DE3067625D1 - Electron beam system - Google Patents

Electron beam system

Info

Publication number
DE3067625D1
DE3067625D1 DE8080901880T DE3067625T DE3067625D1 DE 3067625 D1 DE3067625 D1 DE 3067625D1 DE 8080901880 T DE8080901880 T DE 8080901880T DE 3067625 T DE3067625 T DE 3067625T DE 3067625 D1 DE3067625 D1 DE 3067625D1
Authority
DE
Germany
Prior art keywords
electron beam
beam system
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8080901880T
Other languages
German (de)
English (en)
Inventor
Reeds, Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE3067625D1 publication Critical patent/DE3067625D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE8080901880T 1979-09-13 1980-09-11 Electron beam system Expired DE3067625D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/075,354 US4263514A (en) 1979-09-13 1979-09-13 Electron beam system
PCT/US1980/001173 WO1981000784A1 (en) 1979-09-13 1980-09-11 Electron beam system

Publications (1)

Publication Number Publication Date
DE3067625D1 true DE3067625D1 (en) 1984-05-30

Family

ID=22125151

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8080901880T Expired DE3067625D1 (en) 1979-09-13 1980-09-11 Electron beam system

Country Status (5)

Country Link
US (1) US4263514A (enExample)
EP (1) EP0035556B1 (enExample)
JP (1) JPS56501228A (enExample)
DE (1) DE3067625D1 (enExample)
WO (1) WO1981000784A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138896A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptisches system mit vario-formstrahl zur erzeugung und messung von mikrostrukturen
US4550258A (en) * 1982-07-27 1985-10-29 Nippon Telegraph & Telephone Public Corporation Aperture structure for charged beam exposure
US4687940A (en) * 1986-03-20 1987-08-18 Hughes Aircraft Company Hybrid focused-flood ion beam system and method
JP3263920B2 (ja) * 1996-02-01 2002-03-11 日本電子株式会社 電子顕微鏡用試料作成装置および方法
WO2006076036A2 (en) * 2004-05-25 2006-07-20 The Trustees Of The University Of Pennsylvania Nanostructure assemblies, methods and devices thereof
GB2421630B (en) * 2004-12-21 2006-11-29 Leica Microsys Lithography Ltd Dual-mode electron beam column
US8236061B2 (en) 2008-06-30 2012-08-07 Depuy Products, Inc. Orthopaedic knee prosthesis having controlled condylar curvature
US8828086B2 (en) 2008-06-30 2014-09-09 Depuy (Ireland) Orthopaedic femoral component having controlled condylar curvature
KR20220123476A (ko) * 2017-08-02 2022-09-06 에이에스엠엘 네델란즈 비.브이. 전압 대비 결함 신호를 향상시키는 하전 입자 플러딩을 위한 시스템 및 방법
US12165838B2 (en) * 2018-12-14 2024-12-10 Kla Corporation Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspections

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944743B2 (ja) * 1974-04-16 1984-10-31 日本電子株式会社 走査電子顕微鏡等用照射電子レンズ系
US3956635A (en) * 1975-06-13 1976-05-11 International Business Machines Corporation Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams
US4013891A (en) * 1975-12-15 1977-03-22 Ibm Corporation Method for varying the diameter of a beam of charged particles
DE2719800C3 (de) * 1977-04-28 1980-10-23 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahloptisches Gerät zur Projektion einer Maske auf ein Präparat mit einer Einrichtung zur Justierung der Maske relativ zum Präparat und Verfahren zur Justierung
GB1605087A (en) * 1977-05-31 1981-12-16 Rikagaku Kenkyusho Method for shaping a beam of electrically charged particles
US4158140A (en) * 1977-06-15 1979-06-12 Tokyo Shibaura Electric Co., Ltd. Electron beam exposure apparatus
US4167676A (en) * 1978-02-21 1979-09-11 Bell Telephone Laboratories, Incorporated Variable-spot scanning in an electron beam exposure system

Also Published As

Publication number Publication date
EP0035556B1 (en) 1984-04-25
JPS56501228A (enExample) 1981-08-27
EP0035556A4 (en) 1982-01-26
US4263514A (en) 1981-04-21
EP0035556A1 (en) 1981-09-16
WO1981000784A1 (en) 1981-03-19

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee