DE29814972U1 - Near-field optical probe and near-field optical microscope - Google Patents

Near-field optical probe and near-field optical microscope

Info

Publication number
DE29814972U1
DE29814972U1 DE29814972U DE29814972U DE29814972U1 DE 29814972 U1 DE29814972 U1 DE 29814972U1 DE 29814972 U DE29814972 U DE 29814972U DE 29814972 U DE29814972 U DE 29814972U DE 29814972 U1 DE29814972 U1 DE 29814972U1
Authority
DE
Germany
Prior art keywords
optical
microscope
field
probe
optical microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29814972U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Witec Wissenschaftliche Instrumente und Technologie GmbH
Original Assignee
Witec Wissenschaftliche Instrumente und Technologie GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Witec Wissenschaftliche Instrumente und Technologie GmbH filed Critical Witec Wissenschaftliche Instrumente und Technologie GmbH
Priority to DE29814972U priority Critical patent/DE29814972U1/en
Priority to DE19902235A priority patent/DE19902235B4/en
Publication of DE29814972U1 publication Critical patent/DE29814972U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (25)

1. Nahfeldoptische Sonde zur Abbildung eines Gegenstandes bzw. einer Probe mit
  • 1. 1.1 einem Sondengehäuse (3);
  • 2. 1.2 einer Nahfeldspitze (5) zur Emission von Licht durch eine optische Apertur, die viel kleiner als die zur Abbildung verwendete Lichtwellenlänge ist; dadurch gekennzeichnet, daß
  • 3. 1.3 die Nahfeldspitze (5) in dem Sondengehäuse (3) angeordnet ist und
  • 4. 1.4 das Sondengehäuse (3) derart ausgestaltet ist, daß es anstelle eines herkömmlichen Objektives an einem Mikroskop befestigt werden kann.
1. Near-field optical probe for imaging an object or a sample with
  • 1. 1.1 a probe housing ( 3 );
  • 2. 1.2 a near-field tip ( 5 ) for emitting light through an optical aperture that is much smaller than the light wavelength used for imaging; characterized in that
  • 3. 1.3 the near field tip ( 5 ) is arranged in the probe housing ( 3 ) and
  • 4. 1.4 the probe housing ( 3 ) is designed such that it can be attached to a microscope instead of a conventional objective.
2. Nahfeldoptische Sonde gemäß Anspruch 1, dadurch gekennzeichnet, daß das Sondengehäuse im wesentlichen die Abmessungen eines Mikroskopobjektives aufweist.2. Near-field optical probe according to claim 1, characterized in that that the probe housing is essentially the dimensions of a Has microscope objectives. 3. Nahfeldoptische Sonde gemäß einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß das Sondengehäuse Befestigungsmittel zur Befestigung desselben im Einschraubgewinde (30) eines Mikroskopobjektives aufweist.3. Near-field optical probe according to one of claims 1 or 2, characterized in that the probe housing has fastening means for fastening the same in the screw thread ( 30 ) of a microscope objective. 4. Nahfeldoptische Sonde gemäß einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Sonde Mittel zum Justieren der Nahfeldspitze im Sondengehäuse aufweist.4. Near-field optical probe according to one of claims 1 to 3, characterized characterized in that the probe means for adjusting the near field tip has in the probe housing. 5. Nahfeldoptische Sonde gemäß Anspruch 4, dadurch gekennzeichnet, daß die Nahfeldspitze im Meßbetrieb örtlich feststehend im Sondengehäuse angeordnet ist. 5. Near-field optical probe according to claim 4, characterized in that the near-field peak is locally fixed in the measuring mode Probe housing is arranged.   6. Nahfeldoptische Sonde gemäß einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß die Nahfeldspitze von einer Metallkanüle (40) aufgenommen und die Metallkanüle mittels Klemmung in einem Halteblock (7) gehalten wird.6. Near-field optical probe according to one of claims 1 to 5, characterized in that the near-field tip is received by a metal cannula ( 40 ) and the metal cannula is held by means of clamping in a holding block ( 7 ). 7. Optische Nahfeldspitze nach Anspruch 6, dadurch gekennzeichnet, daß der Halteblock von einem Kohlefaserelement gehalten wird.7. Optical near-field tip according to claim 6, characterized in that the holding block is held by a carbon fiber element. 8. Optisches Mikroskop mit8. Optical microscope with 8.1 Mitteln zum Halten einer Probe;8.1 means for holding a sample; 8.2 mindestens einer Halterung für mindestens ein Mikroskopobjektiv;8.2 at least one holder for at least one microscope objective; 8.3 mindestens einer nahfeldoptischen Sonde; dadurch gekennzeichnet, daß8.3 at least one near-field optical probe; characterized in that 8.4 die nahfeldoptische Sonde derart ausgestaltet ist, daß sie anstelle eines herkömmlichen Objektives in der mindestens einen Mikroskopobjektivhalterung befestigt werden kann.8.4 the near-field optical probe is designed such that it instead of a conventional lenses in the at least one Microscope lens holder can be attached. 9. Optisches Mikroskop gemäß Anspruch 8, dadurch gekennzeichnet, daß die nahfeldoptische Sonde eine Sonde gemäß einem der Ansprüche 1 bis 7 ist.9. Optical microscope according to claim 8, characterized in that the near-field optical probe is a probe according to one of claims 1 to 7. 10. Optisches Mikroskop gemäß Anspruch 9, dadurch gekennzeichnet, daß die Nahfeldspitze im Sondengehäuse justierbar und im Meßbetrieb örtlich feststehend angeordnet ist.10. Optical microscope according to claim 9, characterized in that the near-field tip in the probe housing is adjustable and in measuring mode is arranged locally fixed. 11. Optisches Mikroskop gemäß einem der Ansprüche 8 bis 10, dadurch gekennzeichnet, daß das optische Mikroskop des weiteren Mittel zur konfokalen Mikroskopie umfaßt.11. Optical microscope according to one of claims 8 to 10, characterized characterized in that the optical microscope further means for confocal microscopy. 12. Optisches Mikroskop gemäß einem der Ansprüche 8 bis 10, dadurch gekennzeichnet, daß das optische Mikroskop des weiteren Mittel zur Laser-Scanning-Mikroskopie umfaßt. 12. Optical microscope according to one of claims 8 to 10, characterized characterized in that the optical microscope further means for Includes laser scanning microscopy.   13. Optisches Mikroskop gemäß einem der Ansprüche 8 bis 12, dadurch gekennzeichnet, daß das optische Mikroskop einen Mikroskoprevolver als Mikroskopobjektivhalter umfaßt.13. Optical microscope according to one of claims 8 to 12, characterized characterized in that the optical microscope is a microscope turret includes as a microscope lens holder. 14. Optisches Mikroskop gemäß Anspruch 13, dadurch gekennzeichnet, daß der Mikroskoprevolver noch weitere Mikroskope für konventionelle Mikroskopie aufnimmt und die nahfeldoptische Sonde im Mikroskoprevolver derart angeordnet ist, daß die Nahfeldspitze parafokal zu den weiteren Objektiven ist.14. Optical microscope according to claim 13, characterized in that that the microscope turret still other microscopes for conventional Microscopy and the near-field optical probe in the Microscope turret is arranged such that the near field tip is parafocal to the other lenses. 15. Optisches Mikroskop gemäß einem der Ansprüche 8 bis 14, dadurch gekennzeichnet, daß das Mikroskop des weiteren Mittel zur Kraftmikroskopie umfaßt.15. Optical microscope according to one of claims 8 to 14, characterized characterized in that the microscope further means for Includes force microscopy. 16. Optisches Mikroskop gemäß einem der Ansprüche 8 bis 15, dadurch gekennzeichnet, daß die Mittel zum Halten der Probe einen Scantisch umfassen, mit dem eine darauf angeordnete Probe in allen drei Raumrichtungen relativ zur Nahfeldspitze verschoben werden kann.16. Optical microscope according to one of claims 8 to 15, characterized characterized in that the means for holding the sample include a scanning table with which a sample placed thereon in all three Spatial directions can be shifted relative to the near field tip. 17. Optisches Mikroskop gemäß Anspruch 16, dadurch gekennzeichnet, daß der Scantisch einen Scanbereich in XY-Richtung von wenigstens 1 µm und eine Ortsauflösung von wenigstens 0,1 µm aufweist.17. Optical microscope according to claim 16, characterized in that that the scanning table has a scanning area in the XY direction of at least 1 µm and has a spatial resolution of at least 0.1 µm. 18. Optisches Mikroskop gemäß Anspruch 16 oder 17, dadurch gekennzeichnet, daß der Scantisch einen Scanbereich in Z-Richtung von wenigstens 0,1 µm und eine Ortsauflösung von wenigstens 0,01 µm aufweist.18. Optical microscope according to claim 16 or 17, characterized characterized in that the scanning table has a scanning area in the Z direction of at least 0.1 µm and a spatial resolution of at least 0.01 µm. 19. Optisches Mikroskop gemäß einem der Ansprüche 8 bis 18, dadurch gekennzeichnet, daß die Scangeschwindigkeit wenigstens 0,1 Zeile/s beträgt. 19. Optical microscope according to one of claims 8 to 18, characterized characterized in that the scanning speed is at least 0.1 line / s is.   20. Optisches Mikroskop gemäß einem der Ansprüche 16 bis 19, dadurch gekennzeichnet, daß das Detektionsmikroskop zur Detektion des durch die Probe transmittierten Lichtes Mittel zur Anzeige der Absolutposition (mit einer Auflösung von wenigstens 1 µm) umfaßt.20. Optical microscope according to one of claims 16 to 19, characterized characterized in that the detection microscope for detecting the light transmitted through the sample means for displaying the Absolute position (with a resolution of at least 1 µm). 21. Optisches Mikroskop gemäß einem der Ansprüche 16 bis 20, dadurch gekennzeichnet, daß das Nahfeldmikroskop eine Speichereinheit zum Abspeichern einer Nullposition des Scantisches umfaßt.21. Optical microscope according to one of claims 16 to 20, characterized characterized in that the near-field microscope is a storage unit for Storage of a zero position of the scanning table includes.
DE29814972U 1998-08-21 1998-08-21 Near-field optical probe and near-field optical microscope Expired - Lifetime DE29814972U1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE29814972U DE29814972U1 (en) 1998-08-21 1998-08-21 Near-field optical probe and near-field optical microscope
DE19902235A DE19902235B4 (en) 1998-08-21 1999-01-21 Near-field optical probe and near-field optical microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE29814972U DE29814972U1 (en) 1998-08-21 1998-08-21 Near-field optical probe and near-field optical microscope

Publications (1)

Publication Number Publication Date
DE29814972U1 true DE29814972U1 (en) 1999-12-30

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Family Applications (2)

Application Number Title Priority Date Filing Date
DE29814972U Expired - Lifetime DE29814972U1 (en) 1998-08-21 1998-08-21 Near-field optical probe and near-field optical microscope
DE19902235A Expired - Lifetime DE19902235B4 (en) 1998-08-21 1999-01-21 Near-field optical probe and near-field optical microscope

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE19902235A Expired - Lifetime DE19902235B4 (en) 1998-08-21 1999-01-21 Near-field optical probe and near-field optical microscope

Country Status (1)

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DE (2) DE29814972U1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008057100A1 (en) * 2008-11-13 2010-11-11 Carl Zeiss Ag Investigation unit for optical microscope for performing near-field optical microscopy, has holding device and near-field probe that produces optical near field by illuminating with excitation light for investigation of sample

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112402B1 (en) * 1982-12-27 1987-08-05 International Business Machines Corporation Light waveguide with a submicron aperture, method for manufacturing the waveguide and application of the waveguide in an optical memory
EP0112401B1 (en) * 1982-12-27 1987-04-22 International Business Machines Corporation Optical near-field scanning microscope
US5272330A (en) * 1990-11-19 1993-12-21 At&T Bell Laboratories Near field scanning optical microscope having a tapered waveguide
EP0487233B1 (en) * 1990-11-19 1996-03-20 AT&T Corp. Near field scanning optical microscope and applications thereof
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
JP3047030B2 (en) * 1993-11-05 2000-05-29 セイコーインスツルメンツ株式会社 Scanning near-field atomic force microscope
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US5756997A (en) * 1996-03-04 1998-05-26 General Nanotechnology, L.L.C. Scanning probe/optical microscope with modular objective/probe and drive/detector units
DE19604363A1 (en) * 1995-02-23 1996-08-29 Zeiss Carl Fa Auxiliary fibre optic focussing module for microscopy

Also Published As

Publication number Publication date
DE19902235A1 (en) 2000-02-24
DE19902235B4 (en) 2004-08-05

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