DE3000451C2 - - Google Patents

Info

Publication number
DE3000451C2
DE3000451C2 DE3000451A DE3000451A DE3000451C2 DE 3000451 C2 DE3000451 C2 DE 3000451C2 DE 3000451 A DE3000451 A DE 3000451A DE 3000451 A DE3000451 A DE 3000451A DE 3000451 C2 DE3000451 C2 DE 3000451C2
Authority
DE
Germany
Prior art keywords
electrode
substrates
substrate surfaces
shielding elements
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3000451A
Other languages
German (de)
English (en)
Other versions
DE3000451A1 (de
Inventor
Rainer Dr. Sargans Ch Buhl
Hans Oberschaan Ch Signer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Hochvakuum 6200 Wiesbaden De GmbH
Original Assignee
Balzers Hochvakuum 6200 Wiesbaden De GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum 6200 Wiesbaden De GmbH filed Critical Balzers Hochvakuum 6200 Wiesbaden De GmbH
Publication of DE3000451A1 publication Critical patent/DE3000451A1/de
Application granted granted Critical
Publication of DE3000451C2 publication Critical patent/DE3000451C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE19803000451 1979-02-01 1980-01-08 Vakuumbedampfungsanlage Granted DE3000451A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH118279A CH636647A5 (de) 1979-02-01 1979-02-01 Vakuumbedampfungsanlage.

Publications (2)

Publication Number Publication Date
DE3000451A1 DE3000451A1 (de) 1980-08-14
DE3000451C2 true DE3000451C2 (US20110105765A1-20110505-C00013.png) 1987-09-24

Family

ID=4204413

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803000451 Granted DE3000451A1 (de) 1979-02-01 1980-01-08 Vakuumbedampfungsanlage

Country Status (5)

Country Link
US (1) US4279216A (US20110105765A1-20110505-C00013.png)
CH (1) CH636647A5 (US20110105765A1-20110505-C00013.png)
DE (1) DE3000451A1 (US20110105765A1-20110505-C00013.png)
FR (1) FR2448223B1 (US20110105765A1-20110505-C00013.png)
GB (1) GB2040317B (US20110105765A1-20110505-C00013.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10215040A1 (de) * 2002-04-05 2003-11-13 Leybold Optics Gmbh Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57149734A (en) * 1981-03-12 1982-09-16 Anelva Corp Plasma applying working device
US4362611A (en) * 1981-07-27 1982-12-07 International Business Machines Corporation Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield
DE3248121A1 (de) * 1982-12-24 1984-06-28 Leybold-Heraeus GmbH, 5000 Köln Hochleistungs-katodenanordnung fuer die erzeugung von mehrfachschichten
US4511593A (en) * 1983-01-17 1985-04-16 Multi-Arc Vacuum Systems Inc. Vapor deposition apparatus and method
DE3331707A1 (de) * 1983-09-02 1985-03-21 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum reaktiven aufstaeuben von verbindungen von metallen und halbleitern
US4623441A (en) * 1984-08-15 1986-11-18 Advanced Plasma Systems Inc. Paired electrodes for plasma chambers
US5003178A (en) * 1988-11-14 1991-03-26 Electron Vision Corporation Large-area uniform electron source

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3437734A (en) * 1966-06-21 1969-04-08 Isofilm Intern Apparatus and method for effecting the restructuring of materials
US3507248A (en) * 1967-06-15 1970-04-21 Ibm Vacuum evaporation coating apparatus including means for precleaning substrates by ion bombardment
US3900585A (en) * 1972-02-12 1975-08-19 Agency Ind Science Techn Method for control of ionization electrostatic plating
FR2265872B1 (US20110105765A1-20110505-C00013.png) * 1974-03-27 1977-10-14 Anvar
JPS5435920B2 (US20110105765A1-20110505-C00013.png) * 1974-06-10 1979-11-06
US4038171A (en) * 1976-03-31 1977-07-26 Battelle Memorial Institute Supported plasma sputtering apparatus for high deposition rate over large area

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10215040A1 (de) * 2002-04-05 2003-11-13 Leybold Optics Gmbh Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer
DE10215040B4 (de) * 2002-04-05 2019-02-21 Leybold Optics Gmbh Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer

Also Published As

Publication number Publication date
GB2040317B (en) 1982-11-17
FR2448223B1 (US20110105765A1-20110505-C00013.png) 1983-11-25
FR2448223A1 (US20110105765A1-20110505-C00013.png) 1980-08-29
CH636647A5 (de) 1983-06-15
GB2040317A (en) 1980-08-28
US4279216A (en) 1981-07-21
DE3000451A1 (de) 1980-08-14

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee