DE29701418U1 - Mikromechanisch gefertigte Flußrestriktionsvorrichtung - Google Patents

Mikromechanisch gefertigte Flußrestriktionsvorrichtung

Info

Publication number
DE29701418U1
DE29701418U1 DE29701418U DE29701418U DE29701418U1 DE 29701418 U1 DE29701418 U1 DE 29701418U1 DE 29701418 U DE29701418 U DE 29701418U DE 29701418 U DE29701418 U DE 29701418U DE 29701418 U1 DE29701418 U1 DE 29701418U1
Authority
DE
Germany
Prior art keywords
flow restriction
restriction device
micromechanically manufactured
manufactured flow
micromechanically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29701418U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE29701418U priority Critical patent/DE29701418U1/de
Publication of DE29701418U1 publication Critical patent/DE29701418U1/de
Priority to PCT/EP1997/006342 priority patent/WO1998025110A1/de
Priority to US09/319,169 priority patent/US6263741B1/en
Priority to EP97951190A priority patent/EP0943076B1/de
Priority to DE59701675T priority patent/DE59701675D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
DE29701418U 1996-12-03 1997-01-28 Mikromechanisch gefertigte Flußrestriktionsvorrichtung Expired - Lifetime DE29701418U1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE29701418U DE29701418U1 (de) 1996-12-03 1997-01-28 Mikromechanisch gefertigte Flußrestriktionsvorrichtung
PCT/EP1997/006342 WO1998025110A1 (de) 1996-12-03 1997-11-13 Mikromechanisch gefertigte flussrestriktionsvorrichtung
US09/319,169 US6263741B1 (en) 1996-12-03 1997-11-13 Micromechanically produced flow-restriction device
EP97951190A EP0943076B1 (de) 1996-12-03 1997-11-13 Mikromechanisch gefertigte flussrestriktionsvorrichtung
DE59701675T DE59701675D1 (de) 1996-12-03 1997-11-13 Mikromechanisch gefertigte flussrestriktionsvorrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19650116A DE19650116C1 (de) 1996-12-03 1996-12-03 Mikromechanisch gefertigte Flußrestriktionsvorrichtung
DE29701418U DE29701418U1 (de) 1996-12-03 1997-01-28 Mikromechanisch gefertigte Flußrestriktionsvorrichtung

Publications (1)

Publication Number Publication Date
DE29701418U1 true DE29701418U1 (de) 1997-04-30

Family

ID=7813506

Family Applications (3)

Application Number Title Priority Date Filing Date
DE19650116A Expired - Fee Related DE19650116C1 (de) 1996-12-03 1996-12-03 Mikromechanisch gefertigte Flußrestriktionsvorrichtung
DE29701418U Expired - Lifetime DE29701418U1 (de) 1996-12-03 1997-01-28 Mikromechanisch gefertigte Flußrestriktionsvorrichtung
DE59701675T Expired - Fee Related DE59701675D1 (de) 1996-12-03 1997-11-13 Mikromechanisch gefertigte flussrestriktionsvorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19650116A Expired - Fee Related DE19650116C1 (de) 1996-12-03 1996-12-03 Mikromechanisch gefertigte Flußrestriktionsvorrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59701675T Expired - Fee Related DE59701675D1 (de) 1996-12-03 1997-11-13 Mikromechanisch gefertigte flussrestriktionsvorrichtung

Country Status (1)

Country Link
DE (3) DE19650116C1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19849700C2 (de) 1998-10-28 2001-06-28 Festo Ag & Co Mikroventilanordnung
DE102010051743B4 (de) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmierbares Hydrocephalusventil
DE102015110711A1 (de) * 2015-07-02 2017-01-05 Endress+Hauser Flowtec Ag MEMS Sensor zu Messung mindestens einer Messgröße eines strömenden Fluids
CN112129328A (zh) * 2020-08-13 2020-12-25 江苏大学 一种微型风压风速集成传感器及制作和检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
DD285188A5 (de) * 1989-06-23 1990-12-05 Veb Elektromat Dresden,Dd Durchflusssensor mit kapillare
US5082242A (en) * 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication

Also Published As

Publication number Publication date
DE59701675D1 (de) 2000-06-15
DE19650116C1 (de) 1998-04-02

Similar Documents

Publication Publication Date Title
NO20023982D0 (no) Nedihull-strömningsreguleringsanordning
FI974019A (fi) Virtausanturi
NO993575L (no) Ny anordning
NO970647D0 (no) Fluidtap-anordning
DE69817754D1 (de) Ventileinrichtung
DE69814296D1 (de) Ventilvorrichtung
DK0908705T3 (da) Masseflowmåleapparat
DE59702642D1 (de) Luftdurchströmungsvorrichtung
NO964615L (no) Fluidström-koplingsanordning
DE69718097T2 (de) Ventilvorrichtung
FI973441A (fi) Virtausmittari
DE29622602U1 (de) Durchflußmeßeinrichtung
DE29701418U1 (de) Mikromechanisch gefertigte Flußrestriktionsvorrichtung
DE69705431T2 (de) Stromsteuerungsgerät
DE59712875D1 (de) Durchflusssensor
DE69825294D1 (de) Durchflussmessung
DE69715022D1 (de) Ventileinrichtung
DE29707990U1 (de) Einlaufvorrichtung
DE29600871U1 (de) Gruppiervorrichtung
DK0943076T3 (da) Mikromekanisk fremstillet strømningsrestriktionsindretning
DE9409318U1 (de) Strömungssensor
FR2745376B1 (fr) Doseur debitmetrique
DE59803293D1 (de) Ventileinrichtung
DE29602171U1 (de) Ventilvorrichtung
DE29621774U1 (de) Mediengerät

Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19970612

R156 Lapse of ip right after 3 years

Effective date: 20001101