DE3030454C2 - - Google Patents
Info
- Publication number
- DE3030454C2 DE3030454C2 DE19803030454 DE3030454A DE3030454C2 DE 3030454 C2 DE3030454 C2 DE 3030454C2 DE 19803030454 DE19803030454 DE 19803030454 DE 3030454 A DE3030454 A DE 3030454A DE 3030454 C2 DE3030454 C2 DE 3030454C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD21595179A DD146307A1 (de) | 1979-10-02 | 1979-10-02 | Einrichtung zur grossflaechigen haftfesten abscheidung,insbesondere von kohlenstoffschichten |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3030454A1 DE3030454A1 (de) | 1981-04-16 |
DE3030454C2 true DE3030454C2 (US07655688-20100202-C00086.png) | 1987-04-02 |
Family
ID=5520396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19803030454 Granted DE3030454A1 (de) | 1979-10-02 | 1980-08-12 | Einrichtung zur grossflaechigen abscheidung von haftfesten, insbesondere harten kohlenstoffschichten |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5941509B2 (US07655688-20100202-C00086.png) |
CH (1) | CH653708A5 (US07655688-20100202-C00086.png) |
DD (1) | DD146307A1 (US07655688-20100202-C00086.png) |
DE (1) | DE3030454A1 (US07655688-20100202-C00086.png) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4504519A (en) * | 1981-10-21 | 1985-03-12 | Rca Corporation | Diamond-like film and process for producing same |
DE3246361A1 (de) * | 1982-02-27 | 1983-09-08 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Kohlenstoff enthaltende gleitschicht |
US6804791B2 (en) | 1990-03-23 | 2004-10-12 | Matsushita Electric Industrial Co., Ltd. | Data processing apparatus |
JPH0560537U (ja) * | 1992-01-22 | 1993-08-10 | 弘 小川 | 厨房用塵芥処理装置 |
JP4080503B2 (ja) | 2005-10-03 | 2008-04-23 | 中部日本マルコ株式会社 | 非接触コネクタ |
-
1979
- 1979-10-02 DD DD21595179A patent/DD146307A1/de not_active IP Right Cessation
-
1980
- 1980-08-12 DE DE19803030454 patent/DE3030454A1/de active Granted
- 1980-10-02 CH CH737480A patent/CH653708A5/de not_active IP Right Cessation
- 1980-10-02 JP JP13680180A patent/JPS5941509B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS56102576A (en) | 1981-08-17 |
DE3030454A1 (de) | 1981-04-16 |
JPS5941509B2 (ja) | 1984-10-08 |
DD146307A1 (de) | 1981-02-04 |
CH653708A5 (en) | 1986-01-15 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |