DE3105909A1 - Messroehre fuer ein gluehkatoden-ionisationsmanometer - Google Patents

Messroehre fuer ein gluehkatoden-ionisationsmanometer

Info

Publication number
DE3105909A1
DE3105909A1 DE19813105909 DE3105909A DE3105909A1 DE 3105909 A1 DE3105909 A1 DE 3105909A1 DE 19813105909 DE19813105909 DE 19813105909 DE 3105909 A DE3105909 A DE 3105909A DE 3105909 A1 DE3105909 A1 DE 3105909A1
Authority
DE
Germany
Prior art keywords
grid
ion
electrode
ion collector
cathodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19813105909
Other languages
German (de)
English (en)
Inventor
Christian Dr.rer.nat. Dr. DDR 9200 Freiberg Edelmann
Peter Dr.rer.nat. Dr. DDR 8122 Radebeul Engelmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
Original Assignee
Hochvakuum Dresden VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden VEB filed Critical Hochvakuum Dresden VEB
Publication of DE3105909A1 publication Critical patent/DE3105909A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/30Vacuum gauges by making use of ionisation effects
    • G01L21/32Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Securing Of Glass Panes Or The Like (AREA)
DE19813105909 1980-03-27 1981-02-18 Messroehre fuer ein gluehkatoden-ionisationsmanometer Withdrawn DE3105909A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD21996080A DD157987A3 (de) 1980-03-27 1980-03-27 Messroehre fuer ein gluehkatoden-ionisationsmanometer

Publications (1)

Publication Number Publication Date
DE3105909A1 true DE3105909A1 (de) 1982-05-13

Family

ID=5523357

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813105909 Withdrawn DE3105909A1 (de) 1980-03-27 1981-02-18 Messroehre fuer ein gluehkatoden-ionisationsmanometer

Country Status (3)

Country Link
CS (1) CS231577B1 (cs)
DD (1) DD157987A3 (cs)
DE (1) DE3105909A1 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19855522A1 (de) * 1998-12-02 2000-06-29 Univ Magdeburg Tech Vakuum-Meßverfahren und Vakuum-Meßeinrichtung
DE10134912A1 (de) * 2001-07-18 2003-02-06 Mu Sen Mikrosystemtechnik Gmbh Ionisationsmanometer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19855522A1 (de) * 1998-12-02 2000-06-29 Univ Magdeburg Tech Vakuum-Meßverfahren und Vakuum-Meßeinrichtung
DE19855522C2 (de) * 1998-12-02 2001-11-08 Univ Magdeburg Tech Vakuum-Meßverfahren und Vakuum-Meßeinrichtung
DE10134912A1 (de) * 2001-07-18 2003-02-06 Mu Sen Mikrosystemtechnik Gmbh Ionisationsmanometer

Also Published As

Publication number Publication date
CS87481A1 (en) 1984-04-16
DD157987A3 (de) 1982-12-22
CS231577B1 (en) 1984-12-14

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee