DE29603953U1 - Rohrförmige Hohlkatode für hohe elektrische Leistungen - Google Patents
Rohrförmige Hohlkatode für hohe elektrische LeistungenInfo
- Publication number
- DE29603953U1 DE29603953U1 DE29603953U DE29603953U DE29603953U1 DE 29603953 U1 DE29603953 U1 DE 29603953U1 DE 29603953 U DE29603953 U DE 29603953U DE 29603953 U DE29603953 U DE 29603953U DE 29603953 U1 DE29603953 U1 DE 29603953U1
- Authority
- DE
- Germany
- Prior art keywords
- high electrical
- hollow cathode
- tubular hollow
- electrical outputs
- outputs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32596—Hollow cathodes
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE29603953U DE29603953U1 (de) | 1995-07-31 | 1996-03-04 | Rohrförmige Hohlkatode für hohe elektrische Leistungen |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19528032 | 1995-07-31 | ||
DE29603953U DE29603953U1 (de) | 1995-07-31 | 1996-03-04 | Rohrförmige Hohlkatode für hohe elektrische Leistungen |
Publications (1)
Publication Number | Publication Date |
---|---|
DE29603953U1 true DE29603953U1 (de) | 1996-06-20 |
Family
ID=7768278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE29603953U Expired - Lifetime DE29603953U1 (de) | 1995-07-31 | 1996-03-04 | Rohrförmige Hohlkatode für hohe elektrische Leistungen |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE29603953U1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10245392B3 (de) * | 2002-09-28 | 2004-01-08 | Vtd Vakuumtechnik Dresden Gmbh | Rohrförmige Hohlkathode für hohe elektrische Leistungen |
-
1996
- 1996-03-04 DE DE29603953U patent/DE29603953U1/de not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10245392B3 (de) * | 2002-09-28 | 2004-01-08 | Vtd Vakuumtechnik Dresden Gmbh | Rohrförmige Hohlkathode für hohe elektrische Leistungen |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R207 | Utility model specification |
Effective date: 19960801 |
|
R150 | Term of protection extended to 6 years |
Effective date: 19990902 |
|
R151 | Term of protection extended to 8 years |
Effective date: 20020822 |
|
R158 | Lapse of ip right after 8 years |
Effective date: 20041001 |