DE2964232D1 - Electron beam investigation process and electron impact spectrometer therefor - Google Patents

Electron beam investigation process and electron impact spectrometer therefor

Info

Publication number
DE2964232D1
DE2964232D1 DE7979105288T DE2964232T DE2964232D1 DE 2964232 D1 DE2964232 D1 DE 2964232D1 DE 7979105288 T DE7979105288 T DE 7979105288T DE 2964232 T DE2964232 T DE 2964232T DE 2964232 D1 DE2964232 D1 DE 2964232D1
Authority
DE
Germany
Prior art keywords
electron
investigation process
electron beam
therefor
impact spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE7979105288T
Other languages
English (en)
Inventor
Hermann Dr Froitzheim
Harald Prof Dr Ibach
Heinz-Dieter Bruchmann
Sieghard Dr Lehwald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Priority to DE7979105288T priority Critical patent/DE2964232D1/de
Application granted granted Critical
Publication of DE2964232D1 publication Critical patent/DE2964232D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
DE7979105288T 1978-12-27 1979-12-20 Electron beam investigation process and electron impact spectrometer therefor Expired DE2964232D1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE7979105288T DE2964232D1 (en) 1978-12-27 1979-12-20 Electron beam investigation process and electron impact spectrometer therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19782856244 DE2856244A1 (de) 1978-12-27 1978-12-27 Elektronenstosspektrometer
DE7979105288T DE2964232D1 (en) 1978-12-27 1979-12-20 Electron beam investigation process and electron impact spectrometer therefor

Publications (1)

Publication Number Publication Date
DE2964232D1 true DE2964232D1 (en) 1983-01-13

Family

ID=6058440

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19782856244 Ceased DE2856244A1 (de) 1978-12-27 1978-12-27 Elektronenstosspektrometer
DE7979105288T Expired DE2964232D1 (en) 1978-12-27 1979-12-20 Electron beam investigation process and electron impact spectrometer therefor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19782856244 Ceased DE2856244A1 (de) 1978-12-27 1978-12-27 Elektronenstosspektrometer

Country Status (4)

Country Link
US (1) US4300045A (de)
EP (1) EP0013003B1 (de)
JP (1) JPS5590848A (de)
DE (2) DE2856244A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8322017D0 (en) * 1983-08-16 1983-09-21 Vg Instr Ltd Charged particle energy spectrometer
US4742223A (en) * 1984-05-23 1988-05-03 Indiana University Foundation High resolution particle spectrometer
US4559449A (en) * 1984-05-23 1985-12-17 Indiana University Foundation High resolution particle spectrometer
US4659926A (en) * 1984-05-23 1987-04-21 Indiana University Foundation High resolution particle spectrometer
GB8604256D0 (en) * 1986-02-20 1986-03-26 Univ Manchester Electron spectrometer
DE3702696A1 (de) * 1987-01-30 1988-08-11 Kernforschungsanlage Juelich Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer
FR2666171B1 (fr) * 1990-08-24 1992-10-16 Cameca Spectrometre de masse stigmatique a haute transmission.
JP3514070B2 (ja) * 1997-04-25 2004-03-31 株式会社日立製作所 走査電子顕微鏡
EP1941533A4 (de) * 2005-09-30 2010-09-29 Hazardscan Inc Mehrfach-energie-frachtuntersuchungssystem auf der basis eines elektronenbeschleunigers

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL60887C (de) * 1940-07-03
US3313936A (en) * 1964-01-06 1967-04-11 Varian Associates Low energy electron diffraction apparatus having three concentric tubular focusing elctrodes
US3480774A (en) * 1967-05-26 1969-11-25 Minnesota Mining & Mfg Low-energy ion scattering apparatus and method for analyzing the surface of a solid
US3806728A (en) * 1970-05-27 1974-04-23 C Lindholm Electron impact spectrometer with an improved source of monochromatic electrons
NL7301496A (de) * 1973-02-02 1974-08-06
NL7317436A (nl) * 1973-12-20 1975-06-24 Philips Nv Inrichting voor massa-analyse en structuur-analyse van een oppervlaklaag door middel van ionenver- strooiing.
JPS5117439A (en) * 1974-08-02 1976-02-12 Ono Gijutsu Kenkyusho Jugen Genzoekitono shunotanku
US3980919A (en) * 1974-12-20 1976-09-14 Watkins-Johnson Company Rectangular beam laminar flow electron gun
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer

Also Published As

Publication number Publication date
US4300045A (en) 1981-11-10
JPS5590848A (en) 1980-07-09
EP0013003A1 (de) 1980-07-09
DE2856244A1 (de) 1980-07-03
EP0013003B1 (de) 1982-12-08

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: FORSCHUNGSZENTRUM JUELICH GMBH, 5170 JUELICH, DE

8339 Ceased/non-payment of the annual fee