09 | 2013-08-13 | Advanced Technology Mateials, Inc. | Rectangular parallelepiped fluid storage and dispensing vessel |
US8858685B2 (en) | 2002-12-10 | 2014-10-14 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
US8282714B2 (en) | 2002-12-10 | 2012-10-09 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
US9518701B2 (en) | 2002-12-10 | 2016-12-13 | Entegris, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
US8002880B2 (en) | 2002-12-10 | 2011-08-23 | Advanced Technology Materials, Inc. | Gas storage and dispensing system with monolithic carbon adsorbent |
US8679231B2 (en) | 2011-01-19 | 2014-03-25 | Advanced Technology Materials, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
US9234628B2 (en) | 2011-01-19 | 2016-01-12 | Entegris, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
US9468901B2 (en) | 2011-01-19 | 2016-10-18 | Entegris, Inc. | PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same |
US9126139B2 (en) | 2012-05-29 | 2015-09-08 | Entegris, Inc. | Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent |
Also Published As
Publication number | Publication date |
---|---|
FI823293A0 (fi) | 1982-09-24 |
SE8205567D0 (sv) | 1982-09-30 |
SE8205567L (sv) | 1983-04-08 |
FI823293L (fi) | 1983-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
8128 | New person/name/address of the agent |
Representative=s name: POPP, E., DIPL.-ING.DIPL.-WIRTSCH.-ING.DR.RER.POL. |
|
8131 | Rejection |